JPS6149362A - テレビジョン電子顕微鏡の焦点合わせ装置および焦点合わせ方法 - Google Patents

テレビジョン電子顕微鏡の焦点合わせ装置および焦点合わせ方法

Info

Publication number
JPS6149362A
JPS6149362A JP59170471A JP17047184A JPS6149362A JP S6149362 A JPS6149362 A JP S6149362A JP 59170471 A JP59170471 A JP 59170471A JP 17047184 A JP17047184 A JP 17047184A JP S6149362 A JPS6149362 A JP S6149362A
Authority
JP
Japan
Prior art keywords
image
television
electron beam
focusing
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59170471A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0588501B2 (enrdf_load_stackoverflow
Inventor
Sadao Nomura
野村　節生
Shigeto Sunakozawa
成人 砂子沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59170471A priority Critical patent/JPS6149362A/ja
Priority to US06/766,272 priority patent/US4680469A/en
Publication of JPS6149362A publication Critical patent/JPS6149362A/ja
Publication of JPH0588501B2 publication Critical patent/JPH0588501B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP59170471A 1984-08-17 1984-08-17 テレビジョン電子顕微鏡の焦点合わせ装置および焦点合わせ方法 Granted JPS6149362A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP59170471A JPS6149362A (ja) 1984-08-17 1984-08-17 テレビジョン電子顕微鏡の焦点合わせ装置および焦点合わせ方法
US06/766,272 US4680469A (en) 1984-08-17 1985-08-16 Focusing device for a television electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59170471A JPS6149362A (ja) 1984-08-17 1984-08-17 テレビジョン電子顕微鏡の焦点合わせ装置および焦点合わせ方法

Publications (2)

Publication Number Publication Date
JPS6149362A true JPS6149362A (ja) 1986-03-11
JPH0588501B2 JPH0588501B2 (enrdf_load_stackoverflow) 1993-12-22

Family

ID=15905554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59170471A Granted JPS6149362A (ja) 1984-08-17 1984-08-17 テレビジョン電子顕微鏡の焦点合わせ装置および焦点合わせ方法

Country Status (1)

Country Link
JP (1) JPS6149362A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63128107A (ja) * 1986-11-18 1988-05-31 Kobe Steel Ltd 高炉ベルレス用下部シ−ル弁洩れ防止方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54139458A (en) * 1978-04-17 1979-10-29 Philips Nv Electron microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54139458A (en) * 1978-04-17 1979-10-29 Philips Nv Electron microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63128107A (ja) * 1986-11-18 1988-05-31 Kobe Steel Ltd 高炉ベルレス用下部シ−ル弁洩れ防止方法

Also Published As

Publication number Publication date
JPH0588501B2 (enrdf_load_stackoverflow) 1993-12-22

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Legal Events

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LAPS Cancellation because of no payment of annual fees