JPS6152988B2 - - Google Patents
Info
- Publication number
- JPS6152988B2 JPS6152988B2 JP54154451A JP15445179A JPS6152988B2 JP S6152988 B2 JPS6152988 B2 JP S6152988B2 JP 54154451 A JP54154451 A JP 54154451A JP 15445179 A JP15445179 A JP 15445179A JP S6152988 B2 JPS6152988 B2 JP S6152988B2
- Authority
- JP
- Japan
- Prior art keywords
- island
- single crystal
- insulating layer
- boundary
- metal wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 22
- 239000002184 metal Substances 0.000 claims description 22
- 239000013078 crystal Substances 0.000 claims description 17
- 239000004065 semiconductor Substances 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 8
- 230000005684 electric field Effects 0.000 description 14
- 230000015556 catabolic process Effects 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Element Separation (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15445179A JPS5678138A (en) | 1979-11-30 | 1979-11-30 | Integrated semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15445179A JPS5678138A (en) | 1979-11-30 | 1979-11-30 | Integrated semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5678138A JPS5678138A (en) | 1981-06-26 |
| JPS6152988B2 true JPS6152988B2 (da) | 1986-11-15 |
Family
ID=15584498
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15445179A Granted JPS5678138A (en) | 1979-11-30 | 1979-11-30 | Integrated semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5678138A (da) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0136462Y2 (da) * | 1985-10-04 | 1989-11-06 | ||
| JPH0421359Y2 (da) * | 1986-08-01 | 1992-05-15 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4840839A (da) * | 1971-09-27 | 1973-06-15 |
-
1979
- 1979-11-30 JP JP15445179A patent/JPS5678138A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4840839A (da) * | 1971-09-27 | 1973-06-15 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0136462Y2 (da) * | 1985-10-04 | 1989-11-06 | ||
| JPH0421359Y2 (da) * | 1986-08-01 | 1992-05-15 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5678138A (en) | 1981-06-26 |
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