JPS62139554A - 薄膜剥離方法及びその実施装置 - Google Patents

薄膜剥離方法及びその実施装置

Info

Publication number
JPS62139554A
JPS62139554A JP60280796A JP28079685A JPS62139554A JP S62139554 A JPS62139554 A JP S62139554A JP 60280796 A JP60280796 A JP 60280796A JP 28079685 A JP28079685 A JP 28079685A JP S62139554 A JPS62139554 A JP S62139554A
Authority
JP
Japan
Prior art keywords
thin film
substrate
peeling
guide member
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60280796A
Other languages
English (en)
Japanese (ja)
Other versions
JPH032680B2 (cg-RX-API-DMAC7.html
Inventor
Shigeo Sumi
住　成夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Somar Corp
Original Assignee
Somar Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Somar Corp filed Critical Somar Corp
Priority to JP60280796A priority Critical patent/JPS62139554A/ja
Priority to AT86111366T priority patent/ATE116510T1/de
Priority to DE3650181T priority patent/DE3650181T2/de
Priority to EP86111366A priority patent/EP0212597B1/en
Priority to DE3650182T priority patent/DE3650182T2/de
Priority to AT86112003T priority patent/ATE116511T1/de
Priority to DE3650208T priority patent/DE3650208T2/de
Priority to EP86112003A priority patent/EP0217150B1/en
Priority to US06/905,411 priority patent/US4867836A/en
Priority to AT86112004T priority patent/ATE117499T1/de
Priority to EP86112004A priority patent/EP0218873B1/en
Priority to DE3650194T priority patent/DE3650194T2/de
Priority to AT86112301T priority patent/ATE116789T1/de
Priority to EP86112301A priority patent/EP0215397B1/en
Publication of JPS62139554A publication Critical patent/JPS62139554A/ja
Priority to US07/258,045 priority patent/US4880488A/en
Publication of JPH032680B2 publication Critical patent/JPH032680B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
    • B29C63/0004—Component parts, details or accessories; Auxiliary operations
    • B29C63/0013—Removing old coatings
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/161—Coating processes; Apparatus therefor using a previously coated surface, e.g. by stamping or by transfer lamination

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
JP60280796A 1985-08-16 1985-12-13 薄膜剥離方法及びその実施装置 Granted JPS62139554A (ja)

Priority Applications (15)

Application Number Priority Date Filing Date Title
JP60280796A JPS62139554A (ja) 1985-12-13 1985-12-13 薄膜剥離方法及びその実施装置
AT86111366T ATE116510T1 (de) 1985-08-16 1986-08-18 Verfahren und vorrichtung zum abziehen eines films.
DE3650181T DE3650181T2 (de) 1985-08-16 1986-08-18 Verfahren und Vorrichtung zum Abziehen eines Films.
EP86111366A EP0212597B1 (en) 1985-08-16 1986-08-18 Film peeling method and apparatus
EP86112003A EP0217150B1 (en) 1985-08-31 1986-08-29 Film peeling apparatus
AT86112003T ATE116511T1 (de) 1985-08-31 1986-08-29 Vorrichtung zum abschälen eines films.
DE3650208T DE3650208T2 (de) 1985-08-30 1986-08-29 Vorrichtung zum Abschälen eines Films.
DE3650182T DE3650182T2 (de) 1985-08-31 1986-08-29 Vorrichtung zum Abschälen eines Films.
US06/905,411 US4867836A (en) 1985-08-30 1986-08-29 Film peeling apparatus
AT86112004T ATE117499T1 (de) 1985-08-30 1986-08-29 Vorrichtung zum abschälen eines films.
EP86112004A EP0218873B1 (en) 1985-08-30 1986-08-29 Film peeling apparatus
DE3650194T DE3650194T2 (de) 1985-09-05 1986-09-05 Vorrichtung zum Abschälen eines Films.
AT86112301T ATE116789T1 (de) 1985-09-05 1986-09-05 Vorrichtung zum abschälen eines films.
EP86112301A EP0215397B1 (en) 1985-09-05 1986-09-05 Film peeling apparatus
US07/258,045 US4880488A (en) 1985-08-16 1988-10-14 Film peeling method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60280796A JPS62139554A (ja) 1985-12-13 1985-12-13 薄膜剥離方法及びその実施装置

Publications (2)

Publication Number Publication Date
JPS62139554A true JPS62139554A (ja) 1987-06-23
JPH032680B2 JPH032680B2 (cg-RX-API-DMAC7.html) 1991-01-16

Family

ID=17630085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60280796A Granted JPS62139554A (ja) 1985-08-16 1985-12-13 薄膜剥離方法及びその実施装置

Country Status (1)

Country Link
JP (1) JPS62139554A (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006027184A (ja) * 2004-07-20 2006-02-02 Nisshinbo Ind Inc ラミネート装置におけるワーク剥離方法とその機構
JP2016018839A (ja) * 2014-07-07 2016-02-01 凸版印刷株式会社 剥離きっかけ作製装置及び方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006027184A (ja) * 2004-07-20 2006-02-02 Nisshinbo Ind Inc ラミネート装置におけるワーク剥離方法とその機構
JP2016018839A (ja) * 2014-07-07 2016-02-01 凸版印刷株式会社 剥離きっかけ作製装置及び方法

Also Published As

Publication number Publication date
JPH032680B2 (cg-RX-API-DMAC7.html) 1991-01-16

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