JPH0122756B2 - - Google Patents

Info

Publication number
JPH0122756B2
JPH0122756B2 JP11487082A JP11487082A JPH0122756B2 JP H0122756 B2 JPH0122756 B2 JP H0122756B2 JP 11487082 A JP11487082 A JP 11487082A JP 11487082 A JP11487082 A JP 11487082A JP H0122756 B2 JPH0122756 B2 JP H0122756B2
Authority
JP
Japan
Prior art keywords
dust removal
removal chamber
article
air supply
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11487082A
Other languages
English (en)
Japanese (ja)
Other versions
JPS595694A (ja
Inventor
Taiji Osame
Juichi Sawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hosokawa Micron Corp
Original Assignee
Hosokawa Micron Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hosokawa Micron Corp filed Critical Hosokawa Micron Corp
Priority to JP11487082A priority Critical patent/JPS595694A/ja
Publication of JPS595694A publication Critical patent/JPS595694A/ja
Publication of JPH0122756B2 publication Critical patent/JPH0122756B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP11487082A 1982-07-01 1982-07-01 除塵洗浄装置 Granted JPS595694A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11487082A JPS595694A (ja) 1982-07-01 1982-07-01 除塵洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11487082A JPS595694A (ja) 1982-07-01 1982-07-01 除塵洗浄装置

Publications (2)

Publication Number Publication Date
JPS595694A JPS595694A (ja) 1984-01-12
JPH0122756B2 true JPH0122756B2 (enrdf_load_stackoverflow) 1989-04-27

Family

ID=14648744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11487082A Granted JPS595694A (ja) 1982-07-01 1982-07-01 除塵洗浄装置

Country Status (1)

Country Link
JP (1) JPS595694A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6174688A (ja) * 1984-09-19 1986-04-16 ホソカワミクロン株式会社 除塵洗浄装置
JP2010207687A (ja) * 2009-03-09 2010-09-24 Nagaoka Seisakusho:Kk 基板搬送装置

Also Published As

Publication number Publication date
JPS595694A (ja) 1984-01-12

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