JPS6211147A - 異物検査装置 - Google Patents

異物検査装置

Info

Publication number
JPS6211147A
JPS6211147A JP60140142A JP14014285A JPS6211147A JP S6211147 A JPS6211147 A JP S6211147A JP 60140142 A JP60140142 A JP 60140142A JP 14014285 A JP14014285 A JP 14014285A JP S6211147 A JPS6211147 A JP S6211147A
Authority
JP
Japan
Prior art keywords
foreign object
foreign
wafer
inspection
microprocessor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60140142A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0375054B2 (enrdf_load_stackoverflow
Inventor
Toshiaki Taniuchi
谷内　俊明
Takuro Hosoe
細江　卓朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP60140142A priority Critical patent/JPS6211147A/ja
Publication of JPS6211147A publication Critical patent/JPS6211147A/ja
Publication of JPH0375054B2 publication Critical patent/JPH0375054B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP60140142A 1985-06-28 1985-06-28 異物検査装置 Granted JPS6211147A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60140142A JPS6211147A (ja) 1985-06-28 1985-06-28 異物検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60140142A JPS6211147A (ja) 1985-06-28 1985-06-28 異物検査装置

Publications (2)

Publication Number Publication Date
JPS6211147A true JPS6211147A (ja) 1987-01-20
JPH0375054B2 JPH0375054B2 (enrdf_load_stackoverflow) 1991-11-28

Family

ID=15261849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60140142A Granted JPS6211147A (ja) 1985-06-28 1985-06-28 異物検査装置

Country Status (1)

Country Link
JP (1) JPS6211147A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0371014U (enrdf_load_stackoverflow) * 1989-11-15 1991-07-17
US5645441A (en) * 1995-05-18 1997-07-08 Niles Parts Co., Ltd. Rotary connector device
US5730386A (en) * 1995-09-04 1998-03-24 Sumitomo Electric Industries, Ltd. Cable reel

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0371014U (enrdf_load_stackoverflow) * 1989-11-15 1991-07-17
US5645441A (en) * 1995-05-18 1997-07-08 Niles Parts Co., Ltd. Rotary connector device
US5730386A (en) * 1995-09-04 1998-03-24 Sumitomo Electric Industries, Ltd. Cable reel

Also Published As

Publication number Publication date
JPH0375054B2 (enrdf_load_stackoverflow) 1991-11-28

Similar Documents

Publication Publication Date Title
JPS6211147A (ja) 異物検査装置
JP2524532B2 (ja) ウエハ異物検査装置
JPS6211139A (ja) 異物検査装置
JPH0774788B2 (ja) 異物有無検査装置
JPS6211146A (ja) 異物検査装置
JPS6211136A (ja) 異物検査装置
JPS6211148A (ja) 異物検査装置
JPH0378928B2 (enrdf_load_stackoverflow)
JPS6211141A (ja) 異物検査装置
JPH03156947A (ja) 検査方法
JP2735217B2 (ja) 表面欠陥検査装置
JPH0378929B2 (enrdf_load_stackoverflow)
JPS6269151A (ja) ウエハ異物検査装置
JPS6276732A (ja) 異物検査装置
JPH0363818B2 (enrdf_load_stackoverflow)
JPS61278739A (ja) 異物検査装置
JPS6211149A (ja) 異物検査装置
JPS6269148A (ja) ウエハ異物検査装置
JPS6269150A (ja) ウエハ異物検査装置
JPH0363817B2 (enrdf_load_stackoverflow)
JPH0523620B2 (enrdf_load_stackoverflow)
JPS6211142A (ja) 異物検査装置
JPS6269149A (ja) ウエハ異物検査装置
JPH0347736B2 (enrdf_load_stackoverflow)
JPS6341038A (ja) ウエハ異物検査装置

Legal Events

Date Code Title Description
S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees