JPS561453A - Electron microscope - Google Patents

Electron microscope

Info

Publication number
JPS561453A
JPS561453A JP8007880A JP8007880A JPS561453A JP S561453 A JPS561453 A JP S561453A JP 8007880 A JP8007880 A JP 8007880A JP 8007880 A JP8007880 A JP 8007880A JP S561453 A JPS561453 A JP S561453A
Authority
JP
Japan
Prior art keywords
electron microscope
microscope
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8007880A
Other languages
Japanese (ja)
Other versions
JPS6346954B2 (en
Inventor
Hotsutsu Uorutaa
Gaburieere Kojimo
Pooro Furanchiesuko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOSUTORUTSUIOONI AERONAUTEIKE
Original Assignee
KOSUTORUTSUIOONI AERONAUTEIKE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KOSUTORUTSUIOONI AERONAUTEIKE filed Critical KOSUTORUTSUIOONI AERONAUTEIKE
Publication of JPS561453A publication Critical patent/JPS561453A/en
Publication of JPS6346954B2 publication Critical patent/JPS6346954B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
JP8007880A 1979-06-12 1980-06-12 Electron microscope Granted JPS561453A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT68260/79A IT1118775B (en) 1979-06-12 1979-06-12 ELECTRONIC SCAN MICROSCOPE WITH CHAMBER THAT CAN BE DISMANTLED PARTICULARLY FOR THE OBSERVATION OF PIECES OF RELATIVELY HIGH DIMENSIONS

Publications (2)

Publication Number Publication Date
JPS561453A true JPS561453A (en) 1981-01-09
JPS6346954B2 JPS6346954B2 (en) 1988-09-19

Family

ID=11308732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8007880A Granted JPS561453A (en) 1979-06-12 1980-06-12 Electron microscope

Country Status (8)

Country Link
US (1) US4313056A (en)
JP (1) JPS561453A (en)
CH (1) CH640366A5 (en)
DE (1) DE3022094A1 (en)
FR (1) FR2458893A1 (en)
GB (1) GB2052848B (en)
IT (1) IT1118775B (en)
NL (1) NL8003286A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4418162A1 (en) * 1994-05-25 1995-11-30 Fraunhofer Ges Forschung Appts. for performing processes of electron beam technology in vacuum
US5820723A (en) * 1996-06-05 1998-10-13 Lam Research Corporation Universal vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support
US5948704A (en) * 1996-06-05 1999-09-07 Lam Research Corporation High flow vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US408830A (en) * 1889-08-13 Watch-case
US2627580A (en) * 1948-10-23 1953-02-03 Rca Corp Demountable vacuumtight seal
FR1407511A (en) * 1963-09-18 1965-07-30 Trueb Tauber & Co Device for the examination of object surfaces by electron microscopy
US3405264A (en) * 1965-08-24 1968-10-08 Rca Corp Specimen injector for electron microscopes with a rotatable specimen holder

Also Published As

Publication number Publication date
IT7968260A0 (en) 1979-06-12
IT1118775B (en) 1986-03-03
FR2458893A1 (en) 1981-01-02
FR2458893B1 (en) 1984-12-07
GB2052848B (en) 1983-01-26
US4313056A (en) 1982-01-26
GB2052848A (en) 1981-01-28
DE3022094A1 (en) 1980-12-18
CH640366A5 (en) 1983-12-30
JPS6346954B2 (en) 1988-09-19
NL8003286A (en) 1980-12-16

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