GB1248201A - Electron microscopes - Google Patents

Electron microscopes

Info

Publication number
GB1248201A
GB1248201A GB3055167A GB3055167A GB1248201A GB 1248201 A GB1248201 A GB 1248201A GB 3055167 A GB3055167 A GB 3055167A GB 3055167 A GB3055167 A GB 3055167A GB 1248201 A GB1248201 A GB 1248201A
Authority
GB
United Kingdom
Prior art keywords
electron
specimen
collector
electrons
amplifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3055167A
Inventor
Douglas George Coates
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Research Development Corp UK
Original Assignee
National Research Development Corp UK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Research Development Corp UK filed Critical National Research Development Corp UK
Priority to GB3055167A priority Critical patent/GB1248201A/en
Publication of GB1248201A publication Critical patent/GB1248201A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1,248,201. Electron microscopes. NATIONAL RESEARCH DEVELOPMENT CORP. 2 Oct., 1968 [3 July, 1967], No. 30551/67. Heading H1D. An electron microscope includes means for varying the angle between the electron beam and the normal to the specimen surface at a fixed point and means for collecting absorbed or back scattered electrons (e.g. reflected primary electrons or secondary electrons) such as collector 9 including collector electrode 11, scintillator 13 and photomultiplier 15 connected to amplifier 16 and/or a connection from stage 3 to amplifier 20 connected to grid 17 of C.R.T. 19 via double-throw switch 18. Deflector plates 25, 27 are connected to tilting means 21, 23 and the C.R.T. displays a graphical indication of the collector outputs at a plurality of different angles between the beam and specimen all at the same time and as a function of the angle. Angular variation may be by tilting the specimen and/or varying the beam direction by deflection coils. Electrode 11 is at a low voltage for reflected electron collection, and high voltage for secondary electron collection. The display may be photographed or a high persistence phosphor utilized.
GB3055167A 1967-07-03 1967-07-03 Electron microscopes Expired GB1248201A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB3055167A GB1248201A (en) 1967-07-03 1967-07-03 Electron microscopes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3055167A GB1248201A (en) 1967-07-03 1967-07-03 Electron microscopes

Publications (1)

Publication Number Publication Date
GB1248201A true GB1248201A (en) 1971-09-29

Family

ID=10309413

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3055167A Expired GB1248201A (en) 1967-07-03 1967-07-03 Electron microscopes

Country Status (1)

Country Link
GB (1) GB1248201A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2179978A1 (en) * 1972-04-12 1973-11-23 Philips Nv
FR2423861A1 (en) * 1978-04-17 1979-11-16 Philips Nv ELECTRONIC MICROSCOPE
US5256877A (en) * 1989-09-08 1993-10-26 Isis Innovation Limited Method and apparatus for imaging dislocations in materials using a scanning electron microscope

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2179978A1 (en) * 1972-04-12 1973-11-23 Philips Nv
FR2423861A1 (en) * 1978-04-17 1979-11-16 Philips Nv ELECTRONIC MICROSCOPE
US5256877A (en) * 1989-09-08 1993-10-26 Isis Innovation Limited Method and apparatus for imaging dislocations in materials using a scanning electron microscope

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