GB961112A - Energy-selecting electron microscopes - Google Patents

Energy-selecting electron microscopes

Info

Publication number
GB961112A
GB961112A GB11464/63A GB1146463A GB961112A GB 961112 A GB961112 A GB 961112A GB 11464/63 A GB11464/63 A GB 11464/63A GB 1146463 A GB1146463 A GB 1146463A GB 961112 A GB961112 A GB 961112A
Authority
GB
United Kingdom
Prior art keywords
image
aperture
time
energy
passes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB11464/63A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of GB961112A publication Critical patent/GB961112A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Beam Exposure (AREA)

Abstract

961,112. Electron microscopes. HITACHI Ltd. March 22, 1963 [March 27, 1962], No. 11464/63. Heading H1D. In an energy-selecting electron microscope a monoenergetic beam 1 passes through object 2 and the image 7 is deflected across an aperture in diaphragm 6 by a sawtooth wave applied to plates 5 so that at a time t = o one end of the image is opposite the aperture while at a time t = # the other end of the image is opposite the aperture, i.e. the image is transmitted through the aperture serially with respect to time. The image beam then passes through a unipotential electrostatic lens 8 to disperse lower energy electrons due to inelastic scattering so that a monoenergetic beam passes through the aperture in diaphragm 9 and lens 12 (to correct for astigmatism in the energy analysing lens 8) and is deflected by sawtooth energized plates 13 so that the time-serial image beam forms an image along plane 14.
GB11464/63A 1962-03-27 1963-03-22 Energy-selecting electron microscopes Expired GB961112A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1121162 1962-03-27

Publications (1)

Publication Number Publication Date
GB961112A true GB961112A (en) 1964-06-17

Family

ID=11771648

Family Applications (1)

Application Number Title Priority Date Filing Date
GB11464/63A Expired GB961112A (en) 1962-03-27 1963-03-22 Energy-selecting electron microscopes

Country Status (3)

Country Link
US (1) US3256432A (en)
DE (1) DE1247506B (en)
GB (1) GB961112A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2139411A (en) * 1983-05-05 1984-11-07 Cambridge Instr Ltd Charged particle deflection

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5145221B2 (en) * 1973-01-31 1976-12-02
NL8600685A (en) * 1986-03-18 1987-10-16 Philips Nv DEVICE FOR ENERGY SELECTIVE IMAGE.

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE760135C (en) * 1939-03-30 1953-11-16 Aeg Electron microscope with two-stage imaging, in particular an electron microscope with high resolution (over microscope), and with an overview image of low magnification (intermediate image)
US2396624A (en) * 1940-03-11 1946-03-12 Borries Bodo Von Electronic microscope
US2392243A (en) * 1942-06-20 1946-01-01 Rca Corp Electron microscope
US2444710A (en) * 1942-09-26 1948-07-06 Rca Corp Correction for spherical and chromatic aberrations in electron lens
US2429558A (en) * 1945-08-24 1947-10-21 Research Corp Electron beam monochromator
GB646019A (en) * 1946-01-05 1950-11-15 Philips Nv Improvements in or relating to electron microscopes
DE848099C (en) * 1949-11-01 1952-09-01 Sueddeutsche Lab G M B H Device for analyzing electrons of different speeds
US2894160A (en) * 1954-09-09 1959-07-07 Sheldon Edward Emanuel Electron microscopes
US3134899A (en) * 1960-08-23 1964-05-26 Zeiss Jena Veb Carl Intensity measuring and/or recording devices for corpuscular radiation apparatus, particularly electron microscopes

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2139411A (en) * 1983-05-05 1984-11-07 Cambridge Instr Ltd Charged particle deflection
US4614872A (en) * 1983-05-05 1986-09-30 Cambridge Instruments Limited Charged particle deflection

Also Published As

Publication number Publication date
DE1247506B (en) 1967-08-17
US3256432A (en) 1966-06-14

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