GB1246744A - Electron beam apparatus - Google Patents

Electron beam apparatus

Info

Publication number
GB1246744A
GB1246744A GB300/69A GB30069A GB1246744A GB 1246744 A GB1246744 A GB 1246744A GB 300/69 A GB300/69 A GB 300/69A GB 30069 A GB30069 A GB 30069A GB 1246744 A GB1246744 A GB 1246744A
Authority
GB
United Kingdom
Prior art keywords
grid
specimen
potential
grids
jan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB300/69A
Inventor
Graham Stuart Plows
William Charles Nixon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to GB300/69A priority Critical patent/GB1246744A/en
Priority to US889762A priority patent/US3646344A/en
Priority to FR6945615A priority patent/FR2027656A1/fr
Priority to DE19702000217 priority patent/DE2000217B2/en
Publication of GB1246744A publication Critical patent/GB1246744A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/266—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy
    • H01J37/268—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1,246,744. Electron microscopes. G. S. PLOWS, and W. C. NIXON. 1 Jan., 1970 [2 Jan., 1969], No. 300/69. Heading H1D. [Also in Division G1] The detector D of a scanning electron microscope comprises a first accelerating grid G1, a second retarding grid G2 forming a potential barrier of variable height, and preferably a third suppressor grid G3 arranged in front of an electron collector SC which may be a scintillator coupled by a light pipe to a photo-multiplier P. If the specimen is earthed the first grid G1 should be at a potential of at least 25 volts and should produce a field at the specimen of at least 5 kv./m. and preferably more than 100 kv./m.; the second grid G2 is at an adjustable potential of a few volts negative to select secondary electrons of energy greater than a selected value; and the third grid G3 may be connected to G1. The detector may include a screen W which reduces the solid angle subtended by the collector SC and thereby improves the discrimination against fast scattered electrons. In the example shown the grids are planar and parallel, and are disposed along the normal to the specimen S. The grids may alternatively be part-spherical, or even cylindrical surrounding the normal.
GB300/69A 1969-01-02 1969-01-02 Electron beam apparatus Expired GB1246744A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB300/69A GB1246744A (en) 1969-01-02 1969-01-02 Electron beam apparatus
US889762A US3646344A (en) 1969-01-02 1969-12-31 Scanning electron beam apparatus for viewing potential distribution on specimen surfaces
FR6945615A FR2027656A1 (en) 1969-01-02 1969-12-31
DE19702000217 DE2000217B2 (en) 1969-01-02 1970-01-02 EMISSION ELECTRON MICROSCOPE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB300/69A GB1246744A (en) 1969-01-02 1969-01-02 Electron beam apparatus

Publications (1)

Publication Number Publication Date
GB1246744A true GB1246744A (en) 1971-09-15

Family

ID=9701950

Family Applications (1)

Application Number Title Priority Date Filing Date
GB300/69A Expired GB1246744A (en) 1969-01-02 1969-01-02 Electron beam apparatus

Country Status (4)

Country Link
US (1) US3646344A (en)
DE (1) DE2000217B2 (en)
FR (1) FR2027656A1 (en)
GB (1) GB1246744A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2823642A1 (en) * 1978-05-30 1980-01-03 Siemens Ag METHOD FOR CONTACTLESS POTENTIAL MEASUREMENT ON AN ELECTRONIC COMPONENT

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5323663B1 (en) * 1971-04-12 1978-07-15
JPS5214999B2 (en) * 1972-03-21 1977-04-26
US3775610A (en) * 1972-06-20 1973-11-27 Us Air Force Method and system for secondary emission detection
US3894233A (en) * 1972-10-27 1975-07-08 Hitachi Ltd Ion microprobe analyzer
DE2902495A1 (en) * 1979-01-23 1980-07-31 Siemens Ag DEVICE FOR CONTACTLESS POTENTIAL MEASUREMENT
JPS55156867A (en) * 1979-05-28 1980-12-06 Hitachi Ltd Potential measuring device
JPS5932145A (en) * 1982-08-16 1984-02-21 Hitachi Ltd Potential detector
JPS607049A (en) * 1983-06-24 1985-01-14 Hitachi Ltd Electric potential measuring device
US4864228A (en) * 1985-03-15 1989-09-05 Fairchild Camera And Instrument Corporation Electron beam test probe for integrated circuit testing
US4721909A (en) * 1985-08-16 1988-01-26 Schlumberger Technology Corporation Apparatus for pulsing electron beams
DE69224506T2 (en) * 1991-11-27 1998-10-01 Hitachi Instruments Eng Electron beam device
DE69901787T2 (en) * 1999-03-31 2002-11-21 Advantest Corp., Tokio/Tokyo Method and device for mapping a surface potential
US6359451B1 (en) 2000-02-11 2002-03-19 Image Graphics Incorporated System for contactless testing of printed circuit boards
WO2001058558A2 (en) 2000-02-14 2001-08-16 Eco 3 Max Inc. Process for removing volatile organic compounds from an air stream and apparatus therefor
WO2017126089A1 (en) * 2016-01-21 2017-07-27 公益財団法人高輝度光科学研究センター Retarding potential type energy analyzer

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3461306A (en) * 1967-04-27 1969-08-12 Gen Electric Electron probe microanalyzer for measuring the differential energy response of auger electrons

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2823642A1 (en) * 1978-05-30 1980-01-03 Siemens Ag METHOD FOR CONTACTLESS POTENTIAL MEASUREMENT ON AN ELECTRONIC COMPONENT

Also Published As

Publication number Publication date
FR2027656A1 (en) 1970-10-02
DE2000217A1 (en) 1970-07-09
DE2000217B2 (en) 1972-01-13
US3646344A (en) 1972-02-29

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