FR1407511A - Device for the examination of object surfaces by electron microscopy - Google Patents
Device for the examination of object surfaces by electron microscopyInfo
- Publication number
- FR1407511A FR1407511A FR987811A FR987811A FR1407511A FR 1407511 A FR1407511 A FR 1407511A FR 987811 A FR987811 A FR 987811A FR 987811 A FR987811 A FR 987811A FR 1407511 A FR1407511 A FR 1407511A
- Authority
- FR
- France
- Prior art keywords
- examination
- electron microscopy
- object surfaces
- microscopy
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/295—Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/15—External mechanical adjustment of electron or ion optical components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/16—Vessels; Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/248—Components associated with high voltage supply
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/285—Emission microscopes, e.g. field-emission microscopes
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR987811A FR1407511A (en) | 1963-09-18 | 1964-09-11 | Device for the examination of object surfaces by electron microscopy |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH1148963A CH409167A (en) | 1963-09-18 | 1963-09-18 | Device for the electron-optical examination of object surfaces |
FR987811A FR1407511A (en) | 1963-09-18 | 1964-09-11 | Device for the examination of object surfaces by electron microscopy |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1407511A true FR1407511A (en) | 1965-07-30 |
Family
ID=25708398
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR987811A Expired FR1407511A (en) | 1963-09-18 | 1964-09-11 | Device for the examination of object surfaces by electron microscopy |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1407511A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2458893A1 (en) * | 1979-06-12 | 1981-01-02 | Agusta Aeronaut Costr | ELECTRONIC ANALYSIS MICROSCOPE WITH A CHAMBER FOR OBSERVING RELATIVELY LARGE DIMENSION PARTS |
-
1964
- 1964-09-11 FR FR987811A patent/FR1407511A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2458893A1 (en) * | 1979-06-12 | 1981-01-02 | Agusta Aeronaut Costr | ELECTRONIC ANALYSIS MICROSCOPE WITH A CHAMBER FOR OBSERVING RELATIVELY LARGE DIMENSION PARTS |
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