JPS6193629A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6193629A
JPS6193629A JP59215606A JP21560684A JPS6193629A JP S6193629 A JPS6193629 A JP S6193629A JP 59215606 A JP59215606 A JP 59215606A JP 21560684 A JP21560684 A JP 21560684A JP S6193629 A JPS6193629 A JP S6193629A
Authority
JP
Japan
Prior art keywords
film
titanium
platinum
aluminum
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59215606A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0451050B2 (OSRAM
Inventor
Hiromichi Kono
博通 河野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP59215606A priority Critical patent/JPS6193629A/ja
Publication of JPS6193629A publication Critical patent/JPS6193629A/ja
Publication of JPH0451050B2 publication Critical patent/JPH0451050B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP59215606A 1984-10-15 1984-10-15 半導体装置の製造方法 Granted JPS6193629A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59215606A JPS6193629A (ja) 1984-10-15 1984-10-15 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59215606A JPS6193629A (ja) 1984-10-15 1984-10-15 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6193629A true JPS6193629A (ja) 1986-05-12
JPH0451050B2 JPH0451050B2 (OSRAM) 1992-08-18

Family

ID=16675211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59215606A Granted JPS6193629A (ja) 1984-10-15 1984-10-15 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6193629A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006339509A (ja) * 2005-06-03 2006-12-14 Tosoh Corp 金属チタンのエッチング用組成物及びそれを用いたエッチング方法
DE19915348B4 (de) * 1999-04-06 2019-06-27 Schaeffler Technologies AG & Co. KG Gleitlager

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5198957A (OSRAM) * 1975-02-26 1976-08-31
JPS55138235A (en) * 1979-04-13 1980-10-28 Toshiba Corp Manufacture of titanic etching solution and semiconductor device using this etching solution

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5198957A (OSRAM) * 1975-02-26 1976-08-31
JPS55138235A (en) * 1979-04-13 1980-10-28 Toshiba Corp Manufacture of titanic etching solution and semiconductor device using this etching solution

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19915348B4 (de) * 1999-04-06 2019-06-27 Schaeffler Technologies AG & Co. KG Gleitlager
JP2006339509A (ja) * 2005-06-03 2006-12-14 Tosoh Corp 金属チタンのエッチング用組成物及びそれを用いたエッチング方法

Also Published As

Publication number Publication date
JPH0451050B2 (OSRAM) 1992-08-18

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