JPH0363817B2 - - Google Patents
Info
- Publication number
- JPH0363817B2 JPH0363817B2 JP15187785A JP15187785A JPH0363817B2 JP H0363817 B2 JPH0363817 B2 JP H0363817B2 JP 15187785 A JP15187785 A JP 15187785A JP 15187785 A JP15187785 A JP 15187785A JP H0363817 B2 JPH0363817 B2 JP H0363817B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- foreign matter
- offset angle
- foreign
- rotation stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15187785A JPS6213044A (ja) | 1985-07-10 | 1985-07-10 | ウエハ異物検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15187785A JPS6213044A (ja) | 1985-07-10 | 1985-07-10 | ウエハ異物検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6213044A JPS6213044A (ja) | 1987-01-21 |
| JPH0363817B2 true JPH0363817B2 (enrdf_load_stackoverflow) | 1991-10-02 |
Family
ID=15528155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15187785A Granted JPS6213044A (ja) | 1985-07-10 | 1985-07-10 | ウエハ異物検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6213044A (enrdf_load_stackoverflow) |
-
1985
- 1985-07-10 JP JP15187785A patent/JPS6213044A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6213044A (ja) | 1987-01-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| R371 | Transfer withdrawn |
Free format text: JAPANESE INTERMEDIATE CODE: R371 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| EXPY | Cancellation because of completion of term |