JPH0328722U - - Google Patents

Info

Publication number
JPH0328722U
JPH0328722U JP8915489U JP8915489U JPH0328722U JP H0328722 U JPH0328722 U JP H0328722U JP 8915489 U JP8915489 U JP 8915489U JP 8915489 U JP8915489 U JP 8915489U JP H0328722 U JPH0328722 U JP H0328722U
Authority
JP
Japan
Prior art keywords
rotation direction
spin chuck
screen wall
substrate
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8915489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8915489U priority Critical patent/JPH0328722U/ja
Publication of JPH0328722U publication Critical patent/JPH0328722U/ja
Pending legal-status Critical Current

Links

JP8915489U 1989-07-31 1989-07-31 Pending JPH0328722U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8915489U JPH0328722U (enrdf_load_stackoverflow) 1989-07-31 1989-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8915489U JPH0328722U (enrdf_load_stackoverflow) 1989-07-31 1989-07-31

Publications (1)

Publication Number Publication Date
JPH0328722U true JPH0328722U (enrdf_load_stackoverflow) 1991-03-22

Family

ID=31638749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8915489U Pending JPH0328722U (enrdf_load_stackoverflow) 1989-07-31 1989-07-31

Country Status (1)

Country Link
JP (1) JPH0328722U (enrdf_load_stackoverflow)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5498574A (en) * 1978-01-20 1979-08-03 Matsushita Electric Ind Co Ltd Rotary coating unit of viscous material
JPS5732759A (en) * 1980-08-04 1982-02-22 Mitsubishi Electric Corp Substrate treating equipment
JPS57194070A (en) * 1981-05-22 1982-11-29 Hitachi Ltd Double side coating device
JPS592135B2 (ja) * 1973-09-20 1984-01-17 バロ−ス コ−ポレ−シヨン ヒヨウジパネル

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS592135B2 (ja) * 1973-09-20 1984-01-17 バロ−ス コ−ポレ−シヨン ヒヨウジパネル
JPS5498574A (en) * 1978-01-20 1979-08-03 Matsushita Electric Ind Co Ltd Rotary coating unit of viscous material
JPS5732759A (en) * 1980-08-04 1982-02-22 Mitsubishi Electric Corp Substrate treating equipment
JPS57194070A (en) * 1981-05-22 1982-11-29 Hitachi Ltd Double side coating device

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