JPS6153824B2 - - Google Patents

Info

Publication number
JPS6153824B2
JPS6153824B2 JP55127918A JP12791880A JPS6153824B2 JP S6153824 B2 JPS6153824 B2 JP S6153824B2 JP 55127918 A JP55127918 A JP 55127918A JP 12791880 A JP12791880 A JP 12791880A JP S6153824 B2 JPS6153824 B2 JP S6153824B2
Authority
JP
Japan
Prior art keywords
electron beam
image
focusing
observation
focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55127918A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5753050A (en
Inventor
Takashi Yanaka
Akira Yonezawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP55127918A priority Critical patent/JPS5753050A/ja
Publication of JPS5753050A publication Critical patent/JPS5753050A/ja
Publication of JPS6153824B2 publication Critical patent/JPS6153824B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP55127918A 1980-09-17 1980-09-17 Focussing device for electron microscope Granted JPS5753050A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55127918A JPS5753050A (en) 1980-09-17 1980-09-17 Focussing device for electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55127918A JPS5753050A (en) 1980-09-17 1980-09-17 Focussing device for electron microscope

Publications (2)

Publication Number Publication Date
JPS5753050A JPS5753050A (en) 1982-03-29
JPS6153824B2 true JPS6153824B2 (enrdf_load_html_response) 1986-11-19

Family

ID=14971852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55127918A Granted JPS5753050A (en) 1980-09-17 1980-09-17 Focussing device for electron microscope

Country Status (1)

Country Link
JP (1) JPS5753050A (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63237767A (ja) * 1987-03-25 1988-10-04 Kanebo Ltd レトルト殺菌密封容器入飲料

Also Published As

Publication number Publication date
JPS5753050A (en) 1982-03-29

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