JPS62140432A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法Info
- Publication number
- JPS62140432A JPS62140432A JP28106085A JP28106085A JPS62140432A JP S62140432 A JPS62140432 A JP S62140432A JP 28106085 A JP28106085 A JP 28106085A JP 28106085 A JP28106085 A JP 28106085A JP S62140432 A JPS62140432 A JP S62140432A
- Authority
- JP
- Japan
- Prior art keywords
- polycrystalline silicon
- oxide film
- wiring
- film
- silicon wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 14
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 62
- 238000005530 etching Methods 0.000 claims abstract description 16
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 11
- 230000003647 oxidation Effects 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Local Oxidation Of Silicon (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28106085A JPS62140432A (ja) | 1985-12-16 | 1985-12-16 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28106085A JPS62140432A (ja) | 1985-12-16 | 1985-12-16 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62140432A true JPS62140432A (ja) | 1987-06-24 |
| JPH0418691B2 JPH0418691B2 (https=) | 1992-03-27 |
Family
ID=17633750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28106085A Granted JPS62140432A (ja) | 1985-12-16 | 1985-12-16 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62140432A (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4968646A (en) * | 1988-12-20 | 1990-11-06 | Thomson Composants Militaires Et Spatiaux | Process for fabricating small size electrodes in an integrated circuit |
-
1985
- 1985-12-16 JP JP28106085A patent/JPS62140432A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4968646A (en) * | 1988-12-20 | 1990-11-06 | Thomson Composants Militaires Et Spatiaux | Process for fabricating small size electrodes in an integrated circuit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0418691B2 (https=) | 1992-03-27 |
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