JPH0328722U

JPH0328722U -

Info

Publication number: JPH0328722U
Application number: JP8915489U
Authority: JP
Priority date: 1989-07-31
Filing date: 1989-07-31
Publication date: 1991-03-22

Description

[Brief explanation of drawings]

第１図は本考案に係るスピンチヤツクの一実施
例を示すもので、長方形の基板に適用した場合の
平面図、第２図は側面図、第３図は底面図、第４
図は第１図の−線断面図、第５図は基板保持
部材とピンの斜視図、第６図は衝立壁の斜視図、
第７図は衝立壁の他の実施例を示す斜視図、第８
図は従来のスピンチヤツクの平面図である。２……基板、２ａ……回転方向前端部、１０…
…基板保持部、３０……衝立取付部材、３３……
衝立壁、Ｓ_１〜Ｓ_４……辺。 Fig. 1 shows an embodiment of the spin chuck according to the present invention. Fig. 2 is a plan view when applied to a rectangular substrate, Fig. 3 is a side view, Fig. 3 is a bottom view, and Fig. 4 is a bottom view.
The figures are a cross-sectional view taken along the line - - in Fig. 1, Fig. 5 is a perspective view of the board holding member and pins, Fig. 6 is a perspective view of the partition wall,
FIG. 7 is a perspective view showing another embodiment of the screen wall;
The figure is a plan view of a conventional spin chuck. 2...Substrate, 2a...Rotational direction front end, 10...
... Board holding part, 30 ... Screen mounting member, 33 ...
Screen wall, S ₁ to _{S 4} ... side.

Claims

[Scope of utility model registration request]

In a spin chuck, a square or rectangular substrate to be processed is held substantially horizontally and rotated, and during the rotation, a processing liquid is applied substantially uniformly onto the substrate by using centrifugal force. A screen wall is erected to face at least the front end in the rotation direction of two mutually opposing sides that intersect with the rotation direction among the two sides, and the screen wall is opposed to the front end in the rotation direction. A spin chuck characterized by being provided with movable adjustment.