JPS62153375A - ウエハダイシング用粘着シート - Google Patents

ウエハダイシング用粘着シート

Info

Publication number
JPS62153375A
JPS62153375A JP60295188A JP29518885A JPS62153375A JP S62153375 A JPS62153375 A JP S62153375A JP 60295188 A JP60295188 A JP 60295188A JP 29518885 A JP29518885 A JP 29518885A JP S62153375 A JPS62153375 A JP S62153375A
Authority
JP
Japan
Prior art keywords
adhesive
radiation
pressure
adhesive sheet
sensitive adhesive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60295188A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0215594B2 (https=
Inventor
Kazuyoshi Ebe
和義 江部
Hiroaki Narita
博昭 成田
Katsuhisa Taguchi
田口　克久
Yoshitaka Akeda
明田　好孝
Takanori Saito
斉藤　隆則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
F S K KK
FSK Corp
Original Assignee
F S K KK
FSK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by F S K KK, FSK Corp filed Critical F S K KK
Priority to JP60295188A priority Critical patent/JPS62153375A/ja
Priority to DE19863639266 priority patent/DE3639266A1/de
Priority to US06/932,210 priority patent/US4756968A/en
Priority to PH34523A priority patent/PH23580A/en
Priority to MYPI86000164A priority patent/MY100214A/en
Priority to KR1019860010787A priority patent/KR910007086B1/ko
Priority to NL8603269A priority patent/NL191241C/xx
Priority to FR8618037A priority patent/FR2592390B1/fr
Priority to GB8630956A priority patent/GB2184741B/en
Publication of JPS62153375A publication Critical patent/JPS62153375A/ja
Priority to US07/111,849 priority patent/US4965127A/en
Priority to MYPI89000327A priority patent/MY104709A/en
Priority to GB8916855A priority patent/GB2221468B/en
Priority to GB8916857A priority patent/GB2221470B/en
Priority to GB8916856A priority patent/GB2221469B/en
Publication of JPH0215594B2 publication Critical patent/JPH0215594B2/ja
Priority to US07/549,496 priority patent/US5187007A/en
Priority to SG1143/92A priority patent/SG114392G/en
Priority to SG1145/92A priority patent/SG114592G/en
Priority to SG1146/92A priority patent/SG114692G/en
Priority to SG1144/92A priority patent/SG114492G/en
Priority to HK1056/92A priority patent/HK105692A/xx
Priority to HK1054/92A priority patent/HK105492A/xx
Priority to HK1055/92A priority patent/HK105592A/xx
Priority to HK1057/92A priority patent/HK105792A/xx
Priority to NL9302147A priority patent/NL9302147A/nl
Priority to NL9302150A priority patent/NL193617C/nl
Priority to NL9302148A priority patent/NL9302148A/nl
Priority to NL9302149A priority patent/NL9302149A/nl
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
    • H10P72/7402—Wafer tapes, e.g. grinding or dicing support tapes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
    • H10P72/7416—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support used during dicing or grinding

Landscapes

  • Dicing (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Adhesive Tapes (AREA)
  • Adhesives Or Adhesive Processes (AREA)
JP60295188A 1985-12-27 1985-12-27 ウエハダイシング用粘着シート Granted JPS62153375A (ja)

Priority Applications (27)

Application Number Priority Date Filing Date Title
JP60295188A JPS62153375A (ja) 1985-12-27 1985-12-27 ウエハダイシング用粘着シート
DE19863639266 DE3639266A1 (de) 1985-12-27 1986-11-17 Haftfolie
US06/932,210 US4756968A (en) 1985-12-27 1986-11-18 Adhesive sheets
PH34523A PH23580A (en) 1985-12-27 1986-11-24 Adhesive sheet
MYPI86000164A MY100214A (en) 1985-12-27 1986-12-02 Adhesive sheet
KR1019860010787A KR910007086B1 (ko) 1985-12-27 1986-12-15 점착시이트
NL8603269A NL191241C (nl) 1985-12-27 1986-12-23 Kleefvel voor halfgeleiders.
FR8618037A FR2592390B1 (fr) 1985-12-27 1986-12-23 Feuille adhesive utilisable notamment pour le decoupage de pastilles semiconductrices sous la forme de microplaquettes
GB8630956A GB2184741B (en) 1985-12-27 1986-12-29 Adhesive sheet suitable for use in the preparation of semiconductor chips
US07/111,849 US4965127A (en) 1985-12-27 1987-10-22 Adhesive sheets
MYPI89000327A MY104709A (en) 1985-12-27 1989-05-15 Adhesive sheet.
GB8916856A GB2221469B (en) 1985-12-27 1989-07-24 Adhesive sheet suitable for use in dicing semiconductor wafers into chips
GB8916857A GB2221470B (en) 1985-12-27 1989-07-24 Adhesive sheet suitable for semiconductor wafer processing
GB8916855A GB2221468B (en) 1985-12-27 1989-07-24 Adhesive sheet suitable for use in dicing semiconductor wafers into chips
US07/549,496 US5187007A (en) 1985-12-27 1990-06-29 Adhesive sheets
SG1143/92A SG114392G (en) 1985-12-27 1992-11-02 Adhesive sheet suitable for use in dicing semiconductor wafers into chips
SG1145/92A SG114592G (en) 1985-12-27 1992-11-02 Adhesive sheet suitable for semiconductor wafer processing
SG1146/92A SG114692G (en) 1985-12-27 1992-11-02 Adhesive sheet suitable for use in dicing semiconductor wafers into chips
SG1144/92A SG114492G (en) 1985-12-27 1992-11-02 Adhesive sheet suitable for use in the preparation of semiconductor chips
HK1057/92A HK105792A (en) 1985-12-27 1992-12-31 Adhesive sheet suitable for use in the preparation of semiconductor chips
HK1055/92A HK105592A (en) 1985-12-27 1992-12-31 Adhesive sheet suitable for use in dicing semiconductor wafers into chips
HK1056/92A HK105692A (en) 1985-12-27 1992-12-31 Adhesive sheet suitable for use in dicing semiconductor wafers into chips
HK1054/92A HK105492A (en) 1985-12-27 1992-12-31 Adhesive sheet suitable for semiconductor wafer processing
NL9302147A NL9302147A (nl) 1985-12-27 1993-12-09 Kleefvel voor halfgeleiders.
NL9302150A NL193617C (nl) 1985-12-27 1993-12-09 Kleefvel voor halfgeleiders.
NL9302148A NL9302148A (nl) 1985-12-27 1993-12-09 Kleefvel voor halfgeleiders.
NL9302149A NL9302149A (nl) 1985-12-27 1993-12-09 Kleefvel voor halfgeleiders.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60295188A JPS62153375A (ja) 1985-12-27 1985-12-27 ウエハダイシング用粘着シート

Publications (2)

Publication Number Publication Date
JPS62153375A true JPS62153375A (ja) 1987-07-08
JPH0215594B2 JPH0215594B2 (https=) 1990-04-12

Family

ID=17817342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60295188A Granted JPS62153375A (ja) 1985-12-27 1985-12-27 ウエハダイシング用粘着シート

Country Status (1)

Country Link
JP (1) JPS62153375A (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6461208A (en) * 1987-09-01 1989-03-08 Fsk Kk Cutting method of wafer
JP2005187663A (ja) * 2003-12-25 2005-07-14 Mitsubishi Plastics Ind Ltd 粘着フィルム・シート及び粘着フィルム・シートの製造方法
JP2007160920A (ja) * 2005-11-16 2007-06-28 Denso Corp ウェハおよびウェハの加工方法
JP2013231159A (ja) * 2012-04-06 2013-11-14 Sekisui Chem Co Ltd 粘着剤組成物、粘着テープ、及び、ウエハの処理方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630410A (en) * 1979-08-20 1981-03-27 Minnesota Mining & Mfg Photopolymerizable mixture
JPS6049598A (ja) * 1983-08-27 1985-03-18 Toshiba Corp Ｘ線撮影装置
JPS60173076A (ja) * 1983-12-27 1985-09-06 チパ−ガイギ−　アクチエンゲゼルシヤフト 熱硬化性接着フイルムの製造方法
JPS60196956A (ja) * 1984-03-12 1985-10-05 Nitto Electric Ind Co Ltd 半導体ウエハ固定用接着薄板
JPS60223129A (ja) * 1984-04-19 1985-11-07 Nec Corp ３／５族化合物半導体の選択エツチング方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630410A (en) * 1979-08-20 1981-03-27 Minnesota Mining & Mfg Photopolymerizable mixture
JPS6049598A (ja) * 1983-08-27 1985-03-18 Toshiba Corp Ｘ線撮影装置
JPS60173076A (ja) * 1983-12-27 1985-09-06 チパ−ガイギ−　アクチエンゲゼルシヤフト 熱硬化性接着フイルムの製造方法
JPS60196956A (ja) * 1984-03-12 1985-10-05 Nitto Electric Ind Co Ltd 半導体ウエハ固定用接着薄板
JPS60223129A (ja) * 1984-04-19 1985-11-07 Nec Corp ３／５族化合物半導体の選択エツチング方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6461208A (en) * 1987-09-01 1989-03-08 Fsk Kk Cutting method of wafer
JP2005187663A (ja) * 2003-12-25 2005-07-14 Mitsubishi Plastics Ind Ltd 粘着フィルム・シート及び粘着フィルム・シートの製造方法
JP2007160920A (ja) * 2005-11-16 2007-06-28 Denso Corp ウェハおよびウェハの加工方法
JP2013231159A (ja) * 2012-04-06 2013-11-14 Sekisui Chem Co Ltd 粘着剤組成物、粘着テープ、及び、ウエハの処理方法

Also Published As

Publication number Publication date
JPH0215594B2 (https=) 1990-04-12

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