JPH0418691B2 - - Google Patents

Info

Publication number
JPH0418691B2
JPH0418691B2 JP28106085A JP28106085A JPH0418691B2 JP H0418691 B2 JPH0418691 B2 JP H0418691B2 JP 28106085 A JP28106085 A JP 28106085A JP 28106085 A JP28106085 A JP 28106085A JP H0418691 B2 JPH0418691 B2 JP H0418691B2
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
wiring
oxide film
film
silicon wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP28106085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62140432A (ja
Inventor
Kazutaka Ikeyama
Takashi Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP28106085A priority Critical patent/JPS62140432A/ja
Publication of JPS62140432A publication Critical patent/JPS62140432A/ja
Publication of JPH0418691B2 publication Critical patent/JPH0418691B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP28106085A 1985-12-16 1985-12-16 半導体装置の製造方法 Granted JPS62140432A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28106085A JPS62140432A (ja) 1985-12-16 1985-12-16 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28106085A JPS62140432A (ja) 1985-12-16 1985-12-16 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS62140432A JPS62140432A (ja) 1987-06-24
JPH0418691B2 true JPH0418691B2 (https=) 1992-03-27

Family

ID=17633750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28106085A Granted JPS62140432A (ja) 1985-12-16 1985-12-16 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS62140432A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2640808B1 (fr) * 1988-12-20 1991-02-08 Thomson Composants Militaires Procede de fabrication d'electrodes de faible dimension, dans un circuit integre

Also Published As

Publication number Publication date
JPS62140432A (ja) 1987-06-24

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