JPS62172204A - 相対変位測定方法 - Google Patents

相対変位測定方法

Info

Publication number
JPS62172204A
JPS62172204A JP1536986A JP1536986A JPS62172204A JP S62172204 A JPS62172204 A JP S62172204A JP 1536986 A JP1536986 A JP 1536986A JP 1536986 A JP1536986 A JP 1536986A JP S62172204 A JPS62172204 A JP S62172204A
Authority
JP
Japan
Prior art keywords
diffraction
relative displacement
cycle
diffracted
diffraction grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1536986A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0439897B2 (enExample
Inventor
Junji Ito
順司 伊藤
Toshihiko Kanayama
敏彦 金山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP1536986A priority Critical patent/JPS62172204A/ja
Publication of JPS62172204A publication Critical patent/JPS62172204A/ja
Publication of JPH0439897B2 publication Critical patent/JPH0439897B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP1536986A 1986-01-27 1986-01-27 相対変位測定方法 Granted JPS62172204A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1536986A JPS62172204A (ja) 1986-01-27 1986-01-27 相対変位測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1536986A JPS62172204A (ja) 1986-01-27 1986-01-27 相対変位測定方法

Publications (2)

Publication Number Publication Date
JPS62172204A true JPS62172204A (ja) 1987-07-29
JPH0439897B2 JPH0439897B2 (enExample) 1992-07-01

Family

ID=11886870

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1536986A Granted JPS62172204A (ja) 1986-01-27 1986-01-27 相対変位測定方法

Country Status (1)

Country Link
JP (1) JPS62172204A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07198424A (ja) * 1993-12-31 1995-08-01 Ricoh Co Ltd エンコーダ装置
JPH07318373A (ja) * 1994-05-23 1995-12-08 Ricoh Co Ltd エンコーダ装置
JPH09113316A (ja) * 1995-05-08 1997-05-02 Matsushita Electric Ind Co Ltd 光学式エンコーダ
JPWO2011043354A1 (ja) * 2009-10-05 2013-03-04 太陽誘電株式会社 変位計測方法及び変位計測装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07198424A (ja) * 1993-12-31 1995-08-01 Ricoh Co Ltd エンコーダ装置
JPH07318373A (ja) * 1994-05-23 1995-12-08 Ricoh Co Ltd エンコーダ装置
JPH09113316A (ja) * 1995-05-08 1997-05-02 Matsushita Electric Ind Co Ltd 光学式エンコーダ
JPWO2011043354A1 (ja) * 2009-10-05 2013-03-04 太陽誘電株式会社 変位計測方法及び変位計測装置

Also Published As

Publication number Publication date
JPH0439897B2 (enExample) 1992-07-01

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Legal Events

Date Code Title Description
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