JPS62194640A - Semiconductor integrated circuit using bump mounting - Google Patents
Semiconductor integrated circuit using bump mountingInfo
- Publication number
- JPS62194640A JPS62194640A JP61036159A JP3615986A JPS62194640A JP S62194640 A JPS62194640 A JP S62194640A JP 61036159 A JP61036159 A JP 61036159A JP 3615986 A JP3615986 A JP 3615986A JP S62194640 A JPS62194640 A JP S62194640A
- Authority
- JP
- Japan
- Prior art keywords
- chip
- gate
- internal
- gate cells
- bumps
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 14
- 239000000872 buffer Substances 0.000 claims description 10
- 230000000694 effects Effects 0.000 abstract description 4
- 239000006185 dispersion Substances 0.000 abstract 1
- 238000005192 partition Methods 0.000 abstract 1
- 238000004904 shortening Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 239000013039 cover film Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、バンプ実装を用いる半導体集積回路特に該バ
ンプ及び外、内部ゲートセルのチップ上レイアウト方法
に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a semiconductor integrated circuit using bump mounting, and more particularly to a method for laying out bumps and outer and inner gate cells on a chip.
半導体集積回路ではその半導体チップとパッケージの端
子ピンとの接続にはワイヤボンディングが広く用いられ
ている。この場合は半導体チップの周辺に多数のポンデ
ィングパッドが設けられ、またパッケージ基板にも端子
ピンと接続する多数のポンディングパッドが設けられ、
これらのパッド間がそれぞれワイヤにより接続される。Wire bonding is widely used in semiconductor integrated circuits to connect semiconductor chips to terminal pins of packages. In this case, a large number of bonding pads are provided around the semiconductor chip, and a large number of bonding pads are also provided on the package substrate to connect with terminal pins.
Each of these pads is connected by a wire.
ゲートアレイLSIではチップ上に多数の外部ゲート(
I/Oゲート)及び内部ゲートが作られるが、ワイヤボ
ンディング方式のものでは内部ゲートはチップ中央部に
、I/Oゲートはポンディングパッドと内部ゲートとの
間の環状領域に作られることになる。Gate array LSI has many external gates (
An I/O gate) and an internal gate are created, but in the wire bonding method, the internal gate is created in the center of the chip, and the I/O gate is created in the annular area between the bonding pad and the internal gate. .
チップとその取付基板との接続にはバンプ方式も用いら
れる。これはチップ上に複数個の半球状小塊(バンプ)
を作っておき、基板側には複数個のパッドを作っておき
、これらのバンプをパッドに結合(半田バンプなら加熱
による半田付け)させることにより、チップと基板との
接続を行なう。A bump method is also used to connect the chip and its mounting board. This is multiple hemispherical nodules (bumps) on the chip.
A plurality of pads are made on the substrate side, and the chip and the substrate are connected by bonding these bumps to the pads (soldering by heating if they are solder bumps).
このバンプ方式は個別部品だけでな(集積回路にも用い
られている。This bump method is used not only for individual components, but also for integrated circuits.
ところでゲートアレイLSIでは、I/Oゲートセル及
び内部ゲートセルの配置は、該LSIのチップサイズ及
び性能に大きく影響する。ポンディングパッド又はバン
プをチップ周辺、内部ゲートはチップ中央、I/Oゲー
トはこれらの間に配設したゲートアレイLSIではチッ
プ上の配線長が長くなる場合が生じ、チップサイズ及び
又は性能に悪影響を及ぼす。本発明はI/Oψ−トなど
のレイアウトを変えてこの点を改善しようとするもので
ある。By the way, in a gate array LSI, the arrangement of I/O gate cells and internal gate cells greatly affects the chip size and performance of the LSI. In gate array LSIs in which bonding pads or bumps are placed on the periphery of the chip, internal gates are placed in the center of the chip, and I/O gates are placed between them, the wiring length on the chip may become long, which adversely affects the chip size and/or performance. effect. The present invention attempts to improve this point by changing the layout of the I/O ψ ports.
本発明のバンブ実装を用いる半導体集積回路は、半導体
チップの全面に多数のバンプを分散配置し、ゲートアレ
イのI/Oゲートセルを、該チップの周辺及びチップ面
を複数個に区分する線に沿って配列し、内部ゲートセル
を該区分された領域の内部に配設したことを特徴とする
ものである。A semiconductor integrated circuit using bump mounting according to the present invention has a large number of bumps distributed over the entire surface of a semiconductor chip, and I/O gate cells of a gate array are arranged along lines dividing the periphery of the chip and the chip surface into a plurality of parts. The device is characterized in that the internal gate cells are arranged inside the divided regions.
本発明では第1図に示すようにバンプ/Oをチップ12
の全面に分散配置し、I/Oゲートセル14はチップ周
辺と、その内部を区分する線上に配置し、内部ゲートセ
ルはI/Oゲートセル14で囲まれた領域16内に配置
する。本例ではチップ12を2分しており、I/Oゲー
トセルアレイは8字状をなし、内部ゲートセルはその2
つの内部領域に配設される。勿論2分割でなく、4分割
、8分割等にしてもよい。In the present invention, the bumps/O are connected to the chip 12 as shown in FIG.
The I/O gate cells 14 are arranged on a line that separates the periphery of the chip from the inside thereof, and the internal gate cells are arranged within a region 16 surrounded by the I/O gate cells 14. In this example, the chip 12 is divided into two parts, the I/O gate cell array is shaped like a figure eight, and the internal gate cells are divided into two parts.
located in two internal areas. Of course, instead of dividing into two, it may be divided into four, eight, etc.
このようにすると大きなサイズのチップも、2分割、4
分割、・・・・・ルた小サイズのチ・ノブの集合となり
、その小サイズチップの周辺にI/Oゲート、内部に内
部ゲートが配設されたLSIとなって平均配線長の低減
が可能になる。また内部ゲートの高集積化も可能になる
。In this way, even large chips can be divided into two parts or four parts.
Division... It becomes a collection of small-sized chips and knobs, and an LSI with I/O gates arranged around the small-sized chip and internal gates inside, reducing the average wiring length. It becomes possible. It also enables high integration of internal gates.
第1図ではI/Oゲートセル14はバンプ/Oの直下に
あるが、これは第2図に示すように各ノくノブの間に設
けてもよい。第1図のようにI/Oゲート上にバンプを
設ける場合は、各1/Oゲートセルの間の領域がチャネ
ル(電源及び信号配線の走る領域)になる。第2図の場
合はバンプの直下がチャネルになる。なおチャネルに余
裕があれば、この部分にも内部ゲートを設けてよい。電
源配線はIRドロップによる電位降下(Vce側)又は
電位上昇(Vss側)が問題になることがあるが、この
対策としてパッケージ電源端子ピンを複数個にし、つれ
てチップの電源用ポンディングパッド又はバンプも複数
個にすることがある。第1図第2図の斜線を付したバン
プは電源用で、複数個設けである。バンプには許容電流
値があるので、この点からも複数化は必要である。斜線
のないバンプが信号出力用である。Although the I/O gate cell 14 is shown in FIG. 1 directly below the bump/O, it may also be provided between each knob as shown in FIG. When bumps are provided on the I/O gates as shown in FIG. 1, the region between each 1/O gate cell becomes a channel (a region where power supply and signal lines run). In the case of FIG. 2, the channel is directly below the bump. Note that if there is room for the channel, an internal gate may be provided in this portion as well. Power supply wiring may have problems with potential drop (on the Vce side) or potential rise (on the Vss side) due to IR drop, but as a countermeasure to this problem, the package has multiple power supply terminal pins, and as a result, the chip's power supply bonding pad or There may also be multiple bumps. The hatched bumps in FIGS. 1 and 2 are for power supply, and a plurality of bumps are provided. Since each bump has a permissible current value, it is necessary to have a plurality of bumps from this point of view as well. Bumps without diagonal lines are for signal output.
ゲートアレイLSIではE/Oバッファと内部ゲートの
接続は第3図(alに示すようになっており、入力バッ
ファ14a−内部ゲート18−出力バッファ14bの構
成を有する。ECLゲートアレイではこれらは第3図(
b)に示す構造を有する。即ち各々はトランジスタ2個
を、それらのエミッタを共通に定電流源トランジスタへ
接続してなる差動対と、その負荷抵抗へベースを接続し
た一対の出力段トランジスタからなり、入力バッファ1
4aでは端子T+が入力用、T2が基準電圧VBB用、
端子T3.T4が出力用である。また内部ゲート18で
は端子T5が入力用、T6が基準電圧Vr用、T7.T
llが出力用、そして出力バッファ14bにおいては端
子T9が入力用、TXoが基準電圧Vr用、端子T11
* TI2が出力用である。VO2は定電流源トラン
ジスタの電流値を定める電圧である0人、出力バッファ
及び内部ゲートの構成は同じであるが、基準電圧が異な
り、ドライブ能力は入カバソファの方が内部ゲートより
大、そして出力バッファはこれらより大、である。In the gate array LSI, the connection between the E/O buffer and the internal gate is as shown in FIG. Figure 3 (
It has the structure shown in b). That is, each consists of a differential pair consisting of two transistors whose emitters are commonly connected to a constant current source transistor, and a pair of output stage transistors whose bases are connected to the load resistor.
In 4a, terminal T+ is for input, T2 is for reference voltage VBB,
Terminal T3. T4 is for output. Further, in the internal gate 18, terminal T5 is for input, T6 is for reference voltage Vr, T7. T
ll is for output, and in the output buffer 14b, terminal T9 is for input, TXo is for reference voltage Vr, and terminal T11
*TI2 is for output. VO2 is the voltage that determines the current value of the constant current source transistor.The configuration of the output buffer and internal gate is the same, but the reference voltage is different, the drive ability of the input buffer is greater than that of the internal gate, and the output Buffers are larger than these.
第4図(a)はI/Oゲート14内の構造を示す図で、
その領域14aには1個の出力バッファとその基準電圧
Vr発生回路の構成素子が作られ、領域14bには入力
バッファ2個分の構成素子が、そして領域14cには基
準電圧VBBと基準電圧Vr(これはVBBの代りに用
いられる高ドライブ用)発生回路の構成素子が作られる
。第4図(b)、 (C)は領域14b、14cに構成
される素子アレイを示す。FIG. 4(a) is a diagram showing the structure inside the I/O gate 14,
In the region 14a, components for one output buffer and its reference voltage Vr generation circuit are formed, in the region 14b, components for two input buffers, and in the region 14c, the reference voltage VBB and the reference voltage Vr. The components of the generator circuit (for high drive, which is used in place of VBB) are made. FIGS. 4(b) and 4(c) show element arrays constructed in regions 14b and 14c.
第5図(alは内部ゲート18の構成を示す。この領域
の中央に基準電圧Vr発生回路の構成素子((b)に示
す)が設けられ、その両側の各2つの領域には3人力オ
ア/ノア回路などの内部ゲート回路の構成素子((C)
に示す)がそれぞれ設けられる。FIG. 5 (al indicates the configuration of the internal gate 18. In the center of this area, the constituent elements of the reference voltage Vr generation circuit (shown in (b)) are provided, and in each of the two areas on both sides, there are three /Constituent elements of internal gate circuits such as NOR circuits ((C)
) are provided respectively.
第1図に示すようにI/Oゲート14上にバンプ/Oを
形成する場合は第6図に示す如くなる。When a bump/O is formed on the I/O gate 14 as shown in FIG. 1, it becomes as shown in FIG.
即ち半導体基板(チップ)STJBにトランジスタを形
成し、エミフタE1ベースB1コレクタC各電極配線を
取付け、入力端となるベース電極配線にはアルミニウム
A/のパッドを取付け、周囲はカバー膜p s cで覆
い、このパッド上にバンプが形成される。バンプ形成に
は第7図(alに示すように、A7!パッド上にバリア
メタルをひいてその上に半田ボールをのせ、これを加熱
してバンプとする方法、または半田メッキしてバリアメ
タル上に半田ブロックを作り、レジストを除いたのち加
熱して半田ブロックをバンプとする方法などがある。That is, a transistor is formed on a semiconductor substrate (chip) STJB, each electrode wiring of emifter E1 base B1 collector C is attached, a pad of aluminum A/ is attached to the base electrode wiring which becomes the input end, and a cover film psc is attached around it. A bump is formed on this pad. To form a bump, as shown in Figure 7 (al), you can apply a barrier metal on the A7! pad, place a solder ball on top of it, and heat it to form a bump, or solder plate it on the barrier metal. Another method is to make a solder block, remove the resist, and then heat it to turn the solder block into a bump.
以上説明したように本発明ではバンプ実装方式のゲート
アレイLSIのチップを実効時に細分化でき、平均配線
長の低減、電源配線の電位変動の低減、チップサイズの
低減、ゲートアレイの性能向上を図ることができ、甚だ
有効である。As explained above, according to the present invention, a chip of a bump-mounted gate array LSI can be subdivided during effective operation, thereby reducing the average wiring length, reducing the potential fluctuation of the power supply wiring, reducing the chip size, and improving the performance of the gate array. It is possible and very effective.
第1図および第2図は本発明の説明図、第3図は内、外
部ゲートの結線状態及び構成を示す回路図、第4図はI
/Oバッファの説明図、第5図は内部ゲートの説明図、
第6図はゲートとバンプの接続状態の説明図、第7図は
バンプ製作要領の説明図である。
図面で12は半導体チップ、/Oはバンプ、14はI/
Oゲートセル、16は内部ゲートセル形成領域である。1 and 2 are explanatory diagrams of the present invention, FIG. 3 is a circuit diagram showing the connection state and configuration of the internal and external gates, and FIG. 4 is an I
An explanatory diagram of the /O buffer, FIG. 5 is an explanatory diagram of the internal gate,
FIG. 6 is an explanatory diagram of the state of connection between the gate and the bump, and FIG. 7 is an explanatory diagram of the bump manufacturing procedure. In the drawing, 12 is a semiconductor chip, /O is a bump, and 14 is an I/O.
O gate cell 16 is an internal gate cell forming region.
Claims (2)
、ゲートアレイのI/Oゲートセルを、該チップの周辺
及びチップ面を複数個に区分する線に沿って配列し、内
部ゲートセルを該区分された領域の内部に配設したこと
を特徴とするバンプ実装を用いる半導体集積回路。(1) A large number of bumps are distributed over the entire surface of a semiconductor chip, I/O gate cells of a gate array are arranged along lines that divide the periphery of the chip and the chip surface into multiple parts, and internal gate cells are divided into multiple parts. 1. A semiconductor integrated circuit using bump mounting, characterized in that the semiconductor integrated circuit is disposed inside a bump mounting area.
の入力バッファを構成する素子が形成されてなることを
特徴とする特許請求の範囲第1項記載のバンプ実装を用
いる半導体集積回路。(2) A semiconductor integrated circuit using bump mounting according to claim 1, wherein the I/O gate cell is formed with elements constituting one output buffer and two input buffers.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61036159A JPH07118507B2 (en) | 1986-02-20 | 1986-02-20 | Semiconductor integrated circuit using bump mounting |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61036159A JPH07118507B2 (en) | 1986-02-20 | 1986-02-20 | Semiconductor integrated circuit using bump mounting |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62194640A true JPS62194640A (en) | 1987-08-27 |
JPH07118507B2 JPH07118507B2 (en) | 1995-12-18 |
Family
ID=12461988
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61036159A Expired - Fee Related JPH07118507B2 (en) | 1986-02-20 | 1986-02-20 | Semiconductor integrated circuit using bump mounting |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH07118507B2 (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63261852A (en) * | 1987-04-20 | 1988-10-28 | Nippon Denso Co Ltd | Semiconductor integrated circuit |
JPS6461057A (en) * | 1987-09-01 | 1989-03-08 | Fujitsu Ltd | Semiconductor device |
JPH01198051A (en) * | 1988-02-03 | 1989-08-09 | Tokyo Electron Ltd | Semiconductor integrated circuit |
JPH04365367A (en) * | 1991-06-13 | 1992-12-17 | Mitsubishi Denki Eng Kk | Analog array |
JPH0541503A (en) * | 1991-06-21 | 1993-02-19 | Nec Ic Microcomput Syst Ltd | Manufacture of semiconductor device by master slice system |
JPH05267302A (en) * | 1992-03-19 | 1993-10-15 | Fujitsu Ltd | Semiconductor device |
US5341049A (en) * | 1991-07-22 | 1994-08-23 | Hitachi, Ltd. | Integrated circuit having alternate rows of logic cells and I/O cells |
JPH08125149A (en) * | 1994-10-27 | 1996-05-17 | Nec Corp | Production of semiconductor device and photomask |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5785244A (en) * | 1980-11-18 | 1982-05-27 | Fujitsu Ltd | Semiconductor device |
JPS59119925A (en) * | 1982-12-27 | 1984-07-11 | Toshiba Corp | Logical circuit |
JPS59215743A (en) * | 1983-05-24 | 1984-12-05 | Toshiba Corp | Large scale integrated circuit device |
-
1986
- 1986-02-20 JP JP61036159A patent/JPH07118507B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5785244A (en) * | 1980-11-18 | 1982-05-27 | Fujitsu Ltd | Semiconductor device |
JPS59119925A (en) * | 1982-12-27 | 1984-07-11 | Toshiba Corp | Logical circuit |
JPS59215743A (en) * | 1983-05-24 | 1984-12-05 | Toshiba Corp | Large scale integrated circuit device |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63261852A (en) * | 1987-04-20 | 1988-10-28 | Nippon Denso Co Ltd | Semiconductor integrated circuit |
JPS6461057A (en) * | 1987-09-01 | 1989-03-08 | Fujitsu Ltd | Semiconductor device |
JPH01198051A (en) * | 1988-02-03 | 1989-08-09 | Tokyo Electron Ltd | Semiconductor integrated circuit |
JPH04365367A (en) * | 1991-06-13 | 1992-12-17 | Mitsubishi Denki Eng Kk | Analog array |
JPH0541503A (en) * | 1991-06-21 | 1993-02-19 | Nec Ic Microcomput Syst Ltd | Manufacture of semiconductor device by master slice system |
US5341049A (en) * | 1991-07-22 | 1994-08-23 | Hitachi, Ltd. | Integrated circuit having alternate rows of logic cells and I/O cells |
JPH05267302A (en) * | 1992-03-19 | 1993-10-15 | Fujitsu Ltd | Semiconductor device |
JPH08125149A (en) * | 1994-10-27 | 1996-05-17 | Nec Corp | Production of semiconductor device and photomask |
Also Published As
Publication number | Publication date |
---|---|
JPH07118507B2 (en) | 1995-12-18 |
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Legal Events
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