JPS6213310B2 - - Google Patents
Info
- Publication number
- JPS6213310B2 JPS6213310B2 JP56011180A JP1118081A JPS6213310B2 JP S6213310 B2 JPS6213310 B2 JP S6213310B2 JP 56011180 A JP56011180 A JP 56011180A JP 1118081 A JP1118081 A JP 1118081A JP S6213310 B2 JPS6213310 B2 JP S6213310B2
- Authority
- JP
- Japan
- Prior art keywords
- sintered body
- silicon nitride
- density
- sintering
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005245 sintering Methods 0.000 claims description 53
- 238000000034 method Methods 0.000 claims description 31
- 239000000843 powder Substances 0.000 claims description 20
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 18
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 10
- 238000001513 hot isostatic pressing Methods 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 3
- 238000010574 gas phase reaction Methods 0.000 claims description 3
- 238000005979 thermal decomposition reaction Methods 0.000 claims description 3
- 229910021193 La 2 O 3 Inorganic materials 0.000 claims description 2
- 229910020203 CeO Inorganic materials 0.000 claims 1
- 229910010413 TiO 2 Inorganic materials 0.000 claims 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 1
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 18
- 238000005452 bending Methods 0.000 description 16
- 238000012545 processing Methods 0.000 description 10
- 238000000465 moulding Methods 0.000 description 7
- 238000000354 decomposition reaction Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 239000011148 porous material Substances 0.000 description 5
- 238000011161 development Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000005121 nitriding Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56011180A JPS57123865A (en) | 1981-01-27 | 1981-01-27 | Manufacture of high density silicon nitride sintered body |
| DE3141590A DE3141590C2 (de) | 1980-10-20 | 1981-10-20 | Verfahren zur Herstellung von hochdichtem gesintertem Siliziumnitrid |
| US07/251,052 US5603876A (en) | 1980-10-20 | 1988-09-26 | Method for producing high density sintered silicon nitride (SI3 N.sub.4 |
| US07/814,806 US5445776A (en) | 1980-10-20 | 1991-12-31 | Method for producing high density sintered silicon nitride (Si3 N.sub.4 |
| US08/463,273 US5665291A (en) | 1980-10-20 | 1995-06-05 | Method for producing high density sintered silicon nitride(Si3 N4) |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56011180A JPS57123865A (en) | 1981-01-27 | 1981-01-27 | Manufacture of high density silicon nitride sintered body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57123865A JPS57123865A (en) | 1982-08-02 |
| JPS6213310B2 true JPS6213310B2 (ru) | 1987-03-25 |
Family
ID=11770859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56011180A Granted JPS57123865A (en) | 1980-10-20 | 1981-01-27 | Manufacture of high density silicon nitride sintered body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57123865A (ru) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60155576A (ja) * | 1984-01-26 | 1985-08-15 | 工業技術院長 | 高靭性窒化ケイ素焼結体の製造方法 |
| JPS63235437A (ja) * | 1986-10-24 | 1988-09-30 | Ube Ind Ltd | β型窒化珪素ウイスカー成形体及びその製法 |
| JPH07115936B2 (ja) * | 1986-12-16 | 1995-12-13 | 電気化学工業株式会社 | 窒化ケイ素焼結体の製造方法 |
| JPH0774103B2 (ja) * | 1986-12-27 | 1995-08-09 | 日本碍子株式会社 | 高硬度窒化珪素焼結体 |
| JP2597774B2 (ja) * | 1991-10-21 | 1997-04-09 | 住友電気工業株式会社 | 窒化ケイ素系焼結体およびその製造方法 |
| JPH05148028A (ja) * | 1991-11-28 | 1993-06-15 | Sumitomo Electric Ind Ltd | 窒化ケイ素系焼結体の製造法 |
| JPH05155663A (ja) * | 1991-12-05 | 1993-06-22 | Sumitomo Electric Ind Ltd | 窒化ケイ素系焼結体 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54107914A (en) * | 1978-02-10 | 1979-08-24 | Tokyo Shibaura Electric Co | Production of high density silicon nitride base sintered body |
-
1981
- 1981-01-27 JP JP56011180A patent/JPS57123865A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54107914A (en) * | 1978-02-10 | 1979-08-24 | Tokyo Shibaura Electric Co | Production of high density silicon nitride base sintered body |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57123865A (en) | 1982-08-02 |
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