JPS6161545B2 - - Google Patents

Info

Publication number
JPS6161545B2
JPS6161545B2 JP55017905A JP1790580A JPS6161545B2 JP S6161545 B2 JPS6161545 B2 JP S6161545B2 JP 55017905 A JP55017905 A JP 55017905A JP 1790580 A JP1790580 A JP 1790580A JP S6161545 B2 JPS6161545 B2 JP S6161545B2
Authority
JP
Japan
Prior art keywords
film
polycrystalline silicon
insulating film
silicon film
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55017905A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56115566A (en
Inventor
Satoshi Myauchi
Kentaro Yoshioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP1790580A priority Critical patent/JPS56115566A/ja
Publication of JPS56115566A publication Critical patent/JPS56115566A/ja
Publication of JPS6161545B2 publication Critical patent/JPS6161545B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W20/069—

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP1790580A 1980-02-18 1980-02-18 Manufacture of mos semiconductor device Granted JPS56115566A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1790580A JPS56115566A (en) 1980-02-18 1980-02-18 Manufacture of mos semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1790580A JPS56115566A (en) 1980-02-18 1980-02-18 Manufacture of mos semiconductor device

Publications (2)

Publication Number Publication Date
JPS56115566A JPS56115566A (en) 1981-09-10
JPS6161545B2 true JPS6161545B2 (enExample) 1986-12-26

Family

ID=11956752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1790580A Granted JPS56115566A (en) 1980-02-18 1980-02-18 Manufacture of mos semiconductor device

Country Status (1)

Country Link
JP (1) JPS56115566A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02115857A (ja) * 1988-10-26 1990-04-27 Buyoudou Seisanbu:Kk Ｐｓ版と複数枚のフイルムとの位置合わせ方法
JPH02115856A (ja) * 1988-10-26 1990-04-27 Buyoudou Seisanbu:Kk Ｐｓ版と複数枚のフイルムとの位置合わせ方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01255265A (ja) * 1988-04-05 1989-10-12 Nec Corp 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02115857A (ja) * 1988-10-26 1990-04-27 Buyoudou Seisanbu:Kk Ｐｓ版と複数枚のフイルムとの位置合わせ方法
JPH02115856A (ja) * 1988-10-26 1990-04-27 Buyoudou Seisanbu:Kk Ｐｓ版と複数枚のフイルムとの位置合わせ方法

Also Published As

Publication number Publication date
JPS56115566A (en) 1981-09-10

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