JPS6156618B2 - - Google Patents

Info

Publication number
JPS6156618B2
JPS6156618B2 JP52018193A JP1819377A JPS6156618B2 JP S6156618 B2 JPS6156618 B2 JP S6156618B2 JP 52018193 A JP52018193 A JP 52018193A JP 1819377 A JP1819377 A JP 1819377A JP S6156618 B2 JPS6156618 B2 JP S6156618B2
Authority
JP
Japan
Prior art keywords
film
insulating film
forming
polymer insulating
organic polymer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52018193A
Other languages
English (en)
Japanese (ja)
Other versions
JPS53104185A (en
Inventor
Atsushi Saiki
Kazuyoshi Ueki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1819377A priority Critical patent/JPS53104185A/ja
Publication of JPS53104185A publication Critical patent/JPS53104185A/ja
Publication of JPS6156618B2 publication Critical patent/JPS6156618B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP1819377A 1977-02-23 1977-02-23 Production of semiconductor device Granted JPS53104185A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1819377A JPS53104185A (en) 1977-02-23 1977-02-23 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1819377A JPS53104185A (en) 1977-02-23 1977-02-23 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS53104185A JPS53104185A (en) 1978-09-11
JPS6156618B2 true JPS6156618B2 (enExample) 1986-12-03

Family

ID=11964780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1819377A Granted JPS53104185A (en) 1977-02-23 1977-02-23 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53104185A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4654295A (en) * 1983-12-05 1987-03-31 Energy Conversion Devices, Inc. Method of making short channel thin film field effect transistor
JPS60164364A (ja) * 1984-02-07 1985-08-27 Seiko Instr & Electronics Ltd 薄膜半導体装置の製造方法
TWI339444B (en) 2007-05-30 2011-03-21 Au Optronics Corp Conductor structure, pixel structure, and methods of forming the same

Also Published As

Publication number Publication date
JPS53104185A (en) 1978-09-11

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