JPS54139458A - Electron microscope - Google Patents

Electron microscope

Info

Publication number
JPS54139458A
JPS54139458A JP4490379A JP4490379A JPS54139458A JP S54139458 A JPS54139458 A JP S54139458A JP 4490379 A JP4490379 A JP 4490379A JP 4490379 A JP4490379 A JP 4490379A JP S54139458 A JPS54139458 A JP S54139458A
Authority
JP
Japan
Prior art keywords
electron microscope
microscope
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4490379A
Other languages
Japanese (ja)
Inventor
Henrikasu Detsukerus Nikoraasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of JPS54139458A publication Critical patent/JPS54139458A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/263—Contrast, resolution or power of penetration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP4490379A 1978-04-17 1979-04-14 Electron microscope Pending JPS54139458A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7804038A NL7804038A (en) 1978-04-17 1978-04-17 ELECTRONIC MICROSKOP.

Publications (1)

Publication Number Publication Date
JPS54139458A true JPS54139458A (en) 1979-10-29

Family

ID=19830665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4490379A Pending JPS54139458A (en) 1978-04-17 1979-04-14 Electron microscope

Country Status (5)

Country Link
JP (1) JPS54139458A (en)
DE (1) DE2915203A1 (en)
FR (1) FR2423861A1 (en)
GB (1) GB2019085B (en)
NL (1) NL7804038A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59228350A (en) * 1983-06-10 1984-12-21 Hitachi Ltd Method for observing high resolution non-interference image
JPS6149362A (en) * 1984-08-17 1986-03-11 Hitachi Ltd Focusion device of television electron microscope
JP2006302523A (en) * 2005-04-15 2006-11-02 Jeol Ltd Transmission electron microscope having scan image observation function
JP2018092805A (en) * 2016-12-05 2018-06-14 日本電子株式会社 Image acquisition method and electron microscopy

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56165255A (en) * 1980-05-26 1981-12-18 Hitachi Ltd Image indicating method for transmission scan electron microscope
US7944012B2 (en) 2003-05-08 2011-05-17 The Science And Technology Facilities Council Accelerated particle and high energy radiation sensor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917905A (en) * 1972-06-07 1974-02-16
JPS4922576A (en) * 1972-06-26 1974-02-28
JPS5118307A (en) * 1974-10-11 1976-02-13 Sanyo Electric Co OOFUKUDOSHIKI ATSUSHUKUKI

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1248201A (en) * 1967-07-03 1971-09-29 Nat Res Dev Electron microscopes
JPS4922768B1 (en) * 1970-09-11 1974-06-11
US3917946A (en) * 1972-04-12 1975-11-04 Philips Corp Electron-optical device for the recording of selected diffraction patterns
GB1443562A (en) * 1973-08-14 1976-07-21 Ontario Research Foundation Method and apparatus for displaying images stereoscopically and for deriving signals from a scanning electron microscope for producing steroscopic images
NL7510276A (en) * 1975-09-01 1977-03-03 Philips Nv ELECTRONIC MICROSKOP.

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917905A (en) * 1972-06-07 1974-02-16
JPS4922576A (en) * 1972-06-26 1974-02-28
JPS5118307A (en) * 1974-10-11 1976-02-13 Sanyo Electric Co OOFUKUDOSHIKI ATSUSHUKUKI

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59228350A (en) * 1983-06-10 1984-12-21 Hitachi Ltd Method for observing high resolution non-interference image
JPS6149362A (en) * 1984-08-17 1986-03-11 Hitachi Ltd Focusion device of television electron microscope
JPH0588501B2 (en) * 1984-08-17 1993-12-22 Hitachi Ltd
JP2006302523A (en) * 2005-04-15 2006-11-02 Jeol Ltd Transmission electron microscope having scan image observation function
JP2018092805A (en) * 2016-12-05 2018-06-14 日本電子株式会社 Image acquisition method and electron microscopy

Also Published As

Publication number Publication date
NL7804038A (en) 1979-10-19
GB2019085A (en) 1979-10-24
GB2019085B (en) 1982-08-04
FR2423861A1 (en) 1979-11-16
DE2915203A1 (en) 1979-10-25
FR2423861B1 (en) 1985-03-01

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