JPS62156365A - スエード様シート材からなる研磨布の製造方法 - Google Patents
スエード様シート材からなる研磨布の製造方法Info
- Publication number
- JPS62156365A JPS62156365A JP29873685A JP29873685A JPS62156365A JP S62156365 A JPS62156365 A JP S62156365A JP 29873685 A JP29873685 A JP 29873685A JP 29873685 A JP29873685 A JP 29873685A JP S62156365 A JPS62156365 A JP S62156365A
- Authority
- JP
- Japan
- Prior art keywords
- polyurethane elastomer
- sheet material
- suede
- elastomer
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
- Synthetic Leather, Interior Materials Or Flexible Sheet Materials (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29873685A JPS62156365A (ja) | 1985-12-27 | 1985-12-27 | スエード様シート材からなる研磨布の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29873685A JPS62156365A (ja) | 1985-12-27 | 1985-12-27 | スエード様シート材からなる研磨布の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62156365A true JPS62156365A (ja) | 1987-07-11 |
JPH0547667B2 JPH0547667B2 (enrdf_load_stackoverflow) | 1993-07-19 |
Family
ID=17863593
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP29873685A Granted JPS62156365A (ja) | 1985-12-27 | 1985-12-27 | スエード様シート材からなる研磨布の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62156365A (enrdf_load_stackoverflow) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0658401A1 (en) * | 1993-12-14 | 1995-06-21 | Shin-Etsu Handotai Company Limited | Polishing member and wafer polishing apparatus |
JPH07164307A (ja) * | 1993-12-14 | 1995-06-27 | Shin Etsu Handotai Co Ltd | 研磨部材およびウエーハ研磨装置 |
JP2002516764A (ja) * | 1998-06-02 | 2002-06-11 | スキャパ・グループ・パブリック・リミテッド・カンパニー | 水分吸収を減少した改良みがきパッド |
WO2013099962A1 (ja) * | 2011-12-27 | 2013-07-04 | 富士紡ホールディングス株式会社 | 研磨パッド及び研磨パッドの製造方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011148082A (ja) * | 2009-12-25 | 2011-08-04 | Filwel:Kk | 研磨布 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52148604A (en) * | 1976-06-03 | 1977-12-10 | Daiichi Lace Kk | Production of suede like sheet material |
JPS5551077A (en) * | 1978-10-05 | 1980-04-14 | Degussa | Manufacture of solid cyanuryl chloride |
-
1985
- 1985-12-27 JP JP29873685A patent/JPS62156365A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52148604A (en) * | 1976-06-03 | 1977-12-10 | Daiichi Lace Kk | Production of suede like sheet material |
JPS5551077A (en) * | 1978-10-05 | 1980-04-14 | Degussa | Manufacture of solid cyanuryl chloride |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0658401A1 (en) * | 1993-12-14 | 1995-06-21 | Shin-Etsu Handotai Company Limited | Polishing member and wafer polishing apparatus |
JPH07164307A (ja) * | 1993-12-14 | 1995-06-27 | Shin Etsu Handotai Co Ltd | 研磨部材およびウエーハ研磨装置 |
JP2002516764A (ja) * | 1998-06-02 | 2002-06-11 | スキャパ・グループ・パブリック・リミテッド・カンパニー | 水分吸収を減少した改良みがきパッド |
WO2013099962A1 (ja) * | 2011-12-27 | 2013-07-04 | 富士紡ホールディングス株式会社 | 研磨パッド及び研磨パッドの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0547667B2 (enrdf_load_stackoverflow) | 1993-07-19 |