GB1398513A - Electron probe instruments - Google Patents

Electron probe instruments

Info

Publication number
GB1398513A
GB1398513A GB1552271A GB1552271A GB1398513A GB 1398513 A GB1398513 A GB 1398513A GB 1552271 A GB1552271 A GB 1552271A GB 1552271 A GB1552271 A GB 1552271A GB 1398513 A GB1398513 A GB 1398513A
Authority
GB
United Kingdom
Prior art keywords
specimen
microscope
disc
torr
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1552271A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Drayton W B D
Original Assignee
Drayton W B D
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Drayton W B D filed Critical Drayton W B D
Priority to GB1552271A priority Critical patent/GB1398513A/en
Priority to US00254133A priority patent/US3795808A/en
Publication of GB1398513A publication Critical patent/GB1398513A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

1398513 Electron microscopes W B D DRAYTON 16 May 1972 [18 May 1971] 15522/71 Heading H1D [Also in Division H4] A scanning electron microscope comprises 5 Al blocks on a support structure, the first and last of which can hinge down to permit access to a horizontal bore passing through the blocks. A rotatable disc 18 of PTFE is mounted in a recess in one end block at 45 degrees to the microscope axis. Two openings in the disc receive specimen holders 21. A holder is initially placed in the left hand opening where is is urged by springs 22 to a partially retracted position clear of the block thereby allowing the disc to rotate. The right hand holder is pushed into the microscope by a lever 25 and to position controlled by a bolt 27. The specimens can be rotated and moved by handles 35. After examination the handle 25 is released and the disc rotated 180 degrees by an electric motor. The pressure of the 1.h. specimen is reduced to 10<SP>-2</SP> torr via passage 32 and as it rotates to the ex. amination position the pressure is further reduced to 10<SP>-4</SP> torr. Thus on reaching the examination position the pressure is rapidly reduced to 10<SP>-6</SP> torr and the specimen can be immediately examined. The microscope detector may be sensitive to secondary electron emission, X-rays or specimen current. The filament of the electron gun is adjustably mounted on gimbals. The microscope output is displayed on a C.R.T. with a control system which allows the area of specimen that is scanned to be adjusted without moving the specimen (see Division H4).
GB1552271A 1971-05-18 1971-05-18 Electron probe instruments Expired GB1398513A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB1552271A GB1398513A (en) 1971-05-18 1971-05-18 Electron probe instruments
US00254133A US3795808A (en) 1971-05-18 1972-05-17 Electron microscopes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1552271A GB1398513A (en) 1971-05-18 1971-05-18 Electron probe instruments

Publications (1)

Publication Number Publication Date
GB1398513A true GB1398513A (en) 1975-06-25

Family

ID=10060622

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1552271A Expired GB1398513A (en) 1971-05-18 1971-05-18 Electron probe instruments

Country Status (2)

Country Link
US (1) US3795808A (en)
GB (1) GB1398513A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2299236A (en) * 1995-03-24 1996-09-25 Zeiss Stiftung Video microscope

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3885157A (en) * 1973-12-12 1975-05-20 Electron Optical Research And Electron beam image processing device
US3916190A (en) * 1974-03-01 1975-10-28 Minnesota Mining & Mfg Depth profile analysis apparatus
GB1560722A (en) * 1975-04-23 1980-02-06 Jeol Ltd Scanning electron microscope
JPS5275261A (en) * 1975-12-19 1977-06-24 Jeol Ltd Test piece image dispaly unit
JPS5773573A (en) * 1980-10-24 1982-05-08 Jeol Ltd Electronic beam scanning circuit
DE3235727A1 (en) * 1982-09-27 1984-03-29 Siemens AG, 1000 Berlin und 8000 München METHOD FOR HIGHLIGHTING AN OBJECT AREA IN A GRID MICROSCOPE
JP3346172B2 (en) * 1996-06-07 2002-11-18 株式会社日立製作所 Scanning microscope
US20070236489A1 (en) * 2006-01-30 2007-10-11 Jung Edward K Positional display elements
US7940972B2 (en) * 2007-05-16 2011-05-10 General Electric Company System and method of extended field of view image acquisition of an imaged subject

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL245866A (en) * 1958-11-29
US3405264A (en) * 1965-08-24 1968-10-08 Rca Corp Specimen injector for electron microscopes with a rotatable specimen holder
LU54494A1 (en) * 1967-09-18 1969-06-24
US3614311A (en) * 1968-02-28 1971-10-19 Hitachi Ltd Apparatus for simultaneously displaying a plurality of images of an object being analyzed in an electron beam device
US3679900A (en) * 1968-12-03 1972-07-25 Hitachi Ltd Specimen holder transfer mechanism for an electron microscope

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2299236A (en) * 1995-03-24 1996-09-25 Zeiss Stiftung Video microscope
AT405463B (en) * 1995-03-24 1999-08-25 Zeiss Carl COMPUTER SUPPORTED VIDEO MICROSCOPE
GB2299236B (en) * 1995-03-24 2000-01-26 Zeiss Stiftung Computer supported video microscope
US6198573B1 (en) 1995-03-24 2001-03-06 Carl-Zeiss-Stiftung Computer supported video microscope
US6282019B1 (en) 1995-03-24 2001-08-28 Carl-Zeiss-Stiftung Computer supported video microscope including a linear sensor for generating an overview image

Also Published As

Publication number Publication date
US3795808A (en) 1974-03-05

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee