JPS6215242Y2 - - Google Patents
Info
- Publication number
- JPS6215242Y2 JPS6215242Y2 JP14697382U JP14697382U JPS6215242Y2 JP S6215242 Y2 JPS6215242 Y2 JP S6215242Y2 JP 14697382 U JP14697382 U JP 14697382U JP 14697382 U JP14697382 U JP 14697382U JP S6215242 Y2 JPS6215242 Y2 JP S6215242Y2
- Authority
- JP
- Japan
- Prior art keywords
- tank
- roller
- strip
- etching
- iron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 19
- 238000004140 cleaning Methods 0.000 claims description 15
- 238000005406 washing Methods 0.000 claims description 13
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 90
- 229910052742 iron Inorganic materials 0.000 description 46
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 238000001035 drying Methods 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002505 iron Chemical class 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- 241001417527 Pempheridae Species 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000003504 photosensitizing agent Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14697382U JPS5954563U (ja) | 1982-09-30 | 1982-09-30 | 現像およびエツチング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14697382U JPS5954563U (ja) | 1982-09-30 | 1982-09-30 | 現像およびエツチング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5954563U JPS5954563U (ja) | 1984-04-10 |
| JPS6215242Y2 true JPS6215242Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-04-17 |
Family
ID=30326973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14697382U Granted JPS5954563U (ja) | 1982-09-30 | 1982-09-30 | 現像およびエツチング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5954563U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61284577A (ja) * | 1985-06-10 | 1986-12-15 | Futaba Corp | 薄膜形成装置 |
| JPS6236541Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1985-06-19 | 1987-09-17 |
-
1982
- 1982-09-30 JP JP14697382U patent/JPS5954563U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5954563U (ja) | 1984-04-10 |