GB860557A - Improvements in or relating to electron beam discharge apparatus - Google Patents

Improvements in or relating to electron beam discharge apparatus

Info

Publication number
GB860557A
GB860557A GB39607/59A GB3960759A GB860557A GB 860557 A GB860557 A GB 860557A GB 39607/59 A GB39607/59 A GB 39607/59A GB 3960759 A GB3960759 A GB 3960759A GB 860557 A GB860557 A GB 860557A
Authority
GB
United Kingdom
Prior art keywords
diaphragm
nov
vary
electron
deflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB39607/59A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss AG
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Publication of GB860557A publication Critical patent/GB860557A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

860,557. Electron microscopes. ZEISSSTIFTUNG, C., [trading as ZEISS, C. [firm of]]. Nov. 23, 1959 [Nov. 29, 1958], No. 39607/59. Class 39(1). In an electron microscope where electrons passing through the object are directed on to a fluorescent screen the electron beam is deflected over an apertured diaphragm 5, Fig. 1, to interrupt the beam, the amplitude of beam deflection being varied to vary the time duration of beam interruption and hence to vary the image brightness. This enables focusing to equal image brightness despite variations in magnification. The deflection means may be electro-static as shown or magnetic and in the latter case is two coils with iron or air cores. The diaphragm 5 over which the beam is deflected determines the maximum illumination aperture. 6 is the object, 7 the objective lens, 8 a diaphragm, 9 the projection lens, 10 the fluorescent screen, 11 an inspection window.
GB39607/59A 1958-11-29 1959-11-23 Improvements in or relating to electron beam discharge apparatus Expired GB860557A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE860557X 1958-11-29

Publications (1)

Publication Number Publication Date
GB860557A true GB860557A (en) 1961-02-08

Family

ID=6792240

Family Applications (1)

Application Number Title Priority Date Filing Date
GB39607/59A Expired GB860557A (en) 1958-11-29 1959-11-23 Improvements in or relating to electron beam discharge apparatus

Country Status (4)

Country Link
US (1) US3087057A (en)
DE (1) DE1073655B (en)
GB (1) GB860557A (en)
NL (1) NL245866A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3178578A (en) * 1961-03-03 1965-04-13 High Voltage Engineering Corp Electron pulser for an x-ray tube to produce a pulsed beam of x-rays
GB1398513A (en) * 1971-05-18 1975-06-25 Drayton W B D Electron probe instruments
DE2244441C3 (en) * 1972-09-07 1975-10-30 Siemens Ag, 1000 Berlin Und 8000 Muenchen Method for operating a particle beam device
NL7510276A (en) * 1975-09-01 1977-03-03 Philips Nv ELECTRONIC MICROSKOP.
DE3008404C2 (en) * 1980-03-05 1984-07-19 Helmut 8046 Garching Formanek Method and device for generating electron beam diffraction images
DE3430984A1 (en) * 1984-08-23 1986-03-06 Leybold-Heraeus GmbH, 5000 Köln METHOD AND DEVICE FOR REGISTERING PARTICLES OR QUANTS WITH THE AID OF A DETECTOR

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2050628A (en) * 1931-03-02 1936-08-11 Telefunken Gmbh Cathode ray television system
US2217197A (en) * 1936-12-30 1940-10-08 Bell Telephone Labor Inc Cathode ray device
US2294659A (en) * 1941-05-17 1942-09-01 Rca Corp Electron discharge device and circuit
US2330888A (en) * 1942-05-29 1943-10-05 Rca Corp Scanning microscope
US2457092A (en) * 1945-04-17 1948-12-21 American Cyanamid Co Method and apparatus for producing electron diffraction spectra
US2602751A (en) * 1950-08-17 1952-07-08 High Voltage Engineering Corp Method for sterilizing substances or materials such as food and drugs
US2820139A (en) * 1954-11-08 1958-01-14 Zenith Radio Corp Electron beam wave signal frequency converter utilizing beam deflection and beam defocusing

Also Published As

Publication number Publication date
NL245866A (en)
DE1073655B (en) 1960-01-21
US3087057A (en) 1963-04-23

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