JPH0375054B2 - - Google Patents

Info

Publication number
JPH0375054B2
JPH0375054B2 JP60140142A JP14014285A JPH0375054B2 JP H0375054 B2 JPH0375054 B2 JP H0375054B2 JP 60140142 A JP60140142 A JP 60140142A JP 14014285 A JP14014285 A JP 14014285A JP H0375054 B2 JPH0375054 B2 JP H0375054B2
Authority
JP
Japan
Prior art keywords
foreign object
foreign
foreign matter
wafer
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60140142A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6211147A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP60140142A priority Critical patent/JPS6211147A/ja
Publication of JPS6211147A publication Critical patent/JPS6211147A/ja
Publication of JPH0375054B2 publication Critical patent/JPH0375054B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP60140142A 1985-06-28 1985-06-28 異物検査装置 Granted JPS6211147A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60140142A JPS6211147A (ja) 1985-06-28 1985-06-28 異物検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60140142A JPS6211147A (ja) 1985-06-28 1985-06-28 異物検査装置

Publications (2)

Publication Number Publication Date
JPS6211147A JPS6211147A (ja) 1987-01-20
JPH0375054B2 true JPH0375054B2 (enrdf_load_stackoverflow) 1991-11-28

Family

ID=15261849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60140142A Granted JPS6211147A (ja) 1985-06-28 1985-06-28 異物検査装置

Country Status (1)

Country Link
JP (1) JPS6211147A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0371014U (enrdf_load_stackoverflow) * 1989-11-15 1991-07-17
US5645441A (en) * 1995-05-18 1997-07-08 Niles Parts Co., Ltd. Rotary connector device
JPH0973965A (ja) * 1995-09-04 1997-03-18 Sumitomo Electric Ind Ltd ケーブルリール

Also Published As

Publication number Publication date
JPS6211147A (ja) 1987-01-20

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Legal Events

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