JPS6173394A - 除塵洗浄装置 - Google Patents
除塵洗浄装置Info
- Publication number
- JPS6173394A JPS6173394A JP59195927A JP19592784A JPS6173394A JP S6173394 A JPS6173394 A JP S6173394A JP 59195927 A JP59195927 A JP 59195927A JP 19592784 A JP19592784 A JP 19592784A JP S6173394 A JPS6173394 A JP S6173394A
- Authority
- JP
- Japan
- Prior art keywords
- dust removal
- article
- conveyor
- treated
- removal chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000428 dust Substances 0.000 title claims description 45
- 238000004140 cleaning Methods 0.000 title claims description 7
- 238000005192 partition Methods 0.000 claims description 13
- 230000003068 static effect Effects 0.000 claims description 11
- 238000003825 pressing Methods 0.000 claims description 6
- 230000008030 elimination Effects 0.000 claims description 5
- 238000003379 elimination reaction Methods 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 3
- 238000000638 solvent extraction Methods 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims description 2
- 238000003860 storage Methods 0.000 description 5
- 238000005299 abrasion Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000009512 pharmaceutical packaging Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Structure Of Belt Conveyors (AREA)
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59195927A JPS6173394A (ja) | 1984-09-18 | 1984-09-18 | 除塵洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59195927A JPS6173394A (ja) | 1984-09-18 | 1984-09-18 | 除塵洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6173394A true JPS6173394A (ja) | 1986-04-15 |
| JPH0152917B2 JPH0152917B2 (enrdf_load_stackoverflow) | 1989-11-10 |
Family
ID=16349288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59195927A Granted JPS6173394A (ja) | 1984-09-18 | 1984-09-18 | 除塵洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6173394A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002126660A (ja) * | 2000-10-23 | 2002-05-08 | Oizumi Corp | 板状体洗浄機 |
| CN101829660A (zh) * | 2009-03-09 | 2010-09-15 | 株式会社长冈制作所 | 基板输送装置 |
| JP2014007077A (ja) * | 2012-06-25 | 2014-01-16 | Dainippon Printing Co Ltd | 異物除去装置 |
| JP2017218299A (ja) * | 2016-06-09 | 2017-12-14 | 富士電機機器制御株式会社 | 搬送装置 |
| JP2022071934A (ja) * | 2020-10-29 | 2022-05-17 | 株式会社Ssg | ソーラーパネル洗浄装置及びソーラーパネルの洗浄方法 |
-
1984
- 1984-09-18 JP JP59195927A patent/JPS6173394A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002126660A (ja) * | 2000-10-23 | 2002-05-08 | Oizumi Corp | 板状体洗浄機 |
| CN101829660A (zh) * | 2009-03-09 | 2010-09-15 | 株式会社长冈制作所 | 基板输送装置 |
| JP2014007077A (ja) * | 2012-06-25 | 2014-01-16 | Dainippon Printing Co Ltd | 異物除去装置 |
| JP2017218299A (ja) * | 2016-06-09 | 2017-12-14 | 富士電機機器制御株式会社 | 搬送装置 |
| JP2022071934A (ja) * | 2020-10-29 | 2022-05-17 | 株式会社Ssg | ソーラーパネル洗浄装置及びソーラーパネルの洗浄方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0152917B2 (enrdf_load_stackoverflow) | 1989-11-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100212074B1 (ko) | 기판의 액제거장치 | |
| US20090223015A1 (en) | Automatic pallet cleaning apparatus | |
| JP2003081406A (ja) | クリーンルーム用の物品保管設備 | |
| JPS6173394A (ja) | 除塵洗浄装置 | |
| JPH0811224B2 (ja) | 物品清浄装置 | |
| JP3117649B2 (ja) | 移送品の除塵装置 | |
| JP3720421B2 (ja) | 除電方法 | |
| JPH06509864A (ja) | 物体取扱設備および方法 | |
| JP2008104958A (ja) | 梱包資材の除塵装置 | |
| JPS6174688A (ja) | 除塵洗浄装置 | |
| JP2004269214A (ja) | 浄化空気通風式の保管設備 | |
| KR100885907B1 (ko) | 에어 크린룸용 에어 크리닝 유니트 | |
| JPH10156302A (ja) | 移送品の除塵装置 | |
| JP5981833B2 (ja) | Ｐｔｐ包装機 | |
| JPH0122756B2 (enrdf_load_stackoverflow) | ||
| JPH0973993A (ja) | 除電方法及びその装置 | |
| JPH0994546A (ja) | 基板の液切り装置 | |
| JP2006019525A (ja) | 基板処理装置 | |
| JP2005109112A (ja) | テープ状部材の洗浄方法及び洗浄装置 | |
| JP2005262088A (ja) | 支持体表面の防塵方法及び装置 | |
| JPH06100356B2 (ja) | ライン形クリーンキューブ装置 | |
| US7208045B2 (en) | Powdering unit, powdering station and method for their operation | |
| JP5467905B2 (ja) | フイルム搬送装置及び方法、フイルム製造装置及び方法 | |
| JP3282279B2 (ja) | 板状物の乾燥装置 | |
| JP2603209Y2 (ja) | 基板搬送装置 |