JPS5753050A - Focussing device for electron microscope - Google Patents

Focussing device for electron microscope

Info

Publication number
JPS5753050A
JPS5753050A JP55127918A JP12791880A JPS5753050A JP S5753050 A JPS5753050 A JP S5753050A JP 55127918 A JP55127918 A JP 55127918A JP 12791880 A JP12791880 A JP 12791880A JP S5753050 A JPS5753050 A JP S5753050A
Authority
JP
Japan
Prior art keywords
image surface
insufficient
focal point
electron beams
focussing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55127918A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6153824B2 (enrdf_load_html_response
Inventor
Takashi Yanaka
Akira Yonezawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INTERNATL PRECISION Inc
Original Assignee
INTERNATL PRECISION Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INTERNATL PRECISION Inc filed Critical INTERNATL PRECISION Inc
Priority to JP55127918A priority Critical patent/JPS5753050A/ja
Publication of JPS5753050A publication Critical patent/JPS5753050A/ja
Publication of JPS6153824B2 publication Critical patent/JPS6153824B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP55127918A 1980-09-17 1980-09-17 Focussing device for electron microscope Granted JPS5753050A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55127918A JPS5753050A (en) 1980-09-17 1980-09-17 Focussing device for electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55127918A JPS5753050A (en) 1980-09-17 1980-09-17 Focussing device for electron microscope

Publications (2)

Publication Number Publication Date
JPS5753050A true JPS5753050A (en) 1982-03-29
JPS6153824B2 JPS6153824B2 (enrdf_load_html_response) 1986-11-19

Family

ID=14971852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55127918A Granted JPS5753050A (en) 1980-09-17 1980-09-17 Focussing device for electron microscope

Country Status (1)

Country Link
JP (1) JPS5753050A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63237767A (ja) * 1987-03-25 1988-10-04 Kanebo Ltd レトルト殺菌密封容器入飲料

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63237767A (ja) * 1987-03-25 1988-10-04 Kanebo Ltd レトルト殺菌密封容器入飲料

Also Published As

Publication number Publication date
JPS6153824B2 (enrdf_load_html_response) 1986-11-19

Similar Documents

Publication Publication Date Title
CA2084408A1 (en) Illumination system and method for a high definition light microscope
GB1426359A (en) Microbeam probe apparatus
KR950019946A (ko) 웨이퍼상에 패턴을 기록하기 위한 전자빔 시스템
EP0406413A4 (en) Scanning type tunnel microscope
US4479060A (en) Apparatus for irradiation with charged particle beams
JPS5727551A (en) Electron microscope
JPS5753050A (en) Focussing device for electron microscope
JPS5767912A (en) Axis aligning method of electronic optical lens barrel
JPS626300B2 (enrdf_load_html_response)
JP4962749B2 (ja) 光による微粒子操作装置
DE3878939D1 (de) Verfahren zur elektronenstrahl-fuehrung mit energieselektion und elektronenspektrometer.
JPS5760648A (en) Electron microscope
JPS57176017A (en) Spectral microscope device using optical fiber
JPS5533716A (en) Electron microscope focusing lens system
JPS5532304A (en) Electron microscope with optical microscope
JPS5497358A (en) Scanning electron microscope
JPH0537398Y2 (enrdf_load_html_response)
JPS63225459A (ja) レ−ザイオン源装置
JPH0431728Y2 (enrdf_load_html_response)
JPS5652859A (en) Scanning type electron microscope
JPS5757460A (en) Electron microscope
JPS61250950A (ja) 電子顕微鏡の高精度焦点合せ装置
JPS62140346A (ja) 走査形電子顕微鏡
JPS59103360U (ja) 複合顕微鏡
JPS56143645A (en) Locking angle setting device of scanning electron microscope