GB1398513A - Electron probe instruments - Google Patents
Electron probe instrumentsInfo
- Publication number
- GB1398513A GB1398513A GB1552271A GB1552271A GB1398513A GB 1398513 A GB1398513 A GB 1398513A GB 1552271 A GB1552271 A GB 1552271A GB 1552271 A GB1552271 A GB 1552271A GB 1398513 A GB1398513 A GB 1398513A
- Authority
- GB
- United Kingdom
- Prior art keywords
- specimen
- microscope
- disc
- torr
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
1398513 Electron microscopes W B D DRAYTON 16 May 1972 [18 May 1971] 15522/71 Heading H1D [Also in Division H4] A scanning electron microscope comprises 5 Al blocks on a support structure, the first and last of which can hinge down to permit access to a horizontal bore passing through the blocks. A rotatable disc 18 of PTFE is mounted in a recess in one end block at 45 degrees to the microscope axis. Two openings in the disc receive specimen holders 21. A holder is initially placed in the left hand opening where is is urged by springs 22 to a partially retracted position clear of the block thereby allowing the disc to rotate. The right hand holder is pushed into the microscope by a lever 25 and to position controlled by a bolt 27. The specimens can be rotated and moved by handles 35. After examination the handle 25 is released and the disc rotated 180 degrees by an electric motor. The pressure of the 1.h. specimen is reduced to 10<SP>-2</SP> torr via passage 32 and as it rotates to the ex. amination position the pressure is further reduced to 10<SP>-4</SP> torr. Thus on reaching the examination position the pressure is rapidly reduced to 10<SP>-6</SP> torr and the specimen can be immediately examined. The microscope detector may be sensitive to secondary electron emission, X-rays or specimen current. The filament of the electron gun is adjustably mounted on gimbals. The microscope output is displayed on a C.R.T. with a control system which allows the area of specimen that is scanned to be adjusted without moving the specimen (see Division H4).
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1552271A GB1398513A (en) | 1971-05-18 | 1971-05-18 | Electron probe instruments |
US00254133A US3795808A (en) | 1971-05-18 | 1972-05-17 | Electron microscopes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1552271A GB1398513A (en) | 1971-05-18 | 1971-05-18 | Electron probe instruments |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1398513A true GB1398513A (en) | 1975-06-25 |
Family
ID=10060622
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1552271A Expired GB1398513A (en) | 1971-05-18 | 1971-05-18 | Electron probe instruments |
Country Status (2)
Country | Link |
---|---|
US (1) | US3795808A (en) |
GB (1) | GB1398513A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2299236A (en) * | 1995-03-24 | 1996-09-25 | Zeiss Stiftung | Video microscope |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3885157A (en) * | 1973-12-12 | 1975-05-20 | Electron Optical Research And | Electron beam image processing device |
US3916190A (en) * | 1974-03-01 | 1975-10-28 | Minnesota Mining & Mfg | Depth profile analysis apparatus |
GB1560722A (en) * | 1975-04-23 | 1980-02-06 | Jeol Ltd | Scanning electron microscope |
JPS5275261A (en) * | 1975-12-19 | 1977-06-24 | Jeol Ltd | Test piece image dispaly unit |
JPS5773573A (en) * | 1980-10-24 | 1982-05-08 | Jeol Ltd | Electronic beam scanning circuit |
DE3235727A1 (en) * | 1982-09-27 | 1984-03-29 | Siemens AG, 1000 Berlin und 8000 München | METHOD FOR HIGHLIGHTING AN OBJECT AREA IN A GRID MICROSCOPE |
JP3346172B2 (en) * | 1996-06-07 | 2002-11-18 | 株式会社日立製作所 | Scanning microscope |
US20070236489A1 (en) * | 2006-01-30 | 2007-10-11 | Jung Edward K | Positional display elements |
US7940972B2 (en) * | 2007-05-16 | 2011-05-10 | General Electric Company | System and method of extended field of view image acquisition of an imaged subject |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL245866A (en) * | 1958-11-29 | |||
US3405264A (en) * | 1965-08-24 | 1968-10-08 | Rca Corp | Specimen injector for electron microscopes with a rotatable specimen holder |
LU54494A1 (en) * | 1967-09-18 | 1969-06-24 | ||
US3614311A (en) * | 1968-02-28 | 1971-10-19 | Hitachi Ltd | Apparatus for simultaneously displaying a plurality of images of an object being analyzed in an electron beam device |
US3679900A (en) * | 1968-12-03 | 1972-07-25 | Hitachi Ltd | Specimen holder transfer mechanism for an electron microscope |
-
1971
- 1971-05-18 GB GB1552271A patent/GB1398513A/en not_active Expired
-
1972
- 1972-05-17 US US00254133A patent/US3795808A/en not_active Expired - Lifetime
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2299236A (en) * | 1995-03-24 | 1996-09-25 | Zeiss Stiftung | Video microscope |
AT405463B (en) * | 1995-03-24 | 1999-08-25 | Zeiss Carl | COMPUTER SUPPORTED VIDEO MICROSCOPE |
GB2299236B (en) * | 1995-03-24 | 2000-01-26 | Zeiss Stiftung | Computer supported video microscope |
US6198573B1 (en) | 1995-03-24 | 2001-03-06 | Carl-Zeiss-Stiftung | Computer supported video microscope |
US6282019B1 (en) | 1995-03-24 | 2001-08-28 | Carl-Zeiss-Stiftung | Computer supported video microscope including a linear sensor for generating an overview image |
Also Published As
Publication number | Publication date |
---|---|
US3795808A (en) | 1974-03-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |