JPS5753050A - Focussing device for electron microscope - Google Patents
Focussing device for electron microscopeInfo
- Publication number
- JPS5753050A JPS5753050A JP55127918A JP12791880A JPS5753050A JP S5753050 A JPS5753050 A JP S5753050A JP 55127918 A JP55127918 A JP 55127918A JP 12791880 A JP12791880 A JP 12791880A JP S5753050 A JPS5753050 A JP S5753050A
- Authority
- JP
- Japan
- Prior art keywords
- image surface
- insufficient
- focal point
- electron beams
- focussing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 abstract 7
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/21—Means for adjusting the focus
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55127918A JPS5753050A (en) | 1980-09-17 | 1980-09-17 | Focussing device for electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55127918A JPS5753050A (en) | 1980-09-17 | 1980-09-17 | Focussing device for electron microscope |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5753050A true JPS5753050A (en) | 1982-03-29 |
JPS6153824B2 JPS6153824B2 (enrdf_load_html_response) | 1986-11-19 |
Family
ID=14971852
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55127918A Granted JPS5753050A (en) | 1980-09-17 | 1980-09-17 | Focussing device for electron microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5753050A (enrdf_load_html_response) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63237767A (ja) * | 1987-03-25 | 1988-10-04 | Kanebo Ltd | レトルト殺菌密封容器入飲料 |
-
1980
- 1980-09-17 JP JP55127918A patent/JPS5753050A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63237767A (ja) * | 1987-03-25 | 1988-10-04 | Kanebo Ltd | レトルト殺菌密封容器入飲料 |
Also Published As
Publication number | Publication date |
---|---|
JPS6153824B2 (enrdf_load_html_response) | 1986-11-19 |
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