GB1078823A - Improvements in ion microscopes - Google Patents

Improvements in ion microscopes

Info

Publication number
GB1078823A
GB1078823A GB46920/63A GB4692063A GB1078823A GB 1078823 A GB1078823 A GB 1078823A GB 46920/63 A GB46920/63 A GB 46920/63A GB 4692063 A GB4692063 A GB 4692063A GB 1078823 A GB1078823 A GB 1078823A
Authority
GB
United Kingdom
Prior art keywords
ions
slit
momentum
magnetic sector
nov
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB46920/63A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Thales SA
Original Assignee
Centre National de la Recherche Scientifique CNRS
CSF Compagnie Generale de Telegraphie sans Fil SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, CSF Compagnie Generale de Telegraphie sans Fil SA filed Critical Centre National de la Recherche Scientifique CNRS
Publication of GB1078823A publication Critical patent/GB1078823A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/284—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer
    • H01J49/286—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/466—Static spectrometers using crossed electric and magnetic fields perpendicular to the beam, e.g. Wien filter

Abstract

1,078,823. Ion microscopes; particle spectrometers. CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, and CSF-COMPAGNIE GENERALE DE TELEGRAPHIE SANS FIL. Nov. 27, 1963 [Nov. 28, 1962], No. 46920/63. Heading H1D. In an arrangement for analysing a sample 1 by bombarding it with a beam 2 of particles, e.g. ions or neutral atoms, to cause a secondary. emission of characteristic ions, these ions are focused into a beam, and ions having an energy higher than a predetermined level are eliminated therefrom, prior to filtering from the image-carrying beam ions having a predetermined momentum, while rejecting the other ions. As shown, the secondary ions pass through a focusing lens 3, Fig. 1, and a spherical capacitor 4, a real image cross-over of the crossover in aperture 34 being formed in slit 9. Ions whose initial energy is too high or too low are stopped by the edges of slit 9. The ion beam is then focused by a three-electrode lens 10 and filtered according to momentum by a magnetic sector 6 and selection slit 81. The final lens 8 includes a stigmator and forms part of an image converter. In an alternative arrangement, secondary ions from the sample 1, Fig. 3 (not shown), are deflected by magnetic sector 6 on to an electrostatic mirror 100 which captures the excessively fast ions while reflecting the others for selection according to momentum by magnetic sector 6 and slit 81.
GB46920/63A 1962-11-28 1963-11-27 Improvements in ion microscopes Expired GB1078823A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR916836A FR1352167A (en) 1962-11-28 1962-11-28 New device for microanalysis by secondary ionic emission

Publications (1)

Publication Number Publication Date
GB1078823A true GB1078823A (en) 1967-08-09

Family

ID=8791691

Family Applications (1)

Application Number Title Priority Date Filing Date
GB46920/63A Expired GB1078823A (en) 1962-11-28 1963-11-27 Improvements in ion microscopes

Country Status (5)

Country Link
US (1) US3585383A (en)
JP (2) JPS5211599B1 (en)
DE (1) DE1498646B2 (en)
FR (1) FR1352167A (en)
GB (1) GB1078823A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3579270A (en) * 1967-10-31 1971-05-18 Atomic Energy Authority Uk Energy selective ion beam intensity measuring apparatus and method utilizing a scintillator to detect electrons generated by the beam
GB2211984A (en) * 1987-10-30 1989-07-12 Nat Res Dev Particle beam source

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1439064A (en) * 1965-02-09 1966-05-20 Centre Nat Rech Scient Improvements to ionic analyzers
US3445650A (en) * 1965-10-11 1969-05-20 Applied Res Lab Double focussing mass spectrometer including a wedge-shaped magnetic sector field
US3558879A (en) * 1968-03-12 1971-01-26 Atomic Energy Commission Electrostatic deflector for selectively and adjustably bending a charged particle beam
FR2087652A5 (en) * 1970-05-27 1971-12-31 Onera (Off Nat Aerospatiale)
JPS5015594A (en) * 1973-06-08 1975-02-19
JPS5531771U (en) * 1978-08-21 1980-02-29
US4296323A (en) * 1980-03-10 1981-10-20 The Perkin-Elmer Corporation Secondary emission mass spectrometer mechanism to be used with other instrumentation
JPS58116270A (en) * 1981-12-30 1983-07-11 Nissan Motor Co Ltd Vehicular body seal structure
JPS59110473U (en) * 1983-01-18 1984-07-25 トヨタ自動車株式会社 Structure to prevent water from entering the mating surfaces of steel plates
JPS5977910A (en) * 1983-09-22 1984-05-04 Iseki & Co Ltd Front axle bracket for agricultural vehicle of operator mounted type
FR2575597B1 (en) * 1984-12-28 1987-03-20 Onera (Off Nat Aerospatiale) APPARATUS FOR VERY HIGH RESOLUTION ION MICROANALYSIS OF A SOLID SAMPLE
JPH08236067A (en) * 1994-12-28 1996-09-13 Ebara Corp Magnetic field type mass spectrograph
GB0624677D0 (en) * 2006-12-11 2007-01-17 Shimadzu Corp A co-axial time-of-flight mass spectrometer
DE102009044989A1 (en) 2009-09-24 2011-03-31 Funnemann, Dietmar, Dr. Imaging energy filter for electrically charged particles and spectroscope with such
EP3203493B1 (en) * 2016-02-02 2018-10-03 FEI Company Charged-particle microscope with astigmatism compensation and energy-selection

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3126477A (en) * 1964-03-24 Multiple dispersion mass spectrometer
US2976413A (en) * 1956-06-25 1961-03-21 Cons Electrodynamics Corp Mass spectrometer
US2947868A (en) * 1959-07-27 1960-08-02 Geophysics Corp Of America Mass spectrometer
US3061720A (en) * 1960-02-29 1962-10-30 Ewald Heinz Spectrograph
US3174034A (en) * 1961-07-03 1965-03-16 Max Planck Gesellschaft Mass spectrometer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3579270A (en) * 1967-10-31 1971-05-18 Atomic Energy Authority Uk Energy selective ion beam intensity measuring apparatus and method utilizing a scintillator to detect electrons generated by the beam
GB2211984A (en) * 1987-10-30 1989-07-12 Nat Res Dev Particle beam source
GB2211984B (en) * 1987-10-30 1992-06-03 Nat Res Dev Method and apparatus for generating particle beams

Also Published As

Publication number Publication date
JPS4821314B1 (en) 1973-06-27
FR1352167A (en) 1964-02-14
DE1498646B2 (en) 1971-12-16
JPS5211599B1 (en) 1977-03-31
US3585383A (en) 1971-06-15
DE1498646A1 (en) 1968-12-12

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