JPH07118507B2 - Semiconductor integrated circuit using bump mounting - Google Patents

Semiconductor integrated circuit using bump mounting

Info

Publication number
JPH07118507B2
JPH07118507B2 JP61036159A JP3615986A JPH07118507B2 JP H07118507 B2 JPH07118507 B2 JP H07118507B2 JP 61036159 A JP61036159 A JP 61036159A JP 3615986 A JP3615986 A JP 3615986A JP H07118507 B2 JPH07118507 B2 JP H07118507B2
Authority
JP
Japan
Prior art keywords
gate
chip
semiconductor integrated
integrated circuit
bump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61036159A
Other languages
Japanese (ja)
Other versions
JPS62194640A (en
Inventor
英治 杉山
広幸 角井
親寛 中野渡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP61036159A priority Critical patent/JPH07118507B2/en
Publication of JPS62194640A publication Critical patent/JPS62194640A/en
Publication of JPH07118507B2 publication Critical patent/JPH07118507B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/11Manufacturing methods

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、バンプ実装を用いる半導体集積回路特に該パ
ンプ及び外,内部ゲートセルのチップ上レイアウト方法
に関する。
Description: FIELD OF THE INVENTION The present invention relates to a semiconductor integrated circuit using bump mounting, and more particularly to a method for laying out the bump and outer and inner gate cells on a chip.

〔従来の技術〕[Conventional technology]

半導体集積回路ではその半導体チップとパッケージの端
子ピンとの接続にはワイヤボンディングが広く用いられ
ている。この場合は半導体チップの周辺に多数のボンデ
ィングパッドが設けられ、またパッケージ基板にも端子
ピンと接続する多数のボンディングパッドが設けられ、
これらのパッド間がそれぞれワイヤにより接続される。
ゲートアレイLSIではチップ上に多数の外部ゲート(I/O
ゲート)及び内部ゲートが作られるが、ワイヤボンディ
ング方式のものでは内部ゲートはチップ中央部に、I/O
ゲートはボンディングパッドと内部ゲートとの間の環状
領域に作られることになる。
In semiconductor integrated circuits, wire bonding is widely used to connect the semiconductor chip to the terminal pins of the package. In this case, a large number of bonding pads are provided around the semiconductor chip, and a large number of bonding pads connected to the terminal pins are also provided on the package substrate.
These pads are connected by wires.
In a gate array LSI, a large number of external gates (I / O
Gate) and internal gate are made, but in the wire bonding type, the internal gate is located at the center of the chip and I / O.
The gate will be made in the annular region between the bond pad and the internal gate.

チップとその取付基板との接続にはバンプ方式も用いら
れる。これはチップ上に複数個の半球状小塊(バンプ)
を作っておき、基板側には複数個のパッドを作ってお
き、これらのバンプをパッドに結合(半田バンプなら加
熱による半田付け)させることにより、チップと基板と
の接続を行なう。このバンプ方式は個別部品だけでなく
集積回路にも用いられている。
A bump method is also used to connect the chip and its mounting substrate. This is multiple hemispherical nodules (bumps) on the chip.
, And a plurality of pads are formed on the side of the substrate, and these bumps are connected to the pads (solder bumps are soldered by heating) to connect the chip and the substrate. This bump method is used not only for individual components but also for integrated circuits.

〔発明が解決しようとする問題点〕[Problems to be solved by the invention]

ところでゲートアレイLSIでは、I/Oゲートセル及び内部
ゲートセルの配置は、該LSIのチップサイズ及び性能に
大きく影響する。ボンディングパッド又はバンプをチッ
プ周辺、内部ゲートはチップ中央、I/Oゲートはこれら
の間に配設したゲートアレイLSIではチップ上の配線長
が長くなる場合が生じ、チップサイズ及び又は性能に悪
影響を及ぼす。本発明はI/Oゲートなどのレイアウトを
変えてこの点を改善しようとするものである。
By the way, in a gate array LSI, the arrangement of I / O gate cells and internal gate cells greatly affects the chip size and performance of the LSI. In the case of a gate array LSI with bonding pads or bumps around the chip, internal gates in the center of the chip, and I / O gates between them, the wiring length on the chip may become longer, which adversely affects the chip size and / or performance. Exert. The present invention aims to improve this point by changing the layout of the I / O gate and the like.

〔問題点を解決するための手段〕[Means for solving problems]

本発明のバンプ実装を用いる半導体集積回路は、半導体
チップの全面に多数のバンプを分散配置し、ゲートアレ
イのI/Oゲートセルを、該チップの周辺及びチップ面を
複数個に区分する線に沿って配列し、内部ゲートセルを
該区分された領域の内部に配設したことを特徴とするも
のである。
A semiconductor integrated circuit using bump mounting of the present invention has a large number of bumps dispersedly arranged on the entire surface of a semiconductor chip, and the I / O gate cells of a gate array are arranged along a line dividing the periphery of the chip and the chip surface into a plurality of parts. And the internal gate cells are arranged inside the divided area.

〔作用〕[Action]

本発明では第1図に示すようにバンプ10をチップ12の全
面に分散配置し、I/Oゲートセル14はチップ周辺と、そ
の内部を区分する線上に配置し、内部ゲートセルはI/O
ゲートセル14で囲まれた領域16内に配置する。本例では
チップ12を2分しており、I/Oゲートセルアレイは8字
状をなし、内部ゲートセルはその2つの内部領域に配設
される。勿論2分割でなく、4分割、8分割等にしても
よい。
In the present invention, as shown in FIG. 1, the bumps 10 are dispersedly arranged on the entire surface of the chip 12, the I / O gate cells 14 are arranged on a line that divides the periphery of the chip and the inside thereof, and the internal gate cells are I / O.
It is arranged in a region 16 surrounded by the gate cell 14. In this example, the chip 12 is divided into two parts, the I / O gate cell array has an 8-shape, and the internal gate cells are arranged in the two internal regions. Of course, the number of divisions may be four, eight, etc. instead of two.

このようにすると大きなサイズのチップも、2分割、4
分割、……した小サイズのチップの集合となり、その小
サイズチップの周辺に1/Oゲート、内部にゲートが配設
されたLSIとなって平均配線長の低減が可能になる。ま
た内部ゲートの高集積化も可能になる。
In this way, even large chips can be divided into two, four
The chip is divided into small chips, and the LSI has 1 / O gates around the small chips and gates inside, and the average wiring length can be reduced. In addition, high integration of the internal gate becomes possible.

第1図ではI/Oゲートセル14はバンプ10の直下にある
が、これは第2図に示すように各バンプの間に設けても
よい。第1図のようにI/Oゲート上にバンプを設ける場
合は、各I/Oゲートセルの間の領域がチャネル(電源及
び信号配線の走る領域)になる。第2図の場合はバンプ
の直下がチャネルになる。なおチャネルに余裕があれ
ば、この部分にも内部ゲートを設けてよい。電源配線は
IRドロップによる電位降下(Vcc側)又は電位上昇(Vss
側)が問題になることがあるが、この対策としてパッケ
ージ電源端子ピンを複数個にし、つれてチップの電源用
ボンディングパッド又はバンプも複数個にすることがあ
る。第1図第2図の斜線を付したバンプは電源用で、複
数個設けてある。バンプには許容電流値があるので、こ
の点からも複数化は必要である。斜線のないバンプが信
号出力用である。
Although the I / O gate cell 14 is directly under the bump 10 in FIG. 1, it may be provided between the bumps as shown in FIG. When bumps are provided on the I / O gate as shown in FIG. 1, the region between each I / O gate cell becomes a channel (region where power supply and signal wiring run). In the case of FIG. 2, the channel is directly below the bump. If the channel has a margin, an internal gate may be provided in this portion as well. Power wiring
Potential drop (Vcc side) or potential rise (Vss) due to IR drop
However, as a countermeasure against this, a plurality of package power supply terminal pins may be provided, and thus a plurality of chip power supply bonding pads or bumps may be provided. The shaded bumps in FIGS. 1 and 2 are for power supply, and a plurality of bumps are provided. Since the bump has an allowable current value, it is necessary to make it plural also from this point. The bumps without diagonal lines are for signal output.

〔実施例〕〔Example〕

ゲートアレイLSIではI/Oバッファと内部ゲートの接続は
第3図(a)に示すようになっており、入力バッファ14
a−内部ゲート18−出力バッファ14bの構成を有する。EC
Lゲートアレイではこれらは第3図(b)に示す構造を
有する。即ち各々はトランジスタ2個を、それらのエミ
ッタを共通に定電流源トランジスタへ接続してなる差動
対と、その負荷抵抗へベースを接続した一対の出力段ト
ランジスタからなり、入力バッファ14aでは端子T1が入
力用、T2が基準電圧VBB用、端子T3,T4が出力用である。
また内部ゲート18では端子T5が入力用、T6が基準電圧Vr
用、T7,T8が出力用、そして出力バッファ14bにおいては
端子T9が入力用、T10が基準電圧Vr用、端子T11,T12が出
力用である。VCSは定電流源トランジスタの電流値を定
める電圧である。入,出力バッファ及び内部ゲートの構
成は同じであるが、基準電圧が異なり、ドライブ能力は
入力バッファの方が内部ゲートより大、そして出力バッ
ファはこれらより大、である。
In the gate array LSI, the connection between the I / O buffer and the internal gate is as shown in FIG.
a-internal gate 18-output buffer 14b. EC
In the L gate array, these have the structure shown in FIG. That is, each consists of two transistors, a differential pair in which their emitters are commonly connected to a constant current source transistor, and a pair of output stage transistors whose bases are connected to their load resistors. 1 is for input, T 2 is for reference voltage V BB , and terminals T 3 , T 4 are for output.
In the internal gate 18, terminal T 5 is for input and T 6 is the reference voltage Vr.
, T 7 and T 8 are for output, and in the output buffer 14b, terminal T 9 is for input, T 10 is for reference voltage Vr, and terminals T 11 and T 12 are for output. V CS is a voltage that determines the current value of the constant current source transistor. The input and output buffers and the internal gate have the same configuration, but the reference voltages are different, and the drive capability is larger in the input buffer than in the internal gate and larger in the output buffer.

第4図(a)はI/Oゲート14内の構造を示す図で、その
領域14aには1個の出力バッファとその基準電圧Vr発生
回路の構成素子が作られ、領域14bには入力バッファ2
個分の構成素子が、そして領域14cには基準電圧VBBと基
準電圧Vr(これはVBBの代わりに用いられる高ドライブ
用)発生回路の構成素子が作られる。第4図(b),
(c)は領域14b,14cに構成される素子アレイを示す。
FIG. 4 (a) is a diagram showing the structure inside the I / O gate 14, in which one output buffer and the constituent elements of its reference voltage Vr generating circuit are formed in the region 14a, and the input buffer is formed in the region 14b. Two
A number of components are formed, and in the region 14c, components of a reference voltage V BB and a reference voltage Vr (for high drive used instead of V BB ) generation circuit are formed. FIG. 4 (b),
(C) shows an element array formed in the regions 14b and 14c.

第5図(a)は内部ゲート18の構成を示す。この領域の
中央に基準電圧Vr発生回路の構成素子((b)に示す)
が設けられ、その両側の各2つの領域には3入力オア/
ノア回路などの内部ゲート回路の構成素子((c)に示
す)がそれぞれ設けられる。
FIG. 5A shows the structure of the internal gate 18. At the center of this region, the constituent elements of the reference voltage Vr generating circuit (shown in (b))
Is provided, and three input OR /
Each of the constituent elements (shown in (c)) of the internal gate circuit such as the NOR circuit is provided.

第1図に示すようにI/Oゲート14上にバンプ10を形成す
る場合は第6図に示す如くなる。即ち半導体基板(チッ
プ)SUBにトランジスタを形成し、エミッタE、ベース
B、コレクタC各電極配線を取付け、入力端となるベー
ス電極配線にはアルミニウムAlのパッドを取付け、周囲
はカバー膜PSGで覆い、このパッド上にバンプが形成さ
れる。バンプ形成には第7図(a)に示すように、Alパ
ッド上にバリアメタルをひいてその上に半田ボールをの
せ、これを加熱してバンプとする方法、または半田メッ
キしてバリアメタル上に半田ブロックを作り、レジスト
を除いたのち加熱して半田ブロックをバンプとする方法
などがある。
When the bump 10 is formed on the I / O gate 14 as shown in FIG. 1, it becomes as shown in FIG. That is, a transistor is formed on a semiconductor substrate (chip) SUB, each electrode wiring of an emitter E, a base B, and a collector C is attached, an aluminum Al pad is attached to a base electrode wiring serving as an input end, and the periphery is covered with a cover film PSG. , Bumps are formed on this pad. To form bumps, as shown in FIG. 7 (a), a barrier metal is drawn on the Al pad and a solder ball is placed on the Al pad, and this is heated to form a bump, or solder plating is performed on the barrier metal. There is a method of making a solder block, removing the resist, and then heating the solder block to form bumps.

〔発明の効果〕〔The invention's effect〕

以上説明したように本発明ではバンプ実装方式のゲート
アレイLSIのチップを実効時に細分化でき、平均配線長
の低減、電源配線の電位変動の低減、チップサイズの低
減、ゲートアレイの性能向上を図ることができ、甚だ有
効である。
As described above, according to the present invention, the chip of the bump mounting type gate array LSI can be subdivided during the execution, and the average wiring length is reduced, the potential variation of the power supply wiring is reduced, the chip size is reduced, and the performance of the gate array is improved. Can be very effective.

【図面の簡単な説明】[Brief description of drawings]

第1図および第2図は本発明の説明図、第3図は内,外
部ゲートの結線状態及び構成を示す回路図、第4図はI/
Oバッファの説明図、第5図は内部ゲートの説明図、第
6図はゲートとバンプの接続状態の説明図、第7図はバ
ンプ製作要領の説明図である。 図面で12は半導体チップ、10はバンプ、14はI/Oゲート
セル、16は内部ゲートセル形成領域である。
1 and 2 are explanatory views of the present invention, FIG. 3 is a circuit diagram showing the connection state and configuration of inner and outer gates, and FIG.
FIG. 5 is an explanatory diagram of the O buffer, FIG. 5 is an explanatory diagram of the internal gate, FIG. 6 is an explanatory diagram of a connection state between the gate and the bump, and FIG. 7 is an explanatory diagram of a bump manufacturing procedure. In the drawing, 12 is a semiconductor chip, 10 is a bump, 14 is an I / O gate cell, and 16 is an internal gate cell formation region.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 H01L 27/118 H01L 27/04 A (56)参考文献 特開 昭57−85244(JP,A) 特開 昭59−119925(JP,A) 特開 昭59−215743(JP,A)─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI Technical indication location H01L 27/118 H01L 27/04 A (56) References JP-A-57-85244 (JP, A) JP-A-59-119925 (JP, A) JP-A-59-215743 (JP, A)

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】半導体チップの全面に多数のバンプを分散
配置し、ゲートアレイのI/Oゲートセルを、該チップの
周辺及びチップ面を複数個に区分する線に沿って配列
し、内部ゲートセルを該区分された領域の内部に配設し
たことを特徴とするバンプ実装を用いる半導体集積回
路。
1. A large number of bumps are dispersedly arranged on the entire surface of a semiconductor chip, and I / O gate cells of a gate array are arranged along a line that divides the periphery of the chip and the chip surface into a plurality of lines, and internal gate cells are formed. A semiconductor integrated circuit using bump mounting, wherein the semiconductor integrated circuit is arranged inside the divided region.
【請求項2】I/Oゲートセルには1つの出力バッファと
2つの入力バッファを構成する素子が形成されてなるこ
とを特徴とする特許請求の範囲第1項記載のバンプ実装
を用いる半導体集積回路。
2. A semiconductor integrated circuit using bump mounting according to claim 1, wherein elements constituting one output buffer and two input buffers are formed in the I / O gate cell. .
JP61036159A 1986-02-20 1986-02-20 Semiconductor integrated circuit using bump mounting Expired - Fee Related JPH07118507B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61036159A JPH07118507B2 (en) 1986-02-20 1986-02-20 Semiconductor integrated circuit using bump mounting

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61036159A JPH07118507B2 (en) 1986-02-20 1986-02-20 Semiconductor integrated circuit using bump mounting

Publications (2)

Publication Number Publication Date
JPS62194640A JPS62194640A (en) 1987-08-27
JPH07118507B2 true JPH07118507B2 (en) 1995-12-18

Family

ID=12461988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61036159A Expired - Fee Related JPH07118507B2 (en) 1986-02-20 1986-02-20 Semiconductor integrated circuit using bump mounting

Country Status (1)

Country Link
JP (1) JPH07118507B2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63261852A (en) * 1987-04-20 1988-10-28 Nippon Denso Co Ltd Semiconductor integrated circuit
JPH0650773B2 (en) * 1987-09-01 1994-06-29 富士通株式会社 Semiconductor device
JPH01198051A (en) * 1988-02-03 1989-08-09 Tokyo Electron Ltd Semiconductor integrated circuit
JPH04365367A (en) * 1991-06-13 1992-12-17 Mitsubishi Denki Eng Kk Analog array
JPH0541503A (en) * 1991-06-21 1993-02-19 Nec Ic Microcomput Syst Ltd Manufacture of semiconductor device by master slice system
JP3179800B2 (en) * 1991-07-22 2001-06-25 株式会社日立製作所 Semiconductor integrated circuit device
JPH05267302A (en) * 1992-03-19 1993-10-15 Fujitsu Ltd Semiconductor device
JP2792447B2 (en) * 1994-10-27 1998-09-03 日本電気株式会社 Semiconductor device manufacturing method and photomask

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5785244A (en) * 1980-11-18 1982-05-27 Fujitsu Ltd Semiconductor device
JPS59119925A (en) * 1982-12-27 1984-07-11 Toshiba Corp Logical circuit
JPS59215743A (en) * 1983-05-24 1984-12-05 Toshiba Corp Large scale integrated circuit device

Also Published As

Publication number Publication date
JPS62194640A (en) 1987-08-27

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