JPS621314B2 - - Google Patents

Info

Publication number
JPS621314B2
JPS621314B2 JP7663181A JP7663181A JPS621314B2 JP S621314 B2 JPS621314 B2 JP S621314B2 JP 7663181 A JP7663181 A JP 7663181A JP 7663181 A JP7663181 A JP 7663181A JP S621314 B2 JPS621314 B2 JP S621314B2
Authority
JP
Japan
Prior art keywords
wafer
coated
lever
resist
rotating shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7663181A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57194070A (en
Inventor
Isamu Shimizu
Nobuhachi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7663181A priority Critical patent/JPS57194070A/ja
Publication of JPS57194070A publication Critical patent/JPS57194070A/ja
Publication of JPS621314B2 publication Critical patent/JPS621314B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP7663181A 1981-05-22 1981-05-22 Double side coating device Granted JPS57194070A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7663181A JPS57194070A (en) 1981-05-22 1981-05-22 Double side coating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7663181A JPS57194070A (en) 1981-05-22 1981-05-22 Double side coating device

Publications (2)

Publication Number Publication Date
JPS57194070A JPS57194070A (en) 1982-11-29
JPS621314B2 true JPS621314B2 (enrdf_load_stackoverflow) 1987-01-12

Family

ID=13610713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7663181A Granted JPS57194070A (en) 1981-05-22 1981-05-22 Double side coating device

Country Status (1)

Country Link
JP (1) JPS57194070A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63185029A (ja) * 1987-01-28 1988-07-30 Hitachi Ltd ウエハ処理装置
JPS63149279U (enrdf_load_stackoverflow) * 1987-03-20 1988-09-30
JPS63240967A (ja) * 1988-03-03 1988-10-06 Toray Ind Inc スピンコート装置
JP2833762B2 (ja) * 1988-09-21 1998-12-09 株式会社芝浦製作所 ガラス基板の乾燥装置
JPH0328722U (enrdf_load_stackoverflow) * 1989-07-31 1991-03-22

Also Published As

Publication number Publication date
JPS57194070A (en) 1982-11-29

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