JPS6225212A - 相対変位量測定装置 - Google Patents

相対変位量測定装置

Info

Publication number
JPS6225212A
JPS6225212A JP16523185A JP16523185A JPS6225212A JP S6225212 A JPS6225212 A JP S6225212A JP 16523185 A JP16523185 A JP 16523185A JP 16523185 A JP16523185 A JP 16523185A JP S6225212 A JPS6225212 A JP S6225212A
Authority
JP
Japan
Prior art keywords
diffraction grating
diffraction
stage
wave
diffracted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16523185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0429012B2 (enExample
Inventor
Junji Ito
順司 伊藤
Toshihiko Kanayama
敏彦 金山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP16523185A priority Critical patent/JPS6225212A/ja
Publication of JPS6225212A publication Critical patent/JPS6225212A/ja
Publication of JPH0429012B2 publication Critical patent/JPH0429012B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP16523185A 1985-07-26 1985-07-26 相対変位量測定装置 Granted JPS6225212A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16523185A JPS6225212A (ja) 1985-07-26 1985-07-26 相対変位量測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16523185A JPS6225212A (ja) 1985-07-26 1985-07-26 相対変位量測定装置

Publications (2)

Publication Number Publication Date
JPS6225212A true JPS6225212A (ja) 1987-02-03
JPH0429012B2 JPH0429012B2 (enExample) 1992-05-15

Family

ID=15808350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16523185A Granted JPS6225212A (ja) 1985-07-26 1985-07-26 相対変位量測定装置

Country Status (1)

Country Link
JP (1) JPS6225212A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5000572A (en) * 1987-05-11 1991-03-19 Canon Kabushiki Kaisha Distance measuring system
JPH06194124A (ja) * 1992-12-24 1994-07-15 Canon Inc 変位検出装置
JP2003035570A (ja) * 2001-05-18 2003-02-07 Tokyo Seimitsu Co Ltd 回折干渉式リニアスケール
JP2004069702A (ja) * 2002-08-07 2004-03-04 Dr Johannes Heidenhain Gmbh 干渉式位置測定装置
JP2008182249A (ja) * 2003-10-22 2008-08-07 Asml Netherlands Bv リソグラフィ装置及びデバイスの製造方法並びに測定装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5023617A (enExample) * 1973-06-29 1975-03-13
JPS5561608A (en) * 1978-11-02 1980-05-09 Mac Gregor Far East Ltd Wave cancelling apparatus
JPS6098302A (ja) * 1983-11-04 1985-06-01 Sony Magnescale Inc 光学式変位測定装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5023617A (enExample) * 1973-06-29 1975-03-13
JPS5561608A (en) * 1978-11-02 1980-05-09 Mac Gregor Far East Ltd Wave cancelling apparatus
JPS6098302A (ja) * 1983-11-04 1985-06-01 Sony Magnescale Inc 光学式変位測定装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5000572A (en) * 1987-05-11 1991-03-19 Canon Kabushiki Kaisha Distance measuring system
JPH06194124A (ja) * 1992-12-24 1994-07-15 Canon Inc 変位検出装置
JP2003035570A (ja) * 2001-05-18 2003-02-07 Tokyo Seimitsu Co Ltd 回折干渉式リニアスケール
JP2004069702A (ja) * 2002-08-07 2004-03-04 Dr Johannes Heidenhain Gmbh 干渉式位置測定装置
JP2008182249A (ja) * 2003-10-22 2008-08-07 Asml Netherlands Bv リソグラフィ装置及びデバイスの製造方法並びに測定装置

Also Published As

Publication number Publication date
JPH0429012B2 (enExample) 1992-05-15

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term