FR1407511A - Device for the examination of object surfaces by electron microscopy - Google Patents

Device for the examination of object surfaces by electron microscopy

Info

Publication number
FR1407511A
FR1407511A FR987811A FR987811A FR1407511A FR 1407511 A FR1407511 A FR 1407511A FR 987811 A FR987811 A FR 987811A FR 987811 A FR987811 A FR 987811A FR 1407511 A FR1407511 A FR 1407511A
Authority
FR
France
Prior art keywords
examination
electron microscopy
object surfaces
microscopy
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR987811A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trueb Tauber & Co
Original Assignee
Trueb Tauber & Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH1148963A external-priority patent/CH409167A/en
Application filed by Trueb Tauber & Co filed Critical Trueb Tauber & Co
Priority to FR987811A priority Critical patent/FR1407511A/en
Application granted granted Critical
Publication of FR1407511A publication Critical patent/FR1407511A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295Electron or ion diffraction tubes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15External mechanical adjustment of electron or ion optical components
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/16Vessels; Containers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/248Components associated with high voltage supply
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285Emission microscopes, e.g. field-emission microscopes
FR987811A 1963-09-18 1964-09-11 Device for the examination of object surfaces by electron microscopy Expired FR1407511A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR987811A FR1407511A (en) 1963-09-18 1964-09-11 Device for the examination of object surfaces by electron microscopy

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH1148963A CH409167A (en) 1963-09-18 1963-09-18 Device for the electron-optical examination of object surfaces
FR987811A FR1407511A (en) 1963-09-18 1964-09-11 Device for the examination of object surfaces by electron microscopy

Publications (1)

Publication Number Publication Date
FR1407511A true FR1407511A (en) 1965-07-30

Family

ID=25708398

Family Applications (1)

Application Number Title Priority Date Filing Date
FR987811A Expired FR1407511A (en) 1963-09-18 1964-09-11 Device for the examination of object surfaces by electron microscopy

Country Status (1)

Country Link
FR (1) FR1407511A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2458893A1 (en) * 1979-06-12 1981-01-02 Agusta Aeronaut Costr ELECTRONIC ANALYSIS MICROSCOPE WITH A CHAMBER FOR OBSERVING RELATIVELY LARGE DIMENSION PARTS

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2458893A1 (en) * 1979-06-12 1981-01-02 Agusta Aeronaut Costr ELECTRONIC ANALYSIS MICROSCOPE WITH A CHAMBER FOR OBSERVING RELATIVELY LARGE DIMENSION PARTS

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