GB517680A - Improvements in or relating to magnetic lenses for electron beam apparatus - Google Patents

Improvements in or relating to magnetic lenses for electron beam apparatus

Info

Publication number
GB517680A
GB517680A GB22983/38A GB2298338A GB517680A GB 517680 A GB517680 A GB 517680A GB 22983/38 A GB22983/38 A GB 22983/38A GB 2298338 A GB2298338 A GB 2298338A GB 517680 A GB517680 A GB 517680A
Authority
GB
United Kingdom
Prior art keywords
pole
electron beam
beam apparatus
aug
piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB22983/38A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
Original Assignee
Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH filed Critical Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
Publication of GB517680A publication Critical patent/GB517680A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Eyeglasses (AREA)

Abstract

517,680. Electron lenses. FIDES GES. FUR DIE VERWALTUNG UND VERWERTUNG VON GEWERBLICHEN SCHUTZRECHTEN. Aug. 3, 1938, No. 22983. Convention date, Aug. 16, 1937. [Class 39 (i)] In a magnetic lens having an asymmetrical pole system for electron beam apparatus, particularly an electron microscope, the crosssectional area of the pole-pieces 3, 4 is such that they become magnetically saturated at least at the pole tips substantially simultaneously and to the same extent in both polepieces. An object can thus be placed close to the lens on the side of the obtuse angled cone formed by the pole-piece 3. In a modification, the convex side of this pole-piece is directed outwards.
GB22983/38A 1937-08-16 1938-08-03 Improvements in or relating to magnetic lenses for electron beam apparatus Expired GB517680A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE517680X 1937-08-16

Publications (1)

Publication Number Publication Date
GB517680A true GB517680A (en) 1940-02-06

Family

ID=6549644

Family Applications (1)

Application Number Title Priority Date Filing Date
GB22983/38A Expired GB517680A (en) 1937-08-16 1938-08-03 Improvements in or relating to magnetic lenses for electron beam apparatus

Country Status (4)

Country Link
US (1) US2209669A (en)
BE (1) BE429637A (en)
FR (1) FR841823A (en)
GB (1) GB517680A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE759837C (en) * 1940-05-07 1954-06-28 Manfred Von Ardenne Magnetic lens for electron microscopes with a pole shoe system that is asymmetrical to the center of the coil
US2418432A (en) * 1944-05-01 1947-04-01 Rca Corp Magnetic electron lens system
US2648036A (en) * 1946-03-12 1953-08-04 Us Navy Adjustable focusing coil
US3509503A (en) * 1967-02-27 1970-04-28 Nippon Electron Optics Lab Objective lens pole pieces
US4541890A (en) * 1982-06-01 1985-09-17 International Business Machines Corporation Hall ion generator for working surfaces with a low energy high intensity ion beam

Also Published As

Publication number Publication date
US2209669A (en) 1940-07-30
FR841823A (en) 1939-05-31
BE429637A (en)

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