GB2019085B - Electron microscopes - Google Patents

Electron microscopes

Info

Publication number
GB2019085B
GB2019085B GB7912909A GB7912909A GB2019085B GB 2019085 B GB2019085 B GB 2019085B GB 7912909 A GB7912909 A GB 7912909A GB 7912909 A GB7912909 A GB 7912909A GB 2019085 B GB2019085 B GB 2019085B
Authority
GB
United Kingdom
Prior art keywords
electron microscopes
microscopes
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7912909A
Other versions
GB2019085A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of GB2019085A publication Critical patent/GB2019085A/en
Application granted granted Critical
Publication of GB2019085B publication Critical patent/GB2019085B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/263—Contrast, resolution or power of penetration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB7912909A 1978-04-17 1979-04-12 Electron microscopes Expired GB2019085B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7804038A NL7804038A (en) 1978-04-17 1978-04-17 ELECTRONIC MICROSKOP.

Publications (2)

Publication Number Publication Date
GB2019085A GB2019085A (en) 1979-10-24
GB2019085B true GB2019085B (en) 1982-08-04

Family

ID=19830665

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7912909A Expired GB2019085B (en) 1978-04-17 1979-04-12 Electron microscopes

Country Status (5)

Country Link
JP (1) JPS54139458A (en)
DE (1) DE2915203A1 (en)
FR (1) FR2423861A1 (en)
GB (1) GB2019085B (en)
NL (1) NL7804038A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56165255A (en) * 1980-05-26 1981-12-18 Hitachi Ltd Image indicating method for transmission scan electron microscope
JPH0616403B2 (en) * 1983-06-10 1994-03-02 株式会社日立製作所 High-resolution non-interferometric image observation method
JPS6149362A (en) * 1984-08-17 1986-03-11 Hitachi Ltd Focusion device of television electron microscope
JP4824542B2 (en) 2003-05-08 2011-11-30 ザ サイエンス アンド テクノロジー ファシリティーズ カウンシル electronic microscope
JP2006302523A (en) * 2005-04-15 2006-11-02 Jeol Ltd Transmission electron microscope having scan image observation function
JP6876418B2 (en) 2016-12-05 2021-05-26 日本電子株式会社 Image acquisition method and electron microscope

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1248201A (en) * 1967-07-03 1971-09-29 Nat Res Dev Electron microscopes
JPS4922768B1 (en) * 1970-09-11 1974-06-11
US3917946A (en) * 1972-04-12 1975-11-04 Philips Corp Electron-optical device for the recording of selected diffraction patterns
JPS4917905A (en) * 1972-06-07 1974-02-16
JPS4922576A (en) * 1972-06-26 1974-02-28
GB1443562A (en) * 1973-08-14 1976-07-21 Ontario Research Foundation Method and apparatus for displaying images stereoscopically and for deriving signals from a scanning electron microscope for producing steroscopic images
JPS5118307A (en) * 1974-10-11 1976-02-13 Sanyo Electric Co OOFUKUDOSHIKI ATSUSHUKUKI
NL7510276A (en) * 1975-09-01 1977-03-03 Philips Nv ELECTRONIC MICROSKOP.

Also Published As

Publication number Publication date
NL7804038A (en) 1979-10-19
GB2019085A (en) 1979-10-24
FR2423861A1 (en) 1979-11-16
DE2915203A1 (en) 1979-10-25
JPS54139458A (en) 1979-10-29
FR2423861B1 (en) 1985-03-01

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee