GB1226872A - - Google Patents
Info
- Publication number
- GB1226872A GB1226872A GB1226872DA GB1226872A GB 1226872 A GB1226872 A GB 1226872A GB 1226872D A GB1226872D A GB 1226872DA GB 1226872 A GB1226872 A GB 1226872A
- Authority
- GB
- United Kingdom
- Prior art keywords
- lens
- electron
- maximum
- march
- analysing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000004075 alteration Effects 0.000 abstract 1
- 230000004323 axial length Effects 0.000 abstract 1
- 239000006185 dispersion Substances 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/84—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection
- H01J29/845—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection by means of magnetic systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
1,226,872. Electron microscopes. T. ICHINOKAWA. 25 March, 1968 [30 March, 1967], No. 14319/68. Heading H1D. Means for analysing the energy of an electron beam, especially in an electron microscope. comprises an apertured member, such as the slit member 4, in combination with a magnetic lens of large chromatic aberration. Preferably the lens comprises two pairs of polepieces 1-1 and 2-2 adapted to refract the beam in opposite directions, and maximum resolution is achieved if where e and m are the charge and mass of an electron, H is the maximum magnetic field of the lens, a is the axial length of the lens, measured between points of half the maximum field intensity, and V r is the electron accelerating voltage corrected by a relativistic factor. The analysing means is preferably disposed between an objective lens and a projection lens of an electron microscope, and Fig. 2 illustrates the dispersion of the beam for different energy components, i.e. elastically and non-elastically scattered electrons.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1953467 | 1967-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1226872A true GB1226872A (en) | 1971-03-31 |
Family
ID=12001980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1226872D Expired GB1226872A (en) | 1967-03-30 | 1968-03-25 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3619607A (en) |
| DE (1) | DE1639280C3 (en) |
| FR (1) | FR1558166A (en) |
| GB (1) | GB1226872A (en) |
| NL (1) | NL153718B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5145221B2 (en) * | 1973-01-31 | 1976-12-02 | ||
| US4068123A (en) * | 1973-07-27 | 1978-01-10 | Nihon Denshi Kabushiki Kaisha | Scanning electron microscope |
| KR920000941B1 (en) * | 1988-02-16 | 1992-01-31 | 후지쓰 가부시끼가이샤 | An electron beam exposure apparatus |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB962086A (en) * | 1962-03-27 | 1964-06-24 | Hitachi Ltd | Energy-selecting electron microscopes |
| US3374346A (en) * | 1964-07-15 | 1968-03-19 | Hitachi Ltd | Spectroscopic electron microscope wherein a specimen is irradiated with x-rays and the electrons emitted are energy analyzed |
-
1968
- 1968-03-07 DE DE1639280A patent/DE1639280C3/en not_active Expired
- 1968-03-25 GB GB1226872D patent/GB1226872A/en not_active Expired
- 1968-03-25 FR FR1558166D patent/FR1558166A/fr not_active Expired
- 1968-03-29 NL NL686804435A patent/NL153718B/en not_active IP Right Cessation
-
1970
- 1970-06-24 US US49575A patent/US3619607A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| NL153718B (en) | 1977-06-15 |
| DE1639280B2 (en) | 1973-07-12 |
| FR1558166A (en) | 1969-02-21 |
| DE1639280C3 (en) | 1974-01-31 |
| NL6804435A (en) | 1968-10-01 |
| US3619607A (en) | 1971-11-09 |
| DE1639280A1 (en) | 1972-03-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |