GB1038220A - Improvements in ion beam microanalysers - Google Patents

Improvements in ion beam microanalysers

Info

Publication number
GB1038220A
GB1038220A GB4692463A GB4692463A GB1038220A GB 1038220 A GB1038220 A GB 1038220A GB 4692463 A GB4692463 A GB 4692463A GB 4692463 A GB4692463 A GB 4692463A GB 1038220 A GB1038220 A GB 1038220A
Authority
GB
United Kingdom
Prior art keywords
sample
ions
neutralized
enclosure
positive ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4692463A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Thales SA
Original Assignee
Centre National de la Recherche Scientifique CNRS
CSF Compagnie Generale de Telegraphie sans Fil SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, CSF Compagnie Generale de Telegraphie sans Fil SA filed Critical Centre National de la Recherche Scientifique CNRS
Publication of GB1038220A publication Critical patent/GB1038220A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1,038,220. Ion microscopes. CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE & G.S.F.-COMPAGNIE GENERALE DE TELEGRAPHIE SANS FIL. Nov. 27, 1963 [Nov. 28, 1962], No. 46924/63. Heading H1D. An ion microscope for analysing the surface of a bombarded sample 1 comprises a source of ions 20, electron-optical means 21, 22 for accelerating the ions and focusing them into a beam and directing the beam on to the sample 1, means 23 for neutralizing ions before they reach sample 1, and means for extracting from the beam any ions that have not been neutralized, thus producing a beam of fast neutral atoms which bombard sample 1 and extract secondary ions from it. As shown, positive ions are used and are neutralized by passing them through an enclosure 23 filled with gas at a low pressure so that they tear off electrons from the gas atoms and are thus neutralized. Any ions which have not been neutralized in enclosure 23 are extracted from the beam by a deflector and an ion trap (Fig. 2, not shown) at the outlet from enclosure 23. The positive ions extracted from sample 1 are accelerated and focused by electronoptical system 24, 25, 26 to form an image of the surface of the sample being analysed. To neutralize local negative charges left on sample 1, positive ions from a source 33 arrive at sample 1 with a velocity whose component normal to the surface is substantially zero and thus form a local layer of positive ions moving parallel to the sample surface. Negative secondary ions may be used for producing the image.
GB4692463A 1962-11-28 1963-11-27 Improvements in ion beam microanalysers Expired GB1038220A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR916835A FR1349302A (en) 1962-11-28 1962-11-28 Secondary ion emission microanalyzer

Publications (1)

Publication Number Publication Date
GB1038220A true GB1038220A (en) 1966-08-10

Family

ID=8791690

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4692463A Expired GB1038220A (en) 1962-11-28 1963-11-27 Improvements in ion beam microanalysers

Country Status (3)

Country Link
DE (1) DE1297897B (en)
FR (1) FR1349302A (en)
GB (1) GB1038220A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2633190A1 (en) * 1975-07-25 1977-03-10 Fernand Marcel Devienne HEAVY ION SOURCE

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2212044A5 (en) * 1972-12-22 1974-07-19 Anvar
FR2363882A1 (en) * 1976-09-01 1978-03-31 Commissariat Energie Atomique Analyser for secondary ions produced by electron gun - has gun at angle to extraction lens in examination of insulators
US4804837A (en) * 1988-01-11 1989-02-14 Eaton Corporation Ion implantation surface charge control method and apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1240658A (en) * 1959-07-30 1960-09-09 Centre Nat Rech Scient Device making it possible to obtain different ionic images of the surface of a sample, and giving separately the surface distribution of each constituent element of the sample to be studied

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2633190A1 (en) * 1975-07-25 1977-03-10 Fernand Marcel Devienne HEAVY ION SOURCE

Also Published As

Publication number Publication date
FR1349302A (en) 1964-01-17
DE1297897B (en) 1969-06-19

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