JPS6194241A

JPS6194241A - 磁気記録媒体の製造方法

磁気記録媒体の製造方法

Info

Publication number: JPS6194241A
Authority: JP; Japan
Prior art keywords: magnetic; vapor; thin film; magnetic recording; vapor deposition
Prior art date: 1984-10-16
Legal status : Granted

Application number

JP21692484A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0461413B2 (enrdf_load_stackoverflow

Inventor

Yoshihiro Arai

芳博荒井

Ryuji Shirahata

龍司白幡

Current Assignee

Fujifilm Holdings Corp

Original Assignee

Fuji Photo Film Co Ltd

Priority date

1984-10-16

Filing date

1984-10-16

Publication date

1986-05-13

1984-10-16 Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd

1984-10-16 Priority to JP21692484A priority Critical patent/JPS6194241A/ja

1986-05-13 Publication of JPS6194241A publication Critical patent/JPS6194241A/ja

1992-09-30 Publication of JPH0461413B2 publication Critical patent/JPH0461413B2/ja

Status Granted legal-status Critical Current

Links

230000005291 magnetic effect Effects 0.000 title claims abstract description 68
238000004519 manufacturing process Methods 0.000 title claims abstract description 12
239000010409 thin film Substances 0.000 claims abstract description 22
230000005294 ferromagnetic effect Effects 0.000 claims abstract description 11
239000000314 lubricant Substances 0.000 claims abstract description 9
239000000758 substrate Substances 0.000 claims abstract description 9
230000008021 deposition Effects 0.000 claims abstract description 5
239000010408 film Substances 0.000 abstract description 17
238000007740 vapor deposition Methods 0.000 abstract description 15
239000000463 material Substances 0.000 abstract description 6
-1 polyethylene terephthalate Polymers 0.000 abstract description 6
TWJNQYPJQDRXPH-UHFFFAOYSA-N 2-cyanobenzohydrazide Chemical compound NNC(=O)C1=CC=CC=C1C#N TWJNQYPJQDRXPH-UHFFFAOYSA-N 0.000 abstract description 3
235000021360 Myristic acid Nutrition 0.000 abstract description 3
TUNFSRHWOTWDNC-UHFFFAOYSA-N Myristic acid Natural products CCCCCCCCCCCCCC(O)=O TUNFSRHWOTWDNC-UHFFFAOYSA-N 0.000 abstract description 3
229910052799 carbon Inorganic materials 0.000 abstract description 3
238000001816 cooling Methods 0.000 abstract description 3
229920000139 polyethylene terephthalate Polymers 0.000 abstract description 3
239000005020 polyethylene terephthalate Substances 0.000 abstract description 3
229910017052 cobalt Inorganic materials 0.000 abstract description 2
239000010941 cobalt Substances 0.000 abstract description 2
GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 abstract description 2
239000011248 coating agent Substances 0.000 abstract 1
238000000576 coating method Methods 0.000 abstract 1
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238000000034 method Methods 0.000 description 15
229910052751 metal Inorganic materials 0.000 description 10
239000002184 metal Substances 0.000 description 10
239000011230 binding agent Substances 0.000 description 7
238000001704 evaporation Methods 0.000 description 6
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
230000008020 evaporation Effects 0.000 description 5
229910052760 oxygen Inorganic materials 0.000 description 5
239000001301 oxygen Substances 0.000 description 5
229910052804 chromium Inorganic materials 0.000 description 4
238000000151 deposition Methods 0.000 description 4
235000014113 dietary fatty acids Nutrition 0.000 description 4
239000000194 fatty acid Substances 0.000 description 4
229930195729 fatty acid Natural products 0.000 description 4
239000000956 alloy Substances 0.000 description 3
229910045601 alloy Inorganic materials 0.000 description 3
125000004432 carbon atom Chemical group C* 0.000 description 3
150000004665 fatty acids Chemical class 0.000 description 3
229910052759 nickel Inorganic materials 0.000 description 3
238000001771 vacuum deposition Methods 0.000 description 3
235000021355 Stearic acid Nutrition 0.000 description 2
230000015572 biosynthetic process Effects 0.000 description 2
230000007797 corrosion Effects 0.000 description 2
238000005260 corrosion Methods 0.000 description 2
238000011156 evaluation Methods 0.000 description 2
SZVJSHCCFOBDDC-UHFFFAOYSA-N ferrosoferric oxide Chemical compound O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 description 2
239000000696 magnetic material Substances 0.000 description 2
230000005415 magnetization Effects 0.000 description 2
239000007769 metal material Substances 0.000 description 2
150000002739 metals Chemical class 0.000 description 2
QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 2
OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 2
238000007747 plating Methods 0.000 description 2
239000000843 powder Substances 0.000 description 2
239000008117 stearic acid Substances 0.000 description 2
238000003860 storage Methods 0.000 description 2
238000007738 vacuum evaporation Methods 0.000 description 2
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
229920002284 Cellulose triacetate Polymers 0.000 description 1
208000032544 Cicatrix Diseases 0.000 description 1
229910020630 Co Ni Inorganic materials 0.000 description 1
229910002441 CoNi Inorganic materials 0.000 description 1
229910000684 Cobalt-chrome Inorganic materials 0.000 description 1
229910002440 Co–Ni Inorganic materials 0.000 description 1
229910017061 Fe Co Inorganic materials 0.000 description 1
229910002549 Fe–Cu Inorganic materials 0.000 description 1
229910052688 Gadolinium Inorganic materials 0.000 description 1
229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
239000004952 Polyamide Substances 0.000 description 1
239000004642 Polyimide Substances 0.000 description 1
229920002433 Vinyl chloride-vinyl acetate copolymer Polymers 0.000 description 1
NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
150000001298 alcohols Chemical class 0.000 description 1
125000003342 alkenyl group Chemical group 0.000 description 1
125000000217 alkyl group Chemical group 0.000 description 1
239000010952 cobalt-chrome Substances 0.000 description 1
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238000010586 diagram Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
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238000007772 electroless plating Methods 0.000 description 1
238000010894 electron beam technology Methods 0.000 description 1
238000009713 electroplating Methods 0.000 description 1
239000003822 epoxy resin Substances 0.000 description 1
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239000007789 gas Substances 0.000 description 1
238000010438 heat treatment Methods 0.000 description 1
229910010272 inorganic material Inorganic materials 0.000 description 1
239000011147 inorganic material Substances 0.000 description 1
150000002500 ions Chemical class 0.000 description 1
229910052746 lanthanum Inorganic materials 0.000 description 1
239000006247 magnetic powder Substances 0.000 description 1
229910044991 metal oxide Inorganic materials 0.000 description 1
150000004706 metal oxides Chemical class 0.000 description 1
239000011368 organic material Substances 0.000 description 1
239000004033 plastic Substances 0.000 description 1
229920003023 plastic Polymers 0.000 description 1
229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
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229920000647 polyepoxide Polymers 0.000 description 1
239000011112 polyethylene naphthalate Substances 0.000 description 1
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239000004800 polyvinyl chloride Substances 0.000 description 1
230000002265 prevention Effects 0.000 description 1
238000011084 recovery Methods 0.000 description 1
229910052703 rhodium Inorganic materials 0.000 description 1
150000003839 salts Chemical class 0.000 description 1
231100000241 scar Toxicity 0.000 description 1
230000037387 scars Effects 0.000 description 1
229920002545 silicone oil Polymers 0.000 description 1
239000002904 solvent Substances 0.000 description 1
238000004544 sputter deposition Methods 0.000 description 1
229920003048 styrene butadiene rubber Polymers 0.000 description 1
239000000126 substance Substances 0.000 description 1
238000004804 winding Methods 0.000 description 1
229910052727 yttrium Inorganic materials 0.000 description 1