FR2027656A1 - - Google Patents

Info

Publication number
FR2027656A1
FR2027656A1 FR6945615A FR6945615A FR2027656A1 FR 2027656 A1 FR2027656 A1 FR 2027656A1 FR 6945615 A FR6945615 A FR 6945615A FR 6945615 A FR6945615 A FR 6945615A FR 2027656 A1 FR2027656 A1 FR 2027656A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR6945615A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of FR2027656A1 publication Critical patent/FR2027656A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/266—Measurement of magnetic- or electric fields in the object; Lorentzmicroscopy
    • H01J37/268—Measurement of magnetic- or electric fields in the object; Lorentzmicroscopy with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR6945615A 1969-01-02 1969-12-31 Withdrawn FR2027656A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB300/69A GB1246744A (en) 1969-01-02 1969-01-02 Electron beam apparatus

Publications (1)

Publication Number Publication Date
FR2027656A1 true FR2027656A1 (en) 1970-10-02

Family

ID=9701950

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6945615A Withdrawn FR2027656A1 (en) 1969-01-02 1969-12-31

Country Status (4)

Country Link
US (1) US3646344A (en)
DE (1) DE2000217B2 (en)
FR (1) FR2027656A1 (en)
GB (1) GB1246744A (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5323663B1 (en) * 1971-04-12 1978-07-15
JPS5214999B2 (en) * 1972-03-21 1977-04-26
US3775610A (en) * 1972-06-20 1973-11-27 Us Air Force Method and system for secondary emission detection
US3894233A (en) * 1972-10-27 1975-07-08 Hitachi Ltd Ion microprobe analyzer
DE2823642A1 (en) * 1978-05-30 1980-01-03 Siemens Ag METHOD FOR CONTACTLESS POTENTIAL MEASUREMENT ON AN ELECTRONIC COMPONENT
DE2902495A1 (en) * 1979-01-23 1980-07-31 Siemens Ag DEVICE FOR CONTACTLESS POTENTIAL MEASUREMENT
JPS55156867A (en) * 1979-05-28 1980-12-06 Hitachi Ltd Potential measuring device
JPS5932145A (en) * 1982-08-16 1984-02-21 Hitachi Ltd Potential detector
JPS607049A (en) * 1983-06-24 1985-01-14 Hitachi Ltd Electric potential measuring device
US4864228A (en) * 1985-03-15 1989-09-05 Fairchild Camera And Instrument Corporation Electron beam test probe for integrated circuit testing
US4721909A (en) * 1985-08-16 1988-01-26 Schlumberger Technology Corporation Apparatus for pulsing electron beams
EP0949653B1 (en) * 1991-11-27 2010-02-17 Hitachi, Ltd. Electron beam apparatus
EP1049132B1 (en) * 1999-03-31 2002-06-12 Advantest Corporation Method and apparatus for imaging a surface potential
US6359451B1 (en) 2000-02-11 2002-03-19 Image Graphics Incorporated System for contactless testing of printed circuit boards
WO2001058558A2 (en) 2000-02-14 2001-08-16 Eco 3 Max Inc. Process for removing volatile organic compounds from an air stream and apparatus therefor
EP3330998B1 (en) * 2016-01-21 2021-10-13 Japan Synchrotron Radiation Research Institute Retarding potential type energy analyzer

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3461306A (en) * 1967-04-27 1969-08-12 Gen Electric Electron probe microanalyzer for measuring the differential energy response of auger electrons

Also Published As

Publication number Publication date
DE2000217B2 (en) 1972-01-13
US3646344A (en) 1972-02-29
GB1246744A (en) 1971-09-15
DE2000217A1 (en) 1970-07-09

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Legal Events

Date Code Title Description
ST Notification of lapse