JPS6213044A - ウエハ異物検査装置 - Google Patents

ウエハ異物検査装置

Info

Publication number
JPS6213044A
JPS6213044A JP15187785A JP15187785A JPS6213044A JP S6213044 A JPS6213044 A JP S6213044A JP 15187785 A JP15187785 A JP 15187785A JP 15187785 A JP15187785 A JP 15187785A JP S6213044 A JPS6213044 A JP S6213044A
Authority
JP
Japan
Prior art keywords
wafer
foreign matter
offset angle
stage
foreign
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15187785A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0363817B2 (enrdf_load_stackoverflow
Inventor
Toshiaki Taniuchi
谷内　俊明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP15187785A priority Critical patent/JPS6213044A/ja
Publication of JPS6213044A publication Critical patent/JPS6213044A/ja
Publication of JPH0363817B2 publication Critical patent/JPH0363817B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP15187785A 1985-07-10 1985-07-10 ウエハ異物検査装置 Granted JPS6213044A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15187785A JPS6213044A (ja) 1985-07-10 1985-07-10 ウエハ異物検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15187785A JPS6213044A (ja) 1985-07-10 1985-07-10 ウエハ異物検査装置

Publications (2)

Publication Number Publication Date
JPS6213044A true JPS6213044A (ja) 1987-01-21
JPH0363817B2 JPH0363817B2 (enrdf_load_stackoverflow) 1991-10-02

Family

ID=15528155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15187785A Granted JPS6213044A (ja) 1985-07-10 1985-07-10 ウエハ異物検査装置

Country Status (1)

Country Link
JP (1) JPS6213044A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0363817B2 (enrdf_load_stackoverflow) 1991-10-02

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