GB962086A - Energy-selecting electron microscopes - Google Patents
Energy-selecting electron microscopesInfo
- Publication number
- GB962086A GB962086A GB11463/63A GB1146363A GB962086A GB 962086 A GB962086 A GB 962086A GB 11463/63 A GB11463/63 A GB 11463/63A GB 1146363 A GB1146363 A GB 1146363A GB 962086 A GB962086 A GB 962086A
- Authority
- GB
- United Kingdom
- Prior art keywords
- energy
- electron microscopes
- march
- aperture
- electrons
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Beam Exposure (AREA)
Abstract
962,086. Electron microscopes. HITACHI Ltd. March 22, 1963 [March 27, 1962], No. 11463/63. Heading H1D. In an energy-selecting electron microscope low energy " inelastically scattered " electrons are deflected from the beam to give improved resolution. As shown, incident beam 1 passes through object 2 to produce diffraction spots 5 magnified at 8. An unipotential electrostatic energyanalysing lens 9 deflects lower energy electrons E1 to leave a monoenergetic beam E0 passing through aperture 10 to produce an image at 13. By moving the aperture 10 investigation of the lower energy inelastically scattered beams may be made.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1121262 | 1962-03-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB962086A true GB962086A (en) | 1964-06-24 |
Family
ID=11771673
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB11463/63A Expired GB962086A (en) | 1962-03-27 | 1963-03-22 | Energy-selecting electron microscopes |
Country Status (3)
Country | Link |
---|---|
US (1) | US3256433A (en) |
DE (1) | DE1248181B (en) |
GB (1) | GB962086A (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1639280C3 (en) * | 1967-03-30 | 1974-01-31 | Takeo Kawasaki Kanagawa Ichinokawa (Japan) | Electron microscope with a magnetic cylinder lens to analyze the energy of the electrons |
NL7404363A (en) * | 1974-04-01 | 1975-10-03 | Philips Nv | ELECTRONIC MICROSKOP WITH ENERGY ANALYZER. |
US4160905A (en) * | 1976-11-27 | 1979-07-10 | Kratos Limited | Electron microscopes |
US4210806A (en) * | 1979-01-18 | 1980-07-01 | International Business Machines Corporation | High brightness electron probe beam and method |
US4851670A (en) * | 1987-08-28 | 1989-07-25 | Gatan Inc. | Energy-selected electron imaging filter |
JP3112527B2 (en) * | 1991-11-14 | 2000-11-27 | 日本電子株式会社 | electronic microscope |
GB0320187D0 (en) * | 2003-08-28 | 2003-10-01 | Shimadzu Res Lab Europe Ltd | Particle optical apparatus |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE760135C (en) * | 1939-03-30 | 1953-11-16 | Aeg | Electron microscope with two-stage imaging, in particular an electron microscope with high resolution (over microscope), and with an overview image of low magnification (intermediate image) |
US2396624A (en) * | 1940-03-11 | 1946-03-12 | Borries Bodo Von | Electronic microscope |
US2392243A (en) * | 1942-06-20 | 1946-01-01 | Rca Corp | Electron microscope |
US2429558A (en) * | 1945-08-24 | 1947-10-21 | Research Corp | Electron beam monochromator |
GB646019A (en) * | 1946-01-05 | 1950-11-15 | Philips Nv | Improvements in or relating to electron microscopes |
DE848099C (en) * | 1949-11-01 | 1952-09-01 | Sueddeutsche Lab G M B H | Device for analyzing electrons of different speeds |
US2894160A (en) * | 1954-09-09 | 1959-07-07 | Sheldon Edward Emanuel | Electron microscopes |
US3134899A (en) * | 1960-08-23 | 1964-05-26 | Zeiss Jena Veb Carl | Intensity measuring and/or recording devices for corpuscular radiation apparatus, particularly electron microscopes |
-
1963
- 1963-03-22 GB GB11463/63A patent/GB962086A/en not_active Expired
- 1963-03-26 US US268182A patent/US3256433A/en not_active Expired - Lifetime
- 1963-03-27 DE DEH48661A patent/DE1248181B/en active Pending
Also Published As
Publication number | Publication date |
---|---|
US3256433A (en) | 1966-06-14 |
DE1248181B (en) | 1967-08-24 |
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