JPS621247B2 - - Google Patents
Info
- Publication number
- JPS621247B2 JPS621247B2 JP11060780A JP11060780A JPS621247B2 JP S621247 B2 JPS621247 B2 JP S621247B2 JP 11060780 A JP11060780 A JP 11060780A JP 11060780 A JP11060780 A JP 11060780A JP S621247 B2 JPS621247 B2 JP S621247B2
- Authority
- JP
- Japan
- Prior art keywords
- chip
- wafer
- chips
- semiconductor wafer
- defective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000002950 deficient Effects 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000007689 inspection Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 23
- 239000000523 sample Substances 0.000 description 9
- 238000005259 measurement Methods 0.000 description 5
- 238000010330 laser marking Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000005856 abnormality Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11060780A JPS5735333A (en) | 1980-08-12 | 1980-08-12 | Inspection equipment of semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11060780A JPS5735333A (en) | 1980-08-12 | 1980-08-12 | Inspection equipment of semiconductor wafer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5735333A JPS5735333A (en) | 1982-02-25 |
JPS621247B2 true JPS621247B2 (zh) | 1987-01-12 |
Family
ID=14540116
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11060780A Granted JPS5735333A (en) | 1980-08-12 | 1980-08-12 | Inspection equipment of semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5735333A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06250768A (ja) * | 1993-02-23 | 1994-09-09 | Nec Corp | キーボード装置 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0688859B2 (ja) * | 1988-08-09 | 1994-11-09 | 株式会社ミツトヨ | セラミックスのマーキング方法 |
JP2858983B2 (ja) * | 1991-03-15 | 1999-02-17 | 山形日本電気株式会社 | 半導体ウェーハプロービング装置 |
JP2826388B2 (ja) * | 1991-03-18 | 1998-11-18 | 山形日本電気株式会社 | 半導体ウェーハプロービング装置 |
JP2818551B2 (ja) * | 1995-05-31 | 1998-10-30 | 山形日本電気株式会社 | 半導体ウェハのマーキング装置 |
-
1980
- 1980-08-12 JP JP11060780A patent/JPS5735333A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06250768A (ja) * | 1993-02-23 | 1994-09-09 | Nec Corp | キーボード装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS5735333A (en) | 1982-02-25 |
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