JPS6194340A - 半導体ウェハのケガキ傷形成装置 - Google Patents

半導体ウェハのケガキ傷形成装置

Info

Publication number
JPS6194340A
JPS6194340A JP59217137A JP21713784A JPS6194340A JP S6194340 A JPS6194340 A JP S6194340A JP 59217137 A JP59217137 A JP 59217137A JP 21713784 A JP21713784 A JP 21713784A JP S6194340 A JPS6194340 A JP S6194340A
Authority
JP
Japan
Prior art keywords
scriber
wafer
edge
scratches
stop table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59217137A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0244149B2 (enExample
Inventor
Hayamizu Fukada
深田　速水
Haruo Tanaka
田中　治夫
Masahito Mushigami
雅人 虫上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP59217137A priority Critical patent/JPS6194340A/ja
Publication of JPS6194340A publication Critical patent/JPS6194340A/ja
Publication of JPH0244149B2 publication Critical patent/JPH0244149B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P54/00—

Landscapes

  • Dicing (AREA)
JP59217137A 1984-10-15 1984-10-15 半導体ウェハのケガキ傷形成装置 Granted JPS6194340A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59217137A JPS6194340A (ja) 1984-10-15 1984-10-15 半導体ウェハのケガキ傷形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59217137A JPS6194340A (ja) 1984-10-15 1984-10-15 半導体ウェハのケガキ傷形成装置

Publications (2)

Publication Number Publication Date
JPS6194340A true JPS6194340A (ja) 1986-05-13
JPH0244149B2 JPH0244149B2 (enExample) 1990-10-02

Family

ID=16699430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59217137A Granted JPS6194340A (ja) 1984-10-15 1984-10-15 半導体ウェハのケガキ傷形成装置

Country Status (1)

Country Link
JP (1) JPS6194340A (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58159743U (ja) * 1982-04-19 1983-10-25 日本電気株式会社 半導体ペレツタイズ装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58159743U (ja) * 1982-04-19 1983-10-25 日本電気株式会社 半導体ペレツタイズ装置

Also Published As

Publication number Publication date
JPH0244149B2 (enExample) 1990-10-02

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