US3445650A - Double focussing mass spectrometer including a wedge-shaped magnetic sector field - Google Patents
Double focussing mass spectrometer including a wedge-shaped magnetic sector field Download PDFInfo
- Publication number
- US3445650A US3445650A US494378A US3445650DA US3445650A US 3445650 A US3445650 A US 3445650A US 494378 A US494378 A US 494378A US 3445650D A US3445650D A US 3445650DA US 3445650 A US3445650 A US 3445650A
- Authority
- US
- United States
- Prior art keywords
- field
- wedge
- plane
- ions
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/58—Arrangements for focusing or reflecting ray or beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/20—Magnetic deflection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/284—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer
- H01J49/286—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/32—Static spectrometers using double focusing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/32—Static spectrometers using double focusing
- H01J49/322—Static spectrometers using double focusing with a magnetic sector of 90 degrees, e.g. Mattauch-Herzog type
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electron Tubes For Measurement (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Description
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US49438865A | 1965-10-11 | 1965-10-11 | |
US49449065A | 1965-10-11 | 1965-10-11 | |
US49437865A | 1965-10-11 | 1965-10-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3445650A true US3445650A (en) | 1969-05-20 |
Family
ID=27413976
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US494378A Expired - Lifetime US3445650A (en) | 1965-10-11 | 1965-10-11 | Double focussing mass spectrometer including a wedge-shaped magnetic sector field |
US494388A Expired - Lifetime US3517191A (en) | 1965-10-11 | 1965-10-11 | Scanning ion microscope with magnetic sector lens to purify the primary ion beam |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US494388A Expired - Lifetime US3517191A (en) | 1965-10-11 | 1965-10-11 | Scanning ion microscope with magnetic sector lens to purify the primary ion beam |
Country Status (4)
Country | Link |
---|---|
US (2) | US3445650A (en) |
DE (3) | DE1539660C3 (en) |
FR (1) | FR1508152A (en) |
GB (1) | GB1145107A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3610921A (en) * | 1968-05-01 | 1971-10-05 | Perkin Elmer Corp | Metastable mass analysis |
US3761707A (en) * | 1970-06-26 | 1973-09-25 | Max Planck Gesellschaft | Stigmatically imaging double focusing mass spectrometer |
US3842269A (en) * | 1971-10-05 | 1974-10-15 | Max Planck Gesellschaft | Mass spectrometer of high detection efficiency |
US4843239A (en) * | 1987-05-18 | 1989-06-27 | Max-Planck-Gesellschaft Zur Foerderung Der Wisserschaften E.V. | Compact double focussing mass spectrometer |
US4847504A (en) * | 1983-08-15 | 1989-07-11 | Applied Materials, Inc. | Apparatus and methods for ion implantation |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4833903B1 (en) * | 1969-04-08 | 1973-10-17 | ||
JPS5034439B1 (en) * | 1969-05-16 | 1975-11-08 | ||
JPS5036397B1 (en) * | 1969-07-11 | 1975-11-25 | ||
DE1937482C3 (en) * | 1969-07-23 | 1974-10-10 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen | Microbeam probe |
BE758925A (en) * | 1969-11-14 | 1971-04-16 | Bayer Ag | METHOD FOR THE ANALYSIS OF SOLID BODY SURFACES BY MASS SPECTROMETRY |
FR2087652A5 (en) * | 1970-05-27 | 1971-12-31 | Onera (Off Nat Aerospatiale) | |
US3659236A (en) * | 1970-08-05 | 1972-04-25 | Us Air Force | Inhomogeneity variable magnetic field magnet |
US3930155A (en) * | 1973-01-19 | 1975-12-30 | Hitachi Ltd | Ion microprobe analyser |
US4100409A (en) * | 1973-02-02 | 1978-07-11 | U.S. Phillips Corporation | Device for analyzing a surface layer by means of ion scattering |
JPS5015594A (en) * | 1973-06-08 | 1975-02-19 | ||
US3878392A (en) * | 1973-12-17 | 1975-04-15 | Etec Corp | Specimen analysis with ion and electrom beams |
US3916191A (en) * | 1974-03-01 | 1975-10-28 | Minnesota Mining & Mfg | Imaging apparatus and method for use with ion scattering spectrometer |
US4107527A (en) * | 1977-07-13 | 1978-08-15 | Valentin Tikhonovich Cherepin | Ion-emission microanalyzer microscope |
AT353519B (en) * | 1978-03-07 | 1979-11-26 | Oesterr Studien Atomenergie | DEVICE FOR CONCENTRATING THE PRIMAERION BEAM |
JPS5917500B2 (en) * | 1981-03-18 | 1984-04-21 | 株式会社東芝 | Neutral particle detection device |
DE3403254A1 (en) * | 1984-01-31 | 1985-08-01 | Siemens AG, 1000 Berlin und 8000 München | METHOD AND DEVICE FOR COMPENSATING CHARGES IN SECONDARY ISSUE MASS SPECTROMETRY (SIMS) ELECTRICALLY BAD CONDUCTING SAMPLES |
FR2575597B1 (en) * | 1984-12-28 | 1987-03-20 | Onera (Off Nat Aerospatiale) | APPARATUS FOR VERY HIGH RESOLUTION ION MICROANALYSIS OF A SOLID SAMPLE |
GB8703012D0 (en) * | 1987-02-10 | 1987-03-18 | Vg Instr Group | Secondary ion mass spectrometer |
NL8701871A (en) * | 1987-08-10 | 1989-03-01 | Philips Nv | LOADED PARTICLE DEVICE WITH BUNDLE MIXER. |
FR2624610B1 (en) * | 1987-12-11 | 1990-03-30 | Cameca | TIME-OF-FLIGHT, CONTINUOUSLY SCAN ANALYSIS METHOD AND ANALYSIS DEVICE FOR CARRYING OUT SAID METHOD |
US4800273A (en) * | 1988-01-07 | 1989-01-24 | Phillips Bradway F | Secondary ion mass spectrometer |
GB8812940D0 (en) * | 1988-06-01 | 1988-07-06 | Vg Instr Group | Mass spectrometer |
US5220167A (en) * | 1991-09-27 | 1993-06-15 | Carnegie Institution Of Washington | Multiple ion multiplier detector for use in a mass spectrometer |
GB2269934B (en) * | 1992-08-19 | 1996-03-27 | Toshiba Cambridge Res Center | Spectrometer |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2947868A (en) * | 1959-07-27 | 1960-08-02 | Geophysics Corp Of America | Mass spectrometer |
US3061720A (en) * | 1960-02-29 | 1962-10-30 | Ewald Heinz | Spectrograph |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3103584A (en) * | 1963-09-10 | Electron microanalyzer system | ||
US2772363A (en) * | 1952-03-21 | 1956-11-27 | Cons Electrodynamics Corp | Method and apparatus for ionization of solids |
FR1352167A (en) * | 1962-11-28 | 1964-02-14 | Ct Nat De La Rech Scient Et Cs | New device for microanalysis by secondary ionic emission |
-
1965
- 1965-10-11 US US494378A patent/US3445650A/en not_active Expired - Lifetime
- 1965-10-11 US US494388A patent/US3517191A/en not_active Expired - Lifetime
-
1966
- 1966-10-04 GB GB44183/66A patent/GB1145107A/en not_active Expired
- 1966-10-11 DE DE1539660A patent/DE1539660C3/en not_active Expired
- 1966-10-11 DE DE19661798021 patent/DE1798021B2/en active Pending
- 1966-10-11 DE DE1966A0053727 patent/DE1539659B2/en active Granted
- 1966-10-11 FR FR79474A patent/FR1508152A/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2947868A (en) * | 1959-07-27 | 1960-08-02 | Geophysics Corp Of America | Mass spectrometer |
US3061720A (en) * | 1960-02-29 | 1962-10-30 | Ewald Heinz | Spectrograph |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3610921A (en) * | 1968-05-01 | 1971-10-05 | Perkin Elmer Corp | Metastable mass analysis |
US3761707A (en) * | 1970-06-26 | 1973-09-25 | Max Planck Gesellschaft | Stigmatically imaging double focusing mass spectrometer |
US3842269A (en) * | 1971-10-05 | 1974-10-15 | Max Planck Gesellschaft | Mass spectrometer of high detection efficiency |
US4847504A (en) * | 1983-08-15 | 1989-07-11 | Applied Materials, Inc. | Apparatus and methods for ion implantation |
US4843239A (en) * | 1987-05-18 | 1989-06-27 | Max-Planck-Gesellschaft Zur Foerderung Der Wisserschaften E.V. | Compact double focussing mass spectrometer |
Also Published As
Publication number | Publication date |
---|---|
FR1508152A (en) | 1968-01-05 |
DE1539659B2 (en) | 1977-07-07 |
US3517191A (en) | 1970-06-23 |
DE1798021A1 (en) | 1971-08-26 |
DE1539660B2 (en) | 1977-09-22 |
GB1145107A (en) | 1969-03-12 |
DE1539659A1 (en) | 1969-12-18 |
DE1539660A1 (en) | 1970-04-09 |
DE1798021B2 (en) | 1977-10-20 |
DE1539660C3 (en) | 1978-06-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: JAMES TALCOTT, INC., NEW YORK Free format text: SECURITY INTEREST;ASSIGNORS:APPLIED RESEARCH LABORATORIES, INC.;ARL APPLIED RESEARCH LABORATORIES, S.A.;REEL/FRAME:004326/0899 Effective date: 19840828 Owner name: LLOYDS BANK INTERNATIONAL LIMITED, NEW YORK Free format text: SECURITY INTEREST;ASSIGNORS:APPLIED RESEARCH LABORATORIES, INC.;ARL APPLIED RESEARCH LABORATORIES, S.A.;REEL/FRAME:004326/0899 Effective date: 19840828 Owner name: E.I. DU PONT DE NEMOURS AND COMPANY, DELAWARE Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:BUCKFELDER, JOHN J.;SCHLEINITZ, HENRY M.;REEL/FRAME:004326/0513 Effective date: 19840925 Owner name: JAMES TALCOTT, INC., 1633 BROAWAY NEW YORK, NY 10 Free format text: SECURITY INTEREST;ASSIGNORS:APPLIED RESEARCH LABORATORIES, INC., A MA CORP.;ARL APPLIED RESEARCH LABORATORIES, S.A. A SWITZERLAND CORP.;REEL/FRAME:004326/0899 Effective date: 19840828 Owner name: LLOYDS BANK INTERNATIONAL LIMITED, ONE SEAPORT PLA Free format text: SECURITY INTEREST;ASSIGNORS:APPLIED RESEARCH LABORATORIES, INC., A MA CORP.;ARL APPLIED RESEARCH LABORATORIES, S.A. A SWITZERLAND CORP.;REEL/FRAME:004326/0899 Effective date: 19840828 Owner name: E.I. DU PONT DE NEMOURS AND COMPANY, WILMINGTON, D Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNORS:BUCKFELDER, JOHN J.;SCHLEINITZ, HENRY M.;REEL/FRAME:004326/0513 Effective date: 19840925 |