JPS56115566A - Manufacture of mos semiconductor device - Google Patents
Manufacture of mos semiconductor deviceInfo
- Publication number
- JPS56115566A JPS56115566A JP1790580A JP1790580A JPS56115566A JP S56115566 A JPS56115566 A JP S56115566A JP 1790580 A JP1790580 A JP 1790580A JP 1790580 A JP1790580 A JP 1790580A JP S56115566 A JPS56115566 A JP S56115566A
- Authority
- JP
- Japan
- Prior art keywords
- film
- polycrystalline silicon
- removing part
- manufacture
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1790580A JPS56115566A (en) | 1980-02-18 | 1980-02-18 | Manufacture of mos semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1790580A JPS56115566A (en) | 1980-02-18 | 1980-02-18 | Manufacture of mos semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56115566A true JPS56115566A (en) | 1981-09-10 |
JPS6161545B2 JPS6161545B2 (ja) | 1986-12-26 |
Family
ID=11956752
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1790580A Granted JPS56115566A (en) | 1980-02-18 | 1980-02-18 | Manufacture of mos semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56115566A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01255265A (ja) * | 1988-04-05 | 1989-10-12 | Nec Corp | 半導体装置の製造方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02115856A (ja) * | 1988-10-26 | 1990-04-27 | Buyoudou Seisanbu:Kk | Ps版と複数枚のフイルムとの位置合わせ方法 |
JPH02115857A (ja) * | 1988-10-26 | 1990-04-27 | Buyoudou Seisanbu:Kk | Ps版と複数枚のフイルムとの位置合わせ方法 |
-
1980
- 1980-02-18 JP JP1790580A patent/JPS56115566A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01255265A (ja) * | 1988-04-05 | 1989-10-12 | Nec Corp | 半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6161545B2 (ja) | 1986-12-26 |
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