JPS6225212A - 相対変位量測定装置 - Google Patents
相対変位量測定装置Info
- Publication number
- JPS6225212A JPS6225212A JP16523185A JP16523185A JPS6225212A JP S6225212 A JPS6225212 A JP S6225212A JP 16523185 A JP16523185 A JP 16523185A JP 16523185 A JP16523185 A JP 16523185A JP S6225212 A JPS6225212 A JP S6225212A
- Authority
- JP
- Japan
- Prior art keywords
- diffraction grating
- diffraction
- stage
- wave
- diffracted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 41
- 238000000034 method Methods 0.000 title claims description 28
- 230000001427 coherent effect Effects 0.000 claims description 22
- 230000008859 change Effects 0.000 claims description 14
- 238000000691 measurement method Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 17
- 239000004065 semiconductor Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000000873 masking effect Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 101100234408 Danio rerio kif7 gene Proteins 0.000 description 1
- 101100221620 Drosophila melanogaster cos gene Proteins 0.000 description 1
- 101100398237 Xenopus tropicalis kif11 gene Proteins 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16523185A JPS6225212A (ja) | 1985-07-26 | 1985-07-26 | 相対変位量測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16523185A JPS6225212A (ja) | 1985-07-26 | 1985-07-26 | 相対変位量測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6225212A true JPS6225212A (ja) | 1987-02-03 |
| JPH0429012B2 JPH0429012B2 (enExample) | 1992-05-15 |
Family
ID=15808350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16523185A Granted JPS6225212A (ja) | 1985-07-26 | 1985-07-26 | 相対変位量測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6225212A (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5000572A (en) * | 1987-05-11 | 1991-03-19 | Canon Kabushiki Kaisha | Distance measuring system |
| JPH06194124A (ja) * | 1992-12-24 | 1994-07-15 | Canon Inc | 変位検出装置 |
| JP2003035570A (ja) * | 2001-05-18 | 2003-02-07 | Tokyo Seimitsu Co Ltd | 回折干渉式リニアスケール |
| JP2004069702A (ja) * | 2002-08-07 | 2004-03-04 | Dr Johannes Heidenhain Gmbh | 干渉式位置測定装置 |
| JP2008182249A (ja) * | 2003-10-22 | 2008-08-07 | Asml Netherlands Bv | リソグラフィ装置及びデバイスの製造方法並びに測定装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5023617A (enExample) * | 1973-06-29 | 1975-03-13 | ||
| JPS5561608A (en) * | 1978-11-02 | 1980-05-09 | Mac Gregor Far East Ltd | Wave cancelling apparatus |
| JPS6098302A (ja) * | 1983-11-04 | 1985-06-01 | Sony Magnescale Inc | 光学式変位測定装置 |
-
1985
- 1985-07-26 JP JP16523185A patent/JPS6225212A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5023617A (enExample) * | 1973-06-29 | 1975-03-13 | ||
| JPS5561608A (en) * | 1978-11-02 | 1980-05-09 | Mac Gregor Far East Ltd | Wave cancelling apparatus |
| JPS6098302A (ja) * | 1983-11-04 | 1985-06-01 | Sony Magnescale Inc | 光学式変位測定装置 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5000572A (en) * | 1987-05-11 | 1991-03-19 | Canon Kabushiki Kaisha | Distance measuring system |
| JPH06194124A (ja) * | 1992-12-24 | 1994-07-15 | Canon Inc | 変位検出装置 |
| JP2003035570A (ja) * | 2001-05-18 | 2003-02-07 | Tokyo Seimitsu Co Ltd | 回折干渉式リニアスケール |
| JP2004069702A (ja) * | 2002-08-07 | 2004-03-04 | Dr Johannes Heidenhain Gmbh | 干渉式位置測定装置 |
| JP2008182249A (ja) * | 2003-10-22 | 2008-08-07 | Asml Netherlands Bv | リソグラフィ装置及びデバイスの製造方法並びに測定装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0429012B2 (enExample) | 1992-05-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |