JPH0439897B2 - - Google Patents
Info
- Publication number
- JPH0439897B2 JPH0439897B2 JP1536986A JP1536986A JPH0439897B2 JP H0439897 B2 JPH0439897 B2 JP H0439897B2 JP 1536986 A JP1536986 A JP 1536986A JP 1536986 A JP1536986 A JP 1536986A JP H0439897 B2 JPH0439897 B2 JP H0439897B2
- Authority
- JP
- Japan
- Prior art keywords
- diffraction grating
- diffraction
- diffracted
- relative displacement
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 36
- 238000000034 method Methods 0.000 claims description 9
- 238000005259 measurement Methods 0.000 description 8
- 238000007796 conventional method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000001015 X-ray lithography Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 230000001427 coherent effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000012886 linear function Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1536986A JPS62172204A (ja) | 1986-01-27 | 1986-01-27 | 相対変位測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1536986A JPS62172204A (ja) | 1986-01-27 | 1986-01-27 | 相対変位測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62172204A JPS62172204A (ja) | 1987-07-29 |
| JPH0439897B2 true JPH0439897B2 (enExample) | 1992-07-01 |
Family
ID=11886870
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1536986A Granted JPS62172204A (ja) | 1986-01-27 | 1986-01-27 | 相対変位測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62172204A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3199549B2 (ja) * | 1993-12-31 | 2001-08-20 | 株式会社リコー | エンコーダ装置 |
| JP3256628B2 (ja) * | 1994-05-23 | 2002-02-12 | 株式会社リコー | エンコーダ装置 |
| JP3641316B2 (ja) * | 1995-05-08 | 2005-04-20 | 松下電器産業株式会社 | 光学式エンコーダ |
| TWI473970B (zh) * | 2009-10-05 | 2015-02-21 | Taiyo Yuden Kk | Displacement measurement method and displacement measurement device |
-
1986
- 1986-01-27 JP JP1536986A patent/JPS62172204A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62172204A (ja) | 1987-07-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |