JPS62218889A - 真空吸着機構付き静圧気体軸受スピンドル - Google Patents

真空吸着機構付き静圧気体軸受スピンドル

Info

Publication number
JPS62218889A
JPS62218889A JP6311686A JP6311686A JPS62218889A JP S62218889 A JPS62218889 A JP S62218889A JP 6311686 A JP6311686 A JP 6311686A JP 6311686 A JP6311686 A JP 6311686A JP S62218889 A JPS62218889 A JP S62218889A
Authority
JP
Japan
Prior art keywords
housing
hollow shaft
grooves
gas bearing
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6311686A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0582907B2 (en:Method
Inventor
秀樹 岡谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NSK Ltd
Original Assignee
NSK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NSK Ltd filed Critical NSK Ltd
Priority to JP6311686A priority Critical patent/JPS62218889A/ja
Publication of JPS62218889A publication Critical patent/JPS62218889A/ja
Publication of JPH0582907B2 publication Critical patent/JPH0582907B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP6311686A 1986-03-20 1986-03-20 真空吸着機構付き静圧気体軸受スピンドル Granted JPS62218889A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6311686A JPS62218889A (ja) 1986-03-20 1986-03-20 真空吸着機構付き静圧気体軸受スピンドル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6311686A JPS62218889A (ja) 1986-03-20 1986-03-20 真空吸着機構付き静圧気体軸受スピンドル

Publications (2)

Publication Number Publication Date
JPS62218889A true JPS62218889A (ja) 1987-09-26
JPH0582907B2 JPH0582907B2 (en:Method) 1993-11-22

Family

ID=13219991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6311686A Granted JPS62218889A (ja) 1986-03-20 1986-03-20 真空吸着機構付き静圧気体軸受スピンドル

Country Status (1)

Country Link
JP (1) JPS62218889A (en:Method)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0257721A (ja) * 1988-08-22 1990-02-27 Canon Inc 真空用エアーベアリング
JP2004257499A (ja) * 2003-02-27 2004-09-16 Pentax Corp スピンドル装置の冷却構造
CN103016529A (zh) * 2012-12-31 2013-04-03 浙江工业大学 不受气管扰动和高压气体影响的气浮组合装置
CN103016530A (zh) * 2012-12-31 2013-04-03 浙江工业大学 无气管弯曲扰动影响的旋转供气装置
EP2682567A1 (en) * 2012-07-06 2014-01-08 General Electric Company Aerodynamic seals for rotary machine
WO2014022290A1 (en) * 2012-07-31 2014-02-06 General Electric Company Film riding seals for rotary machines

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5755567A (en) * 1980-09-22 1982-04-02 Matsushita Electric Ind Co Ltd Tracking controller
JPS5791249U (en:Method) * 1980-11-26 1982-06-04
JPS5928745U (ja) * 1982-08-12 1984-02-22 シャープ株式会社 カ−ド読取装置のストツパ−機構
JPS59219155A (ja) * 1983-05-26 1984-12-10 Matsushita Electric Ind Co Ltd 研磨加工機
JPS59219152A (ja) * 1983-05-26 1984-12-10 Matsushita Electric Ind Co Ltd 研磨加工機
JPS629805A (ja) * 1985-07-03 1987-01-17 Hitachi Ltd 空気軸受型回転継手
JPS62193704A (ja) * 1986-02-20 1987-08-25 Hitachi Ltd 超精密旋盤

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5755567A (en) * 1980-09-22 1982-04-02 Matsushita Electric Ind Co Ltd Tracking controller
JPS5791249U (en:Method) * 1980-11-26 1982-06-04
JPS5928745U (ja) * 1982-08-12 1984-02-22 シャープ株式会社 カ−ド読取装置のストツパ−機構
JPS59219155A (ja) * 1983-05-26 1984-12-10 Matsushita Electric Ind Co Ltd 研磨加工機
JPS59219152A (ja) * 1983-05-26 1984-12-10 Matsushita Electric Ind Co Ltd 研磨加工機
JPS629805A (ja) * 1985-07-03 1987-01-17 Hitachi Ltd 空気軸受型回転継手
JPS62193704A (ja) * 1986-02-20 1987-08-25 Hitachi Ltd 超精密旋盤

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0257721A (ja) * 1988-08-22 1990-02-27 Canon Inc 真空用エアーベアリング
JP2004257499A (ja) * 2003-02-27 2004-09-16 Pentax Corp スピンドル装置の冷却構造
EP2682567A1 (en) * 2012-07-06 2014-01-08 General Electric Company Aerodynamic seals for rotary machine
US9255642B2 (en) 2012-07-06 2016-02-09 General Electric Company Aerodynamic seals for rotary machine
WO2014022290A1 (en) * 2012-07-31 2014-02-06 General Electric Company Film riding seals for rotary machines
US9587746B2 (en) 2012-07-31 2017-03-07 General Electric Company Film riding seals for rotary machines
CN103016529A (zh) * 2012-12-31 2013-04-03 浙江工业大学 不受气管扰动和高压气体影响的气浮组合装置
CN103016530A (zh) * 2012-12-31 2013-04-03 浙江工业大学 无气管弯曲扰动影响的旋转供气装置

Also Published As

Publication number Publication date
JPH0582907B2 (en:Method) 1993-11-22

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