JPS595694A - 除塵洗浄装置 - Google Patents
除塵洗浄装置Info
- Publication number
- JPS595694A JPS595694A JP11487082A JP11487082A JPS595694A JP S595694 A JPS595694 A JP S595694A JP 11487082 A JP11487082 A JP 11487082A JP 11487082 A JP11487082 A JP 11487082A JP S595694 A JPS595694 A JP S595694A
- Authority
- JP
- Japan
- Prior art keywords
- dust removal
- removal chamber
- conveyor
- objects
- air supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000428 dust Substances 0.000 title claims description 57
- 238000004140 cleaning Methods 0.000 title claims description 18
- 238000005192 partition Methods 0.000 claims description 11
- 230000003068 static effect Effects 0.000 claims description 8
- 230000005611 electricity Effects 0.000 claims description 2
- 239000007921 spray Substances 0.000 claims description 2
- 244000144985 peep Species 0.000 claims 1
- 238000000034 method Methods 0.000 description 4
- 230000008030 elimination Effects 0.000 description 3
- 238000003379 elimination reaction Methods 0.000 description 3
- 238000005507 spraying Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009512 pharmaceutical packaging Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11487082A JPS595694A (ja) | 1982-07-01 | 1982-07-01 | 除塵洗浄装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11487082A JPS595694A (ja) | 1982-07-01 | 1982-07-01 | 除塵洗浄装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS595694A true JPS595694A (ja) | 1984-01-12 |
JPH0122756B2 JPH0122756B2 (enrdf_load_stackoverflow) | 1989-04-27 |
Family
ID=14648744
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11487082A Granted JPS595694A (ja) | 1982-07-01 | 1982-07-01 | 除塵洗浄装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS595694A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6174688A (ja) * | 1984-09-19 | 1986-04-16 | ホソカワミクロン株式会社 | 除塵洗浄装置 |
CN101829660A (zh) * | 2009-03-09 | 2010-09-15 | 株式会社长冈制作所 | 基板输送装置 |
-
1982
- 1982-07-01 JP JP11487082A patent/JPS595694A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6174688A (ja) * | 1984-09-19 | 1986-04-16 | ホソカワミクロン株式会社 | 除塵洗浄装置 |
CN101829660A (zh) * | 2009-03-09 | 2010-09-15 | 株式会社长冈制作所 | 基板输送装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0122756B2 (enrdf_load_stackoverflow) | 1989-04-27 |
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